Summary of Samples Photolithography Samples: EBL Samples: Pieces mask Bonding Si thinning Ni Dots Pillar Etching 2 PL-mask 4 ✔ 10 um 1um size 80 um EBL Samples: 3 pieces of EP1, 3 pieces of EP2, and 5 pieces of EP3, was written in CINT Pieces mask Bonding Si thinning Ni Dots Pillar Etching 2 EP1_Linear ✔ 1 EP2_HiDens EP3_NetW

Sample #: 131016D 2 um Pillar Etching 100nm SiO2 Deposite PMMA A4 Spin-coating (~ 300nm)

Summary of Masks PL-mask 4 PL-mask 6 EP1_Linear EP2_HighDensity 3um line width, 2um space EP1_Linear EP2_HighDensity EP3_Network 300nm line width, 500nm space, 500nm tip 300nm line width, 700nm space, 500nm tip 300nm line width, 500nm tip