Introduction of NMIJ Gas Flow Standards Section Toshihiro Morioka Gas Flow Standards Section Flow Standards Division NMIJ/AIST

Outline of GFSS Flow Rate Air Speed Low Gas Flow (various gases) Medium Gas Flow (air only) Air Speed Low Air Speed Medium Air Speed

List of Facilities Flow Rate Low Gas Flow Medium Gas Flow Air Speed ・CVT System ・Weighing System ・Calibration Facility based on CFVNs Medium Gas Flow ・CVT System ・Closed-Loop Calibration Faccility Air Speed Low Air Speed ・Tow Carriage in Underground Tunnel Medium Air Speed ・Rotating Disk to Calibrate LDV ・Calibration Wind Tunnel

Flow Rate Ranges Low Gas Flow Medium Gas Flow (various gases) (air only) 5 m3/h 200 m3/h CVT 10 μg/min 5 mg/min 180 g/min Weighing System CFNVs vs. Tank CVT CFVNs vs. CVT 1000 m3/h Flowmeters vs. CVT Closed-Loop Calibration Facility Calibration Facility Flowmeters vs. CFVNs Multi-Nozzle Chamber Flowmeters vs. CFVNs 5 m3/h@0.1 MPa - 1000 m3/h@0.5 MPa 10 μg/min - 180 g/min 8 mm3/h 245 cm3/h 5 m3/h 9 m3/h 1000 m3/h 5000 m3/h Flow Rate converted into Atmospheric Condition

Rotating Disk, LDV, Wind Tunnel Air Speed Ranges Low Air Speed Medium Air Speed 5 cm/s 1.5 m/s Tow Carriage in Underground Tunnel 1.3 m/s 40 m/s Rotating Disk, LDV, Wind Tunnel

Automatic Pressure Controller Low Gas Flow : Weighing System 10 μg/min - 5 mg/min - 180 g/min Flow Rate converted into 1 bar : 245 cm3/h - 5 m3/h Uncertainty : 0.05 % - 0.25 % (k=2) Test Gases : Air, N2, H2, CH4, ... Vacuum Pump Filter Exhaust High-Flow Line Low-Flow Line Balance Systems Supply Gas Automatic Pressure Controller Three-Way Valve Cylinder Nozzle Holder Calibration Lines DUT : CFVNs Electric Balance Resolution : 0.01 mg Mechanical Balance Resolution : 0.1 mg

Automatic Pressure Controller Low Gas Flow : CVT System 10 μg/min - 5 mg/min - 180 g/min Flow Rate converted into 1 bar : 8 mm3/h - 245 cm3/h Uncertainty : 0.42 % (k=2) Vacuum Chamber Vacuum Pump Vacuum Pump Exhaust Exhaust DUT Constant Volume Tank Three-Way Valve Supply Gas Test Gases : Air, N2, H2, CH4, ... Automatic Pressure Controller CVT in Vacuum Chamber Volumes : 0.1 L and 0.3 L Calibration Lines

Low Gas Flow : Calibration Facility 10 μg/min - 5 mg/min - 180 g/min Flow Rate converted into 1 bar : 245 cm3/h - 5 m3/h Uncertainty : 0.07 % - 0.26 % (k=2) Test Gases : Air, N2, H2, CH4, ... Reference Standard DUT Nozzle Holder Supply Gas Exhaust Automatic Pressure Controller Expand Flow Rate Range Ref. : CFVNs Multi-Nozzle Chamber Parallel Connection of 5 CFVNs Calibration Lines

Medium Gas Flow : CVT System 5 m3/h - 200 m3/h - 1000 m3/h @ 0.1 - 0.5 MPa Flow Rate converted into 1 bar : 5 m3/h - 1000 m3/h Uncertainty : 0.17 % (k=2) Test Gases : Air Constant Volume Tank 11 m3 Double-Walled, Water Circulation 　　　　　　　　for Quick-Stabilization of Temperature

Medium Gas Flow : Closed-Loop CF 5 m3/h - 200 m3/h - 1000 m3/h @ 0.1 - 0.5 MPa Flow Rate converted into 1 bar : 5 m3/h - 5000 m3/h Uncertainty : 0.28 % (k=2) Test Gases : Air Closed-Loop Calibration Facility Ref. : Parallel Connection of 12 CFVNs

Low Air Speed : Tow Carriage 5 cm/s - 1.5 m/s Total Length : 45 m Uncertainty : 7 mm/s - 9 mm/s (k=2) Double-Walled Velocity Measurement by Laser Interferometer Tow Carriage Unmanned Space, Stable Temperature, No Wind Tow Carriage in Underground Tunnel

Ref. : Ultrasonic Anemometer Medium Air Speed : Rotating Disk, etc. 1.3 m/s - 40 m/s Rotating Disk Rotating Disk LDV Uncertainty : 0.1 % - 0.5 % (k=2) Ref. : Ultrasonic Anemometer Uncertainty : 0.3 % - 0.7 % (k=2) Rotating Disk, LDV, and Wind Tunnel