Introducing ATOM™ series encoders Renishaw plc 10/11/2018 Introducing ATOM™ series encoders World’s first miniature encoder with filtering optics Best-in-class performance Robust and light-weight design Hi-flex cable and Flexible-Printed Circuit (FPC) options Please read the notes below: ATOM is Renishaw's miniature non-contact optical incremental linear and rotary encoder system. Its innovative design combines miniaturisation with leading-edge signal stability, dirt immunity and reliability. This combination is unique in the market place and represents a significant advance in the performance and reliability of miniature encoders. ATOM systems are simple to install with integrated LED for signal integrity indication. A range of interfaces is available including high-performance Ti, Ri and the compact PCB ACi interface. Confidential

Increased performance Renishaw plc 10/11/2018 Value to you High dirt immunity Low inertia Low TCO Value Increased performance High resolution Please read the notes below: High dirt immunity: High-tolerance to liquid and particulate contaminants on the scale helps to maximise up-time Low Total Cost of Ownership (TCO): ATOM system is designed to minimise total lifetime costs associated with servicing and system integrity. High resolution: Supports applications requiring higher precision, e.g. wafer handling robots in the semiconductor industry. Increased performance: High functionality, accuracy and precision allows designers greater flexibility. Low inertia: low mass readhead (4 g) and scales (~12 g /m) ensure minimal inertia for high speed operation. Confidential

Specifications Two cable options: FPC or hi-flex cable output Renishaw plc 10/11/2018 Specifications Two cable options: FPC or hi-flex cable output Both 20 µm and 40 µm pitch linear and rotary scales available Compact readhead size: 20.5 mm x 12.7 mm x 7.3 mm (FPC) Rotary scale accuracy of ±0.7 µm (±1.98 arc second on a Ø108 mm disc) Rotary angular speed to 29 000 RPM Linear scale accuracy (slope + linearity) to ±5 µm/m Linear resolutions to 1 nm and linear speeds to 20 m/s Choice of either analogue or digital signal interpolation Multi-colour set-up LED Please read the notes below: Minimum ATOM encoder readhead size is for FPC variant = 20.5 mm x 12.7 mm x 7.3 mm (length x width x height). Cable ATOM readhead size = 20.5 mm x 12.7 mm x 8.35 mm If additional specs are required, refer to the relevant data sheet. These are the headline features and are considered appropriate for this type of introductory presentation. Confidential

Real-life applications Renishaw plc 10/11/2018 Real-life applications TPC Motion (TPC) is a well-known Korean manufacturer of motion-control components TPC selected ATOM for its variable aperture stop assembly – part of a laser tool used in FPD inspection and repair operations The aperture stop consists of four moving vanes, each individually controlled by a voice-coil motor and ATOM encoder “ The ATOM series meets all of our main requirements for a high-performance, low-noise and light-weight miniature encoder system. Direct comparison with competing brands has demonstrated beyond doubt that ATOM is indeed best-in-class “ Please read the notes below: Please use link below for further details (paste following into browser): http://www.renishaw.com/encodercasestudies Confidential

ATOM basic principles Readhead sensor uses patented filtering optics Renishaw plc 10/11/2018 ATOM basic principles Readhead sensor uses patented filtering optics Digital or analogue signal output depending on interface option OR Optical filtering enhances dirt immunity and eliminates undulation error for robust operation Readhead LED indicator and CAL routine, which also phases optical reference marks for easier set-up Please read the notes below: ATOM is the world's first miniature encoder system incorporating Renishaw's unique filtering optics design. This is further enhanced by dynamic signal processing within the readhead including Auto Gain Control and Auto Offset Control. This combination allows ATOM to have higher dirt immunity and signal purity which is comparable to, if not better, than our standard size readheads with SDE's as low as ±75 nm on 20 µm readheads and ±120 nm on 40 µm readheads. The result is smoother velocity control for improved scanning performance and increased positional stability, essential parameters for many motion control applications. ATOM uses a non-collimated LED located centrally between the incremental and reference mark sensors. This high divergence LED produces a low profile height with a footprint at the scale that is much larger than the LED, enabling illumination of incremental and reference mark regions. ATOM employs the same filtering optics scheme as used in all Renishaw's incremental encoders. The incoherent LED produces a signal of high harmonic purity allowing high resolution interpolation. Efficient photometry also produces a low jitter signal. A further benefit of the filtering optics scheme is that ATOM does not generate measurement errors due to scale contamination and undulations. ATOM uses a large single feature off-track optical reference mark for good contamination immunity. Phasing of the reference mark is as simple an operation as with TONiC. ** Slide animates the scale and output waveform together – the presenter should allow several seconds for this to run** 11/10/2018 Confidential

Renishaw plc 10/11/2018 ATOM readhead options ATOM with cable Compatible with Ri, high-performance Ti and PCB- mountable ACi component interfaces Resolutions from 10 µm to 1 nm 0 °C – 70 °C ATOM with FPC ACi interface available FPC output for the most space-critical applications Resolutions from 2 µm to 10 nm 0 °C – 70 °C Please read the notes below: ATOM is supplied in hi-flex cable and Flexible-Printed Circuit (FPC) variants with either 20 µm or 40 µm scale options. ATOM FPC, 7.3 mm x 20.5 mm x 12.7 mm, allows for integration in the tightest of spaces. Confidential

ATOM linear scales 20 µm or 40 µm scale-pitch options Lengths to 10 m Renishaw plc 10/11/2018 ATOM linear scales RTLF 20 µm or 40 µm scale-pitch options Lengths to 10 m Choice of ±5 µm/m or ±15 µm/m accuracy at 20 °C Adhesive mounting RCLC spar Choose from either 20 µm or 40 µm scale Lengths to 130 mm ±3 µm accuracy at 20 °C Adhesive mounting Please read the notes below: RTLF is a low profile stainless steel ribbon scale featuring a customer selectable reference mark. There are two levels of available accuracy - standard 40 µm pitch scale with an accuracy of ±15 µm/m and high-spec 20 µm pitch and 40 µm pitch scales with an accuracy of ±5 µm/m. All scales can be supplied in lengths up to 10 m. RTLF-S is laid onto the substrate with self-adhesive backing tape. The self-adhesive is formulated in such a way that it allows for independent scale expansion to that of the substrate. To complete the installation, the scale is clamped at one point to provide a datum position. RCLC is a glass spar scale which can be supplied in lengths to 130 mm featuring either 20 µm or 40 µm pitch incremental graduations. RCLC offers a total accuracy of ±3 µm and includes two reference marks: one at the scale mid-point and one at the end-of-travel. Selection is made by the orientation of the readhead relative to the scale. RCLC is laid onto the substrate with self-adhesive backing tape. The self-adhesive is formulated to allow for independent scale expansion to that of the substrate. Confidential

ATOM rotary scales Option of 20 µm or 40 µm pitch scale Renishaw plc 10/11/2018 ATOM rotary scales RCDM discs Option of 20 µm or 40 µm pitch scale Diameters down to Ø17 mm ±1.98 arc sec accuracy on a Ø108 mm disc Epoxy adhesive mounting Please read notes below: Customer has to mount discs on a custom hub assembly with epoxy adhesive (refer to installation guide) RCDM is a one-piece glass disc featuring graduations marked directly onto its face and a single reference mark position and optical alignment ring. The optical alignment ring can be used to minimise angular alignment errors and improve installed accuracy. Two versions are available, either 20 µm pitch or 40 µm pitch, in a range of sizes (20 µm: Ø30 mm to Ø108 mm, 40 µm: Ø17 mm to Ø108 mm) The non-contact format eliminates backlash, shaft wind-up (torsion) and other mechanical hysteresis errors that are inherent in traditional enclosed encoders. Confidential

Any Questions? The ATOM Solution Renishaw plc 10/11/2018 The ATOM Solution World’s first miniature encoder with filtering optics Best-in-class performance includes outstanding dirt immunity Robust miniature readhead for low-inertia designs Both metal and glass scales available in either 20 µm or 40 µm options Choose from either cabled or FPC output readheads Any Questions? Please read the notes below: Any questions? slide Feel free to amend for your individual presentation; this should summarise your main points (no more than 5-6 total) Confidential