Home Module 1: Safety Module 2: Alarms Module 3: Maintenance

Module 1: Safety Module 1: Safety

Safety Rules Before operating any Mega Fluid Systems, Inc. equipment, follow these safety rules: Safety Rules Maintain compliance with all local, state, and federal regulations, ordinances, laws, etc., that require handling all processing solutions, chemicals, and acids, as well as all wastes produced by this system. All personnel must have proper training in related safety procedures. Do not allow unauthorized or untrained personnel in the area of the system. Personal Protective Equipment (PPE) is required. Follow requirements listed in the MSDS for the appropriate chemical. Follow all site specific rules for PPE.

Safety Rules, continued Before operating any Mega Fluid Systems, Inc. equipment, follow these safety rules: Safety Rules Treat all chemical exposures as potentially serious. Neutralize and irrigate the exposed area and seek first aid immediately as outlined in the MSDS. Use extreme caution when working with electrical equipment. Always assume high voltage exists; use lockout and tagout procedures during maintenance. Treat all chemical spills or leaks as hazardous and clean up immediately.

Safety Features Emergency Machine Off (EMO) The EMO provides the means to immediately shut down the tool. Pressing the EMO immediately interrupts system power and stops all functions of the tool. Safety Features Door Interlocks Opening an interlocked door triggers an alarm (unless the interlock bypass is activated) To prevent disrupting chemical/slurry dispense, bypass interlocked doors before opening (as needed; return to normal operating mode as soon as possible) Leak Detectors Stops the tool and activates a critical alarm

Safety Hazards & Symbols Pay attention to system labeling! Safety Hazards & Symbols DANGER Pick one (until you’ve picked all 3) WARNING CAUTION

Safety Hazards & Symbols Pay attention to system labeling! Safety Hazards & Symbols DANGER DANGER indicates a hazardous situation which, if not avoided, WILL result in death or serious injury. WARNING CAUTION

Safety Hazards & Symbols Pay attention to system labeling! Safety Hazards & Symbols DANGER WARNING indicates a potentially hazardous situation which, if not avoided, COULD result in death or serious injury. WARNING CAUTION

Safety Hazards & Symbols Pay attention to system labeling! Safety Hazards & Symbols DANGER CAUTION indicates a potentially hazardous situation which, if not avoided, may result in minor or moderate injuries. WARNING CAUTION

Lockout/Tagout Bleed off the pressure or flush all lines carrying hazardous chemicals. Turn off or return all operating controls to the neutral mode. Lockout/Tagout Relieve, disconnect, restrain, or otherwise render safe residual or stored energy such as capacitors, gas, steam, water pressure, air, and hydraulic. Place the AC Disconnect switch in the Off position. Place and lock a padlock on the disconnect switch.

Lockout/Tagout, continued Attach a lockout tag to the switch which indicates the system is locked out for service purposes and identifies those employees authorized to remove the lock and tag. Test the valve or switch to ensure the control cannot be moved to the activated position. Lockout/Tagout Ensure all energy sources have been de-energized on dual or multi- energy source operations prior to beginning work. Re-test the controls of the individual machine or equipment to verify the operation is positively off.

EMO button must be accessible! Emergency Off (EMO) The EMO provides the means to immediately shut down the tool. Pressing the EMO immediately interrupts system power and stops all functions of the tool. CAUTION EMO button must be accessible! Never disable or cover an EMO button. This can prevent the system from being stopped in the event of an emergency. Emergency Off (EMO) Pressing the EMO button is not a safe alternative to the prescribed lockout/tagout procedure.

Key Failure Points The following procedures (but not limited to) may place you at risk of chemical exposure: Changing out an empty supply drum/tote Sampling system chemical Flushing the system Checking for leaks Performing a particle count Transporting chemicals to the system Filling the pipes with air Changing pumps, valves, filters, pressure switches, etc. Handling PPE after use Key Failure Points

Spill Mitigation Mega systems are designed to minimize the possibility of an unwanted chemical release. The cabinet is designed to contain 110% of the total piping volume plus the total contents of the largest reservoir. If a spill should happen: Treat all chemical spills as extremely hazardous. Notify the proper site authority. Follow all site specific rules for chemical spills. Follow all information contained in the MSDS. If possible, contain the spill with absorbent barriers. If possible, neutralize the spill according to the MSDS. Spill Mitigation

Module 4: Alarms Module 4: Alarms

Alarm Types Alarms are activated when a system interlock is tripped. CRITICAL alarms are activated by urgent situations that require immediate attention and threaten the performance of the system. A critical alarm sounds the audible annunciator and shuts down the system. A chemical system shutdown (CSS) critical alarm stops the distribution pumping. Alarm Types

Alarm Types, continued Alarms are activated when a system interlock is tripped. PROCESS alarms are activated by situations that require immediate attention, but do not threaten the performance of the system. An audible annunciator is sounded and the sequence of actions are paused. Process Alarms shut down the affected station. Alarm Types WARNING are activated by those situations that do not need immediate attention, but could escalate into a more serious problem if ignored.

Responding to Alarms The alarms have three states: active, acknowledged, and reset. An active alarm indicates the interlock is currently tripped but has not been acknowledged. Responding to Alarms The audible annunciator sounds when active alarms exist. When an operator presses the Acknowledge key, the audible annunciator turns off and the alarm is lowered to the acknowledged state. When the operator presses the Reset key, the alarm is reset. If the condition which caused the interlock has not been corrected, the alarm is reactivated. The alarm status is viewed from the light tower located on the front of the system.

Possible Causes & Resolutions Refer to the Alarms & Warnings chapter in the following manuals for possible causes and resolutions to alarm conditions. Possible Causes/Solutions Mega SBD100 Slurry Blend & Dispense System, Model 145 Mega SBD100 Slurry Blend & Dispense System, Model 147 MegaPure MPT200A Transfer System, Model 101 Mega CBD2000 Chemical Blend & Dispense System, Model 101

MONITOR SYSTEM IN ALARM OVERRIDE MODE! Overriding Alarms The alarm override disables all alarms. Use the alarm override to perform certain maintenance functions that would normally trigger an interlock, such as rinsing spilled chemical in the cabinet to the drain. Use caution with the alarm override; it overrides all system alarms. For example, if the override is activated to bypass a faulty sensor, a concurrent leak or pressure alarm is also overridden. Overriding Alarms CAUTION MONITOR SYSTEM IN ALARM OVERRIDE MODE! Alarms do not function in alarm override mode. Potential hazards may be created. Use caution. WARNING CHEMICAL HAZARD! Alarm override may cause conditions that expose the operator to chemicals. Wear proper protective clothing and eye shields. Refer to the site MSDS for chemical-specific information.

Overriding Alarms, continued Activating an Alarm Bypass Press the Maintenance button to display the Tool Maintenance screen. Press the Enabled/Disabled toggle button to Disabled. Overriding Alarms Deactivating an Alarm Bypass Press the Maintenance button to display the Tool Maintenance screen. Press the Enabled/Disabled toggle button to Enabled.

Module 5: Maintenance Module 5: Maintenance

Component Description Valves Manual Valves Check Valve Component Description Manual Valve Automatic Valve Automatic Valve Swagelok Relief Valve

Component Description, continued Pressure Transducer Measuring line pressure allows for obtaining valuable and critical diagnostic information, which is used for monitoring or controlling process conditions such as UPW and chemical dispense. Component Description Pressure Transducer Flow Meter Flowmeters are used for regulating the chemical addition (replenish step) into the recipe. The flow rate per minute is part of the accuracy of the flowmeter. Flow Meter

Component Description, continued Regulators Flow regulators consist of a solid float inside a tapered vertical tube that widens at the top. Fluid enters at the base of the tube, causing the float to rise. The upward or downward movement of the float corresponds to the rate of fluid flow in the tube. A rotameter consists of a tapered tube with a float inside that is pushed up by flow and pulled down by gravity. At a higher flow rate the float rises. The float is shaped so it rotates axially as the fluid passes. Component Description Flow Regulator Rotameter

Component Description, continued Reducing Regulators Reducing regulators control the incoming pressure to an exact pressure no matter what happens to the incoming pressure. The regulator design is based on a diaphragm and needle through a hole principle. The diaphragm moves to compensate for any changes in incoming UN2 pressure. Component Description

Component Description, continued Pressure Switches Pressure switches notify the PLC when conditions meet or do not meet specifications and are associated with alarm conditions. The digital pressure switch is generally used for communicating the system pressure (psi) and two pressure switch outputs. Setpoints are adjustable from the front panel keys. Component Description Pressure Switch

Component Description, continued Level Sensors Able to read and monitor the liquids levels through the walls of the tank (not transparent). Tank Level Sensor Component Description Liquid Level Sensor Able to read and monitor the liquids levels through clear tubing (transparent).

Component Description, continued Tanks Tanks are used to blend and distribute slurry to the Local/Global Loops. Different sized tanks are used to blend and distribute slurry, chemicals, or UPW (Ultra Pure Water). Component Description

Component Description, continued Filters Filters catch large particles being pumped through systems. An indication of clogged filters is an increase in differential pressure. Component Description

Understanding Schematics P&ID P&ID = Process and Instrumentation Diagram The P&ID is the road map to the tool Understanding Schematics Example P&ID

Understanding Schematics, continued P&ID Symbols Valves Understanding Schematics Manual Valve Automatic Valve Multi-turn Manual Valve Needle Valve Ball type, Manual Valve

Understanding Schematics, continued P&ID Symbols, continued Pressure Transducer with Isolator Understanding Schematics Tank with Level Sensors AODD Pump (Air Operated Double Diaphragm) Check Valve, with flow direction arrow

Understanding Schematics, continued Electrical Schematic Understanding Schematics Example Electrical Schematic

Understanding Schematics, continued Electrical Schematic Symbols Main AC Disconnect Main DC Power Supply Understanding Schematics

Understanding Schematics, continued Electrical Schematic Symbols, continued Understanding Schematics Normally Open, Push button Coil, Relay Indicator, Light Contacts, Relay, first pair Normally Closed, button Contacts, Relay, second pair

Understanding Schematics, continued Electrical Schematic Symbols, continued Understanding Schematics Fuse, with name and rating Terminal Block, with name Off Page Reference, with name Circuit Breaker, with name and rating Wire Name, Color, Size Cable, with name

Understanding Schematics, continued Electrical Schematic Symbols, continued Understanding Schematics Terminals with jumper Inline connector Device, EV Block

Understanding Schematics, continued Electrical Schematic Symbols, continued Understanding Schematics Device Junction Block IO Points

Setting Timers & Setpoints System timers are set from the Timer Configuration screen. The Timer Configuration screen is accessed from the Tool Maintenance screen. Timers and setpoints should only be changed with permission. Setting Timers/Setpoints Press the Timer Config button on the Tool Maintenance screen. The Timer Configuration screen displays. Change the timer values accordingly, then press Download.

Setting Timers & Setpoints, continued Process setpoints are set from the Setpoints screen. The Setpoints screen is accessed from the Tool Maintenance screen. Timers and setpoints should only be changed with permission. Setting Timers/Setpoints Press the Process Setpoints button on the Tool Maintenance screen. Page 1 of the Setpoints screen displays. Change the setpoint values accordingly, then press Download.

Preventive Maintenance Why is Preventive Maintenance Important? Effective Preventive Maintenance (PM) maintains the system in optimal working order and ensures that the warranty extends to the equipment. Preventive maintenance also helps prevent unexpected downtime and disruption of the blend and distribution system. Preventive Maintenance

Preventive Maintenance, continued What Should I Consider Before? Before performing system preventive maintenance: Follow site specific procedures for notifying affected personnel before performing preventive maintenance. Preventive Maintenance Review all site requirements and procedures, including spill procedures, buddy systems, and PPE. Wear acid-resistant gloves, chemical safety goggles and full-face shield, and protective clothing such as a lab coat, apron, or coveralls as recommended in the MSDS. Review site MSDS for each chemical used in the system. Review all appropriate maintenance procedures. Ensure all equipment is available, work permits are approved, and all affected personnel have been notified. Before replacing any components, ensure the components are on hand.

Verifying Device Settings Obtain the latest device settings list for the system. Wear acid-resistant gloves, chemical safety goggles and full- face shield, and protective clothing such as a lab coat, apron, or coveralls as recommended in the MSDS. Locate each device on the Device Settings List, and compare the actual setting with the recorded setting. Use the P&ID to aid in locating each device. Record all deviations from the previously recorded settings on the Device Settings Record Sheet. Consult with the Process Engineer to verify that deviations require correction. Correct deviations, as required. Verifying Device Settings

Humidifier Settings A humidifier is essential to prevent slurry from drying on the sides of the tanks. Malfunction can occur for several reasons: The air pressure is too high or too low to create the mist. The mist pad is clogged and the pad does not work correctly. Humidifier Settings The drain is clogged. The water pressure is too high or low to create the proper mist. The water pressure is too high and the water sheets down the walls creating no mist (the mixture goes down the drain).

Humidifier Settings, continued Wear acid-resistant gloves, chemical safety goggles and full-face shield, and protective clothing such as a lab coat, apron, or coveralls as recommended in the MSDS. Visually verify the humidifier is operating correctly. The water droplets should accumulate on the humidifier walls. There should be a minimal flow of water through the humidifier drain. If the humidifier requires adjustments adjust the humidifier OFA / UN2 and UPW pressure. OFA / UN2 pressure should always be greater than water pressure. To measure the UPW flow rate, shut off the OFA / UN2 supply and measure the volume of water draining from the humidifier drain line. The flow rate should be approximately 15 ml/min. Humidifier Settings

Venting/Pressure Release Prior to changing filters, the filter cartridge must be flushed and purged for safety. Manual valves before and after the filter must also be opened or closed to vent pressure in the lines before the filter can be safely replaced. Follow the P&ID and lockout/tagout procedures to ensure proper safety. Venting/Pressure Release

Venting/Pressure Release, continued Equipment Required MSDS for all system chemistry PPE required by site and recommended on MSDS, including, but not limited to: protective clothing, eye shields, gloves, and hearing protection Chemical absorbent pads and wipes, and other safety equipment as recommended on the MSDS Lockout/Tagout Equipment Appropriate chemical waste container as recommended on MSDS Container (1 liter or larger) for the filters Auxiliary lighting Venting/Pressure Release

WARNING Changing Filters Filters catch large particles being pumped through systems. An indication of clogged filters is an increase in differential pressure. Mykrolis’ Chemlock filter cartridges are locked into the bowl with a 1/4-turn. For filter cartridge removal, do not grab the filter cartridge body, simply unscrew the locking ring and the filter cartridge will disengage from the housing head. WARNING CHEMICAL HAZARD! The exhaust effluent may contain chemical (vapor or liquid). Handle and treat to comply with safety and pollution control regulations. Supplemental exhaust may be required for maintenance tasks. Refer to the site MSDS for chemical-specific information. Changing Filters

Changing Filters, continued Wear the proper PPE. Refer to the MSDSs and site regulations. Ensure the filter bank has been taken off line and the manual drain valve has been opened to release all cartridge and bowl contents. Note: Filters are mounted with the bowl up on slurry systems and with the bowl down on chemical systems. Unscrew the locking ring and the filter cartridge will disengage from the housing head. Changing Filters

Changing Filters, continued Remove the filter cartridge and discard according to MSDS and site regulations. Insert the filter cartridge into the bowl. Twist the filter cartridge 1/4-turn to lock. Attach the bowl to the head. Tighten the locking ring to seat the double O-rings. Use a housing wrench to ensure proper tightening. Changing Filters Insert Attach Twist Tighten

Checking Pump Operation If the doors must be opened, wear acid-resistant gloves, chemical safety goggles and full-face shield, and protective clothing such as a lab coat, apron, or coveralls as recommended in the MSDS. Ensure the pump is operating. Record the pump operating pressure on the Preventive Maintenance List. Force a pump switchover for redundant pumps by closing the manual valve downstream of the pressure switch. Ensure that pump 1 faults and pump 2 begins operation. Reset the pump fault alarm. BPS-4 Pump Checking Pump Operation Diaphragm Pump

Checking Pump Operation, continued Ensure the pump is correctly set online or offline. Typically, all pumps are online. Schedule maintenance for pumps that are not ready for operation. Record the pump runtime from the Runtimes screen, accessed through Tool Maintenance. If the pump value exceeds the maintenance setpoint, verify the date of the last maintenance completed. If the last maintenance was recent, ensure that the runtime was reset. If the run timer was not reset, consult a supervisor and reset the run timer upon approval BPS-4 Pump Checking Pump Operation Diaphragm Pump

Checking Leak Detectors WARNING CHEMICAL HAZARD! Leak detectors are placed at the most likely spot to sense leaks. Chemical may be present. Wear acid-resistant gloves, chemical safety goggles and full-face shield, and protective clothing such as a lab coat, apron, or coveralls as recommended in the MSDS. Refer to the site MSDS for chemical-specific information. Checking Leak Detectors

Checking Leak Detectors, continued The leak detector LED should be green, indicating no leak. The corresponding input LED on the PLC should also be lit. Spray a small amount of water on the leak detector with the hand sprayer. The LED should change to red, indicating a leak. The corresponding input LED on the PLC should turn off. If the sensor does not change, test the wiring with another leak detector. If the replacement sensor functions, the first sensor was faulty. If the replacement sensor does not function, check leak detector wiring. Replace the leak detector or repair the wiring, if required. Checking Leak Detectors

Checking and Replacing Fittings Checking Fittings Flared and threaded fittings can loosen due to system vibrations. Teflon fittings should be hand-tightened to prevent the development of leaks. Stainless steel fittings should be checked with a NO-GO gap gauge. Inspecting the fittings requires opening the cabinet doors. Take the proper precautions to avoid chemical and electrical hazards. Place the system in Manual mode and open all drain fittings to relieve all pressure from the chemical lines before replacing fittings. Checking Fittings

Checking and Replacing Fittings, continued Checking Fittings, continued WARNING Electrical Hazard – Type 3! Risk of exposure to hazardous electrical current. Use extreme caution during preventive maintenance procedures to avoid accidental contact with energized parts. CAUTION Pressure Hazard! Relieve pressure in lines before loosening and replacing fittings. Checking Fittings

Checking and Replacing Fittings, continued Checking Fittings, continued Ensure all fittings are tight. Loose plastic fittings should be hand-tightened. Stainless steel fittings should be checked with a NO-GO gap gauge. If the fitting leaks after it is tightened, replace it. Avoid over-tightening fittings! Over-tightening fittings may strip the fitting threads. Place the system in Automatic operation and check for leaks. Checking Fittings

Checking and Replacing Fittings, continued Wear acid-resistant gloves, chemical safety goggles and full- face shield, and protective clothing such as a lab coat, apron, or coveralls as recommended in the MSDS. Place the system into Manual operating mode. Flush and purge the pipes in the area of the repair. Vent the line pressure by opening valves to the drain or exhaust. Close the closest isolation valves in order to isolate the fitting. Lockout/tagout the isolation valves. Checking Fittings

Checking and Replacing Fittings, continued Remove the leaking fitting and the necessary plumbing. Replace the leaking fitting and install removed plumbing. Remove the lockout/tagout devices. Open the isolation valves. In Manual mode, fill the repaired area with liquid (or gas) and check for leaks. If the fitting leaks, ensure the fitting is tight. If the fitting still leaks, return to Step 3. Flush and purge the pipes in the area of the repair. Checking Fittings

Cabinet Cleaning Clean the cabinet after all other PM procedures are completed. Wear acid-resistant gloves, chemical safety goggles and full- face shield, and protective clothing such as a lab coat, apron, or coveralls as recommended in the MSDS. Rinse all chemical residue from the cabinet interior using the hand sprayers or wipes saturated in 10% IPA solution. Thoroughly dry the cabinet interior. Wipe the cabinet exterior clean. Dispose of all wipes according to site requirements and MSDS recommendations. Cabinet Cleaning