Automatic alignment of a diffraction phase microscope for wafer defect inspection Graduate mentor: Renjie Zhou Faculty mentor: Lynford Goddard By: Melissa Crawford (undergraduate student)

Project Summary The project involve creating a motion controlled stage that is a double to part of a setup in another lab. On this setup I am working to precisely place a very small pinhole in the Fourier plane of a diffraction phase microscope. On this setup I am trying to create an automatic alignment system and the control code to go along with it. When I am done with my part of the project, it has to be transferred to the overall setup. My work is to help improve the stability of this microscope tool and save a lot of time that investigators currently spend on performing alignment.

1. General Lab Safety: http://www.drs.illinois.edu/training/index.aspx 2. Laser Safety: http://www.drs.illinois.edu/training/index.aspx 3. Electrical Safety: http://www.drs.illinois.edu/training/index.aspx 4. Attached safety documents  Paper Optically monitoring and controlling nanoscale topography during semiconductor etching --http://www.nature.com/lsa/journal/v1/n9/pdf/lsa201230a.pdf Additional information Product manuals http://www.thorlabs.com/catalogpages/V21/609.PDF http://www.thorlabs.com/Thorcat/11800/ZST25B-Manual.pdf http://www.thorlabs.com/catalogpages/V21/256.PDF http://www.thorlabs.com/Thorcat/15700/TST001-Manual.pdf http://www.thorlabs.com/catalogpages/V21/621.PDF http://www.thorlabs.com/Thorcat/15800/TCH002-Manual.pdf Fourier Transforms http://www.youtube.com/watch?v=gZNm7L96pfY General Optics  http://spie.org/Documents/Publications/00%20STEP%20Module%2003.pdf Coding Matlab Laview

Tasks 2/25/13 Build basic assembly for holding pinhole filter 3/5/13 Create and initial alignment system to get close 3/19/13 Alignment system to finely adjust system to optimal location 4/1/13 Transition system to Beckman 4/10/13 Summarize results