Update from Birmingham Phil Allport, Daniel Briglin, Kostas Nikolopoulos, Simon Pyatt, Juergen Thomas, John Wilson allport@cern.ch WP3 Meeting 29th September 2016 1

TM Module Metrology Update

TM Hybrid Panel – TM3

TM Hybrid Panel – TM3 1. Circular scan on Glass ASIC surface. 2. Double Point Scan on each fiducial. 3. Calculate distance between planes and subtract 300μm to attain Glue gap ASIC Surface to Touchdown pad

Laser Measurement Scans in red TM Module Measurement Right Hand Hybrid Left Hand Hybrid Laser Measurement Scans in red

Measurements in Microns TM Module Measurement Right Hand Hybrid Left Hand Hybrid 699 772 Glue gap 316 380 Glue gap Initial Assumptions; Hybrid = 300, ASIC = 300 Uncertainty over hybrid thickness has led to Right Upper being mounted with low glue thickness but no glue seepage Measurements in Microns  Check Hybrid and glass ASIC dimensions

Glass ASIC Measurement Smart Scope vs Micrometre Measured 15 pattern glass ASIC using OGP Smart Scope and a Micrometre. Glass ASIC Micrometre OGP Smart scope (Microns) 1 294 290 -4 2 299 301 3 283 4 288 5 285 282 -3 6 279 7 298 8 291 9 10 289 292 11 295 12 13 287 -1 14 -5 15 Average 0.2 Measurement program on Smart Scope

Glass ASIC Measurement Smart Scope vs Micrometre Excellent agreement between Micrometre and Smart Scope results

TM4 – Hybrid 0 Measurement Methods of measurement Micrometre was used to measure the thickness of each ASIC pad (red circle) Linear scan was used to measure the thickness of each ASIC pad (red line) Circular scan was used to measure the thickness of each ASIC pad (red circle)

TM4 – Hybrid 0 Measurement Good agreement between Micrometre and Smart Scope circular scan – The average difference between the Micrometre and the Smart Scope is 3.40 (± 2.59) microns.