APMP 2017 TCL Workshop 2017-Report Held on Nov 25-11-2017 at CSIR-National Physical Laboratory, New Delhi

TCL Work Shop started with welcome from TC Chair Dr Kang TCL Work Shop started with welcome from TC Chair Dr Kang. Dr Kang chaired the session1 that comprised of four talks on use of X ray on Dimension Measurements. First presentation by Wei En Fu talked about X-Rays for critical Dimension studies of nanostructures. He highlighted the application of SAXD to measurement of critical dimension. He highlighted the work going on in modelling the features and extraction of information on dimensions of line width, shape side wall angles etc. On a querry he informed that this technique is also capable of giving information about roughness. Jariya Buajarern, NIMT presented Measurement of Particle Size by the X-Ray technology. She discussed applications of XRD and SAXS

Toshi Takatsuji , NMIJ Research activity within NMIJ toward realization of dimensional X-ray CT. He talked about X pray probes for Dimension metrology. Developments in CMM with contact probe, optical probe and X Ray CT. He also highlighted the work going on the various material gauges like Steel, Aluminium and plastic gauges as these materials are being mentioned in ISO. X Ray CT is quick and a very promising method for dimensional metrology. Specially results on study of stability, effect of contact and and effect of humidity on Plastic Gauges were discussed in details. The conclusion was that some plastics were very stable.

Rina sharma, NPLI while talking on use of X Ray in Dimension Metrology at NPLI talked about finding information on crystalite using XRD and thickness & Roughness using XRR. She also discussed about evaluation of uncertainty in crystalite size measurement and identification of source of uncertainty and estimation of limits for these in case of thickness measurements by XRD

Session 2: Coordinate metrology This session started with welcome from Rina Sharma, Session chair. This session had four talks by NMIs representatives and one talk by Mitutoyo South asia representative. Mokato Abe, NMIJ talked about Calibration of hole plate and its application for identifying geometric errors of CMM. He explained the calibration and identification of errors in details. Measuring ball plate in four orientation and six sets of data( as for two orientation the probing is from both sides) is a promising method for evaluation and minimisation of errors.

Sam Hsu while presenting The concept of traceable in-process measurement capability for machine tool talked about the need to ensure online metrology during manufacturing and work being done in this area. Such online monitoring is the heat of smart manufacturing and ensures lesser rejection. Rina Sharma and Girija moona peresented coordinate metrology at NPI and Calibration of scales using Vision probe on CMM and Laser interferometer.

Harish Bajaj, Mitutoyo Talked on Coordinate Measurement technologies uncertainty determination with virtual CMM and future trends. He highlighted quality assurance of CMM during its manufacturing, new trends like CMM for Robotic measurements and laso about uncertainty determination using virtual CMM software. On a querry he explained the application of Virtual software, developed by PTB, Germany

Session 3: special lab report Dr Kang welcomed again and explained the background of this presentation that SASO wishes to become associate member of APMP and he invited Faisal Alqahtani for his presentation. The presentation by Alqahtani covered the facilities of Length and dimensin measurements and iodine stabilised laser at SAO.

Conclusion From the workshop it can be concluding that use of X ray in dimension metrology is promising as it can be applied to measuere outside as well as inside. However Aspects of traceability to SI metre and evaluation of uncertainty in measurement needs more attention. Coordinate metrology is and will remain the most in demand for various dimension measurements. This field is developing and expanding very fast. Workshop ended with thanks to all

TCL- Workshop @ APMP2017, held on 25-11-2017, CSIR-NP, India