Advisor : David T.W. Lin Reporter : Yu-Jie Shen Date : 2017/06/23 Fabrication of the Force-feedback Sensor Based on the AlN Doped ZnO Piezoelectric Film Advisor : David T.W. Lin Reporter : Yu-Jie Shen

Outline 1 2 3 4 5 Introduction Purpose Experimental Method Results and Discussions Conclusion 1 2 3 4 5

Figure 1. The schematic of Da Vinci surgical system[2]. Introduction The world of biosensors is expanding at a rapid pace with an ever increasing demand for more sensitive miniaturized devices[1]. In addition, the tactile sensor can be applied on the minimal invasive surgery. Figure 1. The schematic of Da Vinci surgical system[2].

Purpose To fabricate the force-feedback sensor based on the piezoelectric thin film. To measure and define the relationship between the feedback electric current of bio-tissue.

Piezoelectric Principle Piezoelectric effect is the ability of certain materials to generate an electric charge in response to applied mechanical stress[3]. Figure 2. Voltage applied to piezoelectric mater causes it to change shape[4]. 

Zinc Acetate Dihydrate Solution parameters Name Chemical formula Purity Viscosity PH Zinc Acetate Dihydrate Zn(CH3COO)2∙2H2O 98% 6-7 Aluminum Nitride AlN 99.5%, 65-75 nm, Hexagonal Ethylene Glycol C2H6O2 99% 21CPS 6-7.5 Ethanol C2H5OH 99.4% 1.2CPS 7 Triethanolamine C6H15NO3 10.5 Table 1. The parameters of AlN Doped ZnO solution.

High temperature furnace Process parameters Temperature Time Spin coating Room temperature 600 RPM 800 RPM 1000 RPM Heating 150 ℃ 25 Mins High temperature furnace 200 ℃ 250 ℃ 1 Hour Table 2. The parameters of AlN Doped ZnO process.

Deposition methods Many researchers reported that the deposition of the ZnO thin film using magneton sputtering and CVD but both methods are expensive. Therefore the sol-gel spin coating method which is comparatively low cost and simple technique chosen to prepare nano structured ZnO thin film.

Deposition methods Sol-Gel Method Advantage Disadvantage 1. There are high purity and uniformity. 2. The ingredients are controlled easy. 3. The expensive vacuum equipment is unnecessary. 4. The cost of process is low. 1.The cost of raw material is high and the reaction time is long. 2.The film is easy residual carbon. 3.The film is easy to agglomerate. 8

Flow chart of fabrication Ethanol Glycol Zinc acetate Triethanolamine Stirring was continued for three hours holding the temperature 80 ℃ Aluminum Nitride Deposition of 24hr Atmospheric plasma Spain coating At 150˚C for 25min three time High temperature furnace X-ray Diffraction (XRD) Scanning Electron Microscopy (SEM) Oscilloscope test piezoelectric film

Powder preparation Rigorous stirring Deposition of 24hr Atmospheric plasma High temperature furnace Baking Spin coating

Measurement

SEM (Scanning Electron Microscopy ) The SEM mode is detection of secondary electrons emitted by atoms excited by the electron beam. The electron beam is generally scanned in a raster scan pattern, and the beam's position is combined with the detected signal to produce an image.

XRD (X-ray diffraction) X-ray crystallography is a technique used for determining the atomic and molecular structure of a crystal, in which the crystalline atoms cause a beam of incident X-rays to diffract into many specific directions.

Results & Discussion (a) (b) (c) Figure 3. The SEM photograph of AlN doped ZnO thin film, spin coating speed (a) 600 RPM (b) 800 RPM (c) 1000 RPM (annealing temperature:200°C)

Results & Discussion (a) (b) (c) Figure 4. The SEM photograph of AlN doped ZnO thin film, spin coating speed (a) 600 RPM (b) 800 RPM (c) 1000 RPM (annealing temperature:250°C)

Results & Discussion (a) (b) Figure 5. The XRD of AlN doped ZnO thin film with different spin coating speed (a)annealing temperature at 200℃ ; (b) annealing temperature at 250℃.

Results & Discussion Figure 6. Voltage response of AlN doped ZnO thin film of tactile sensor with force-feedback test (0.5N-2.5N)on polyimide and copper cladded substrate (600 RPM).

Results & Discussion Figure 7. Voltage response of AlN doped ZnO thin film of tactile sensor with force-feedback test (0.5N-2.5N)on polyimide and copper cladded substrate (800 RPM).

Results & Discussion Figure 8. Voltage response of AlN doped ZnO thin film of tactile sensor with force-feedback test (0.5N-2.5N)on polyimide and copper cladded substrate (1000 RPM).

Conclusion In this study, the fabrication of the force-feedback sensor based on the piezoelectric thin film is developed. To integrate and force feedback sensor and Arduino devices. The best force-feedback response is 1000 RPM on the copper.

References [1] http://allaboutroboticsurgery.com/surgicalrobots.html [2] Paul J. Johnson, MS, David E. Schmidt, PhD, and Umamaheswar Duvvuri, MD, PhD“Output control of da Vinci surgical system’s surgical graspers”, Science Direct, Vol. 186, pp.56-62, 2014. [3] Yingbin Bian, Moning Liua, Genshui Ke, Yigang Chen, Jim DiBattista, Eason Chan, Yimou Yang“Aluminum nitride thin film growth and applications for heat dissipation” Surface & Coatings Technology, Vol. 267. pp. 65-69, 2015. [4] David T.W. Lin, You-Peng Yuan, Yuh Chung Hu“Fabrication of ZnO Thin Film Sensor for CO2 Monitoring.” IEEA Environment, Energy and Applications, 2015.

Thank you for your attention That’s all my presentation, thank you for your attention.