Qin Group Research Highlights: Process Monitoring and Control

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Presentation transcript:

Qin Group Research Highlights: Process Monitoring and Control S. Joe Qin Department of Chemical Engineering The University of Texas at Austin Austin, Texas 78712 512-471-4417 qin@che.utexas.edu www.che.utexas.edu/qinlab CPE5.408

Mizushima Plant from Mitsubishi Chemical Area：2.100 k㎡ Start of production： 1964 ETY Plant Capacity： 450 kt/year Number of Plant ： 61 Number of Controller：5500 loops Information Media Plant Tyugoku Electric MCRC Petrochemical Plant Tank yard Future area ETY Plant Japan Energy Asahi Chemical © S. Joe Qin

Advanced Process Control LC TC F V D L B xD xB AI Advanced Control System u1 u2 y2 y1 d1 Distillation Column Control Advanced Process Control Constraints: Objective Function: present improve control performance optimization Courtesy of Mitsubishi Chemical (M. Ogawa) © S. Joe Qin

Control Hierarchy Model Predictive Control (MPC) Or Multi-loop Control Global Steady-State Optimization (every day) Plant-Wide Optimization Fab-wide control FWET Local Steady-State Optimization (every hour) Unit Level Optimization Module Level Optimization SWET Dynamic Constraint Control (every minute) Model Predictive Control (MPC) Or Multi-loop Control Tool level Run to Run Control Integrated Metrology Supervisory Dynamic Control (every minute) Basic Dynamic Control (every second) In-situ sensors Distributed Control System Within-tool process control FC PC TC LC FC PC TC LC © S. Joe Qin

Device Modeling - Flash Memory Transistor Device Modeling - Flash Memory Transistor Contains floating gate not present in traditional MOS transistor Non-Volatile Memory Capability Programming : Apply + Voltage Floating gate fills with electrons Threshold voltage increases No current between source and drain: “Off” State Erasing : Apply - Voltage Electrons flow from floating gate to drain Threshold voltage decreases Current flows: “On” State © S. Joe Qin

Modeling and Control Focus Conventional control problems Process/quality monitoring Process modeling Feedback control output input quality Quality modeling Quality control $ Semiconductor process modeling Batch control geometry recipe Semiconductor control problems Device modeling Fab-wide control $ electrical property © S. Joe Qin

Our Research Focus Model Predictive Control and Performance Assessment Process Monitoring and Fault Diagnosis Model and System Identification Semiconductor, Chemical and Pulp and Paper Processes We interact actively with the members of the Texas-Wisconsin Modeling and Control Consortium which allows us to focus on methodology development that will impact the practice © S. Joe Qin