Precision Linear Motorized Stages Proteep Mallik OPTI 521 Tutorial Presentation December 4, 2006

Precision Linear Motorized Stages Long travel (~2m) High precision (~nm level) Stepper drives Parker Motion products September 18, 2018 OPTI 521 Tutorial Presentation

OPTI 521 Tutorial Presentation Outline Motion Control what, where and why? System Components stage (long range) motor (servo vs stepper) controller computer/software Examples vendors specifications cost Parker Motion System Linear sliders and stages 6K controller Computer & monitor Null test system Conclusions September 18, 2018 OPTI 521 Tutorial Presentation

OPTI 521 Tutorial Presentation Motion Control Precise positioning of optics and mechanics Used in: laser machining, welding printing, patterning wafer fabrication, lithography robotics … and of course, in many optical systems September 18, 2018 OPTI 521 Tutorial Presentation

OPTI 521 Tutorial Presentation Motion Control Why motorized? repeatable, precise and smooth moving heavy parts automation easy to manage complex systems less manpower September 18, 2018 OPTI 521 Tutorial Presentation

System Components -overall system ROTARY BRAKE SHAFT BRAKE September 18, 2018 OPTI 521 Tutorial Presentation

System Components -stage Range of travel (~ 2m) Precision (~ nm) Repeatability (~ sub nm) Stiffness (extruded Al, excellent) Motor requirements (torque, efficiency) Cost (~$5000) Ease of operation (cabling, computer control) Mount on large, flat surface (minimum deflection) September 18, 2018 OPTI 521 Tutorial Presentation

System Components -motor Servo Ironcore, ironless, slotless Typical repeatability ~1nm, resolution ~0.01nm Needs position encoders Very smooth, fast motion for large loads AC or DC, high voltage Expensive (~$5000 +) Stepper Multi-pole motors N-bit encoders (2N bits/step) Repeatability ~10nm, resolution ~sub nm No need for position encoder Easier maintenance and lower cost than servo September 18, 2018 OPTI 521 Tutorial Presentation

System Components -controllers Interfaces user to linear stage via computer or remote control Drive, encoder, limit and communication inputs Programmable September 18, 2018 OPTI 521 Tutorial Presentation

System Components -computer RS-232 or ethernet communication Software from manufacturer Programming via Active X or other windows platforms Industrial computers, touchscreen control monitors September 18, 2018 OPTI 521 Tutorial Presentation

OPTI 521 Tutorial Presentation Vendors Parker Automation (Parker Hannifin, Daedal Positioning, Compumotor) Aerotech Velmex Newmark September 18, 2018 OPTI 521 Tutorial Presentation

OPTI 521 Tutorial Presentation Specifications Image $1800 $800 $5000 $2000 $25,000 $15,000 Cost 150kg 16kg 630kg 1000kg 50kg 135kg Max Load 4μm 2.5μm 1.3μm 0.1nm 0.4μm 0.5μm Repeatability 6μm (not given) 0.06nm 0.001μm Resolution 2m 0.8m 1.5m 1.2m 1m Total Travel BiSlide XSlide 406XR 400ST ABL2000 ALS5000 Velmex (stepper) Parker Aerotech (servo) September 18, 2018 OPTI 521 Tutorial Presentation

Parker Automation www.parkermotion.com 400ST Square Rail Sliders 406XR Series Sliders Drive and Motor Screw with stepper motor Linear bearing, ballscrew & motor Total Travel 1.5m 2m Max acceleration 20m/s2 Repeatability 0.1nm 1.3μm Maximum Load 1000kg 630kg Stage Weight 25kg 2.7kg Size 2m X 0.2m X 0.12m 2.3m X 0.15m X 0.05m Cost $2000 Up to $5000 www.parkermotion.com September 18, 2018 OPTI 521 Tutorial Presentation

OPTI 521 Tutorial Presentation Parker Automation Workstations Ethernet communication with controllers Controllers can be used in client-server modes Controllers can be connected to each other via ethernet hub Touchscreen monitors September 18, 2018 OPTI 521 Tutorial Presentation

OPTI 521 Tutorial Presentation Null Test System 3-axis stage Tilt stage CGH positioning stage September 18, 2018 OPTI 521 Tutorial Presentation

OPTI 521 Tutorial Presentation Null Test System 6K8 Controller Drivers (7) Computer communication Input Power Supply 5A drivers/motors 20A, 120V AC input power September 18, 2018 OPTI 521 Tutorial Presentation

OPTI 521 Tutorial Presentation Conclusions Precision motion control a reality and necessity 3 choices to make: stage, motor, controller Complete automation via computer and available software September 18, 2018 OPTI 521 Tutorial Presentation