DOE Plasma Science Center Control of Plasma Kinetics

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DOE Plasma Science Center Control of Plasma Kinetics CONTROLLING PLASMA PROPERTIES: ELECTRON INDUCED SECONDARY ELECTRON EMISSION Kinetic studies of bounded plasmas by walls having secondary electron emission (SEE) predict a strong dependence of wall potential on SEE [1-3]. Sheath oscillations occur due to coupling of the sheath potential and non-Maxwellian electron energy distribution functions [2]. When electrons impacting walls produce more than one secondary on average no classical sheath exists. Strong dependence of wall potential on SEE allows for active control of plasma properties by judicious choice of the wall material. (a) (b) (c) [1] Phys. Rev. Lett. 108, 255001 (2012) [2] Phys. Rev. Lett. 108, 235001 (2012) [3] Phys. Plasmas 19, 123513 (2012) Potential profiles: E=200V/cm no emission E=200V/cm with SEE, E =250V/cm with SEE [1,3] DOE Plasma Science Center Control of Plasma Kinetics HIGHLIGHT PLSC_0113 1

CONTROL OF VUV FLUXES THROUGH CONTROL OF f() USING PULSED POWER Pulsed plasmas can be used to shape electron energy distributions f() in ways not possible using continuous power. One feature of such shaping of f() is being able to control the ratio of VUV photon to ion fluxes. The HPEM was used to computationally investigate the control of VUV fluxes in pulsed inductively coupled plasmas in Ar/Cl2 mixtures by shaping f(). The VUV/ion flux ratio decreases with increasing duty cycle. This control can be used to tune the shape of etch profiles. VUV/ion flux for different duty cycles (Ar/Cl2 = 80/20, 20 mTorr) Cycle averaged VUV/ion flux vs duty cycle. Effect on Si etch profile by controlling VUV flux. DOE Plasma Science Center Control of Plasma Kinetics HIGHLIGHT PLSC_0113 2