MOSFET CAPACITANCES Very Large Scale Integration 1 - VLSI 1

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Presentation transcript:

MOSFET CAPACITANCES Very Large Scale Integration 1 - VLSI 1 Selçuk İLKE, Umut YILMAZER, Mehmet BATI ITU VLSI Laboratories Istanbul Technical University 13.09.2018

MOS CAPACITANCES There are three main forms: Gate capacitance (gate of transistor) Diffusion capacitance (drain region) Routing capacitance (metal, etc.) intrinsic capacitances oxide capacitances extrinsic capacitances Depletion capacitance Junction capacitances Overlap capacitances (operation region independent) Direct overlap Outer fringe Inner fringe 13.09.2018

MOS CAPACITANCES Triode Region Saturation Region Cut-Off Region (Drain no longer connected to the channel) (Conducting channel region completely gone) 13.09.2018

MOS CAPACITANCES Concerns about MOS C’s charge conservation problems ‘charge based models’ capacitance matrix non-reciprocal capacitances short channel effects non-quasi-static effects 13.09.2018

REFERENCES Threshold Voltage and MOSFET Capacitances, Mark Lundstrom, 2006 Metal Oxide Semiconductor Field Effect Transistors, Dr. Sabar D. Hutagalung MOS TRANSISTOR THEORY, Kenneth R. Laker, University of Pennsylvania 13.09.2018