Industrial Atomic Layer Deposited Ultrabarriers Jacques C. S Industrial Atomic Layer Deposited Ultrabarriers Jacques C. S. Kools ENCAPSULIX SAS, 481 Chemin Des Vignes, 13109 Simiane-Collongue, France www.encapsulix.com
Device Integrated nano oxide ultrabarriers Many devices require a moisture barrier for long lifetime Traditional approach to laminate with barrier foil reaches its limits Sideways diffusion through epoxy High performance barrier foils are costly Our approach is to depositing a transparent ALD barrier directly onto the moisture sensitive devices Better sealing Lower cost OLED light Organic, perovskite PV Thin Film, Heterojunction PV OLED display www.encapsulix.com
UltraBarrier Performance Independently Confirmed MOCON Aquatran (Peter Carcia ; Dupont Research) 100 mm diameter PET foil 38°C /85% RH WVTR below detection limit ( 2e-4 g/m2/dy) Ca Test Millimeter size PET foil 65°C /85%RH/1000 hrs WVTR below detection limit ( 5e-4 g/m2/dy) Helium Mass Spec (Stephane Cros ; CEA INES ) 75 mm diameter PET foil ( 3x) RT HeTR 10 x better than reference WVTR consistently in the 5e-6-1e-5 g/m2/dy range over macroscopic substrates Data Reference : Barrier with 6e-5 g/m2/dy WVTR 9/17/2018 www.encapsulix.com
Equipment Platforms M200 M500 M750 Substrate Type & Size 200 mm x 200 mm Glass , Silicon wafer, PV, Double sided coating of foil 2 x Gen 2.5 ( 400 mm x 500 mm glass, ) 12 x 156 mm x 156 mm Si 8 x 200 mm round Si 2 x Gen 4.5 ( 730 mm x 920 mm glass, ) 8 x Gen 2.5 Applications R&D in OLED, OPV, PV, thin film battery,.. OLED microdisplay manufacturing OLED lighting & Display Manufacturing Thin Film battery Printed Electronics Cell Level PV Manufacturing AMOLED lighting & Display www.encapsulix.com
Typical Process Performance 0,884 Å 1.589 0,866 Å 1,585 0,890 Å 1,59 0,861 Å 1,590 0,87 Å 1,59 0,892 Å 1,586 0,92 Å 1,594 0,9 Å 1,594 0,91 Å 1,591 Test substrate = Gen 2 Glass / reflective layer / ALD Al2O3 Measured by Spectral Ellipsometry ( SemiLab ) Optical Index above literature values Uniformity : 1s= 2.5% over Gen 2 glass ( 370 x 470 mm) Repeatibility : less than 2% variation over 1 month of production 9/17/2018 www.encapsulix.com