North America Regional Standards Committee (NA RSC) Liaison Report August 2010

Outline Current Structure of NA Standards Committees NA Standards Staff Changes NARSC West 2010 Meeting Highlights Overall TC/WG Updates Upcoming Events Regional Staff Contact Information August 2010 NARSC Liaison Report

NA Standards Staff Changes Susan Turner was included in the recent staff reductions at SEMI. Paul Trio Sr. Manager, NA Standards Operations Operations Committees: I&C, ATE, NARSC Meetings & Events Planning General Information New: MEMS Microlithography STEPs/Workshops and Sponsorships Ian McLeod Manager, NA Standards Committees Committees: Compounds Semiconductor Materials / EHS / FPD / Liquid Chemicals / PIC Metrics Membership Kevin Nguyen Committees: Facilities / Gases / PV / PV Automation / Silicon Wafer Traceability August 2010 NARSC Liaison Report

Current Structure of the NARSC [1/2] NARSC Chair: Jackie Ferrell (ISMI) Chair: Sean Larsen (Cymer) Automated Test Equip Paul Roddy (Consultant) Ajay Khoche (Consultant) Gases Tim Volin (Parker Hannifin) Microlithography Wes Erck (W.Erck & Associates) Rick Silver (NIST) Technical Architects Board (TAB) James Moyne (AMAT) Yaw Obeng (NIST) Information & Control David Bricker (AMAT) Jack Ghiselli (Consultant) Lance Rist (ISMI) Compounds Jim Oliver (Northrup Grumman) Russ Kremer (Freiberger) PIC Mutaz Haddadin (Intel) Matt Fuller (Entegris) EHS (NA) Chris Evanston (Salus Engineering) James Beasley (ISMI) Sean Larsen (Cymer) Eric Sklar (Safety Guru) Liquid Chemicals Frank Flowers (FMC) Frank Parker (ICL Performance) Photovoltaic Heiko Moritz (Caerus Systems) Win Baylies (BayTech Group) MEMS / NEMS Win Baylies (BayTech Group) Dan Chilcott (Delphi) Mark Crockett (MEMSMART) Silicon Wafer Noel Poduje (SMS) Dinesh Gupta (STA) Facilities Phil Naughton (AMAT) Traceability Win Baylies (BayTech Group) Yaw Obeng (NIST) Metrics David Bouldin (Fab Consulting) Mark Frankfurth (Cymer) FPD (NA) Bill Colbran (Engenuity) New! August 2010 NARSC Liaison Report

Current Structure of the NARSC [2/2] NARSC Chair: Jackie Ferrell (ISMI) Chair: Sean Larsen (Cymer) New! FPD (Korea) Jong Seo Lee (Samsung) Il-Ho Kim (LMS) EHS (Taiwan) Shuh-Woei Yu (SAHTECH) Fang-Ming Hsu (TSMC) EHS WG (Korea) Seoung Jong Ko (Hynix) Hyunsuk Kim (Samsung Elec.) FPD Metrology (Korea) Jong Seo Lee (Samsung) Il-Ho Kim (LMS) FPD (Taiwan) Tzeng-Yow Lin (ITRI) Jia-Ming Liu (TDMDA) New! Facilities (Korea) Kwang Sun Kim (KUT) Insoo Cho (Shinsung ENG) I&C (Taiwan) Robert Chien (TSMC) Photovoltaic (Taiwan) Jeff Lee (Chroma) B.N. Chung (CMS/ITRI) Y.Y. Tsai (Delsolar) J.S. Chen (PVTC/ITRI) Ray Sung (UL Taiwan) I&C (Korea) Chulhong Ahn (Hynix) Sammy Jeong (KC Tech) Gunwoo Lee (Miracom) Regional Committees & Working Groups August 2010 NARSC Liaison Report

NARSC SEMICON West 2010 Meeting (July 11) Meeting Highlights: Supported formation of the Korea Facilities Committee Officially approved by the ISC at SEMICON West 2010 Supported formation of the Korea Information & Control Committee Presentation: Standardization opportunities in high-brightness LEDs (HB-LED’s) and solid state lighting (SSL) August 2010 NARSC Liaison Report

NA Standards Meetings at SEMICON West 2010 (July 12-16) Sunday Monday Tuesday Wednesday Thursday Friday Saturday 11 12 13 14 15 16 17 ATE NARSC EH&S EH&S Facilities & Gases Information & Control Liquid Chemicals Schedule -at-a-glance MEMS Metrics Microlitho Photovoltaic HB LED Physical Interfaces & Carriers Silicon Wafer Traceability August 2010 NARSC Liaison Report

Standards Technical Education Programs (July 13-15) Sun Mon Tuesday Wednesday Thu Fri Sat 11 12 13 14 15 16 17 SEMI / SEMATECH: 3D Interconnect Challenges & Need for Standards SEMI: PV TCO Film Depo & Characterization SEMI / SEMATECH: Product and Equipment Time Metrics SEMI/ISMI: e-Manufacturing SEMI/NIST: PAIM III (Prod. Authentication & Info Mgmt TechSITE South Securing Your Spares Wednesday, July 14 10:30-11:30 AM Cancelled: STG Courses: APC, EDA, PV2, RAMP MEMS Reliability August 2010 NARSC Liaison Report

Standards at SEMICON West 2010 Standards Awards and Networking Event (July 14) * Award Recipients * Karel Urbanek Shoji Komatsu (Acteon) Mutaz Haddadin (Intel) Jackie Ferrell (ISMI) NA Standards Merit Award Lauren Crane (Applied Materials) Cliff Greenberg (Nikon Precision) NA Standards Leadership Award Marty Burkhart (Hi Pure Tech) Thomas Pomorski (Productivity Management Associates) NA Standards Corporate Device Member Award Mutaz Haddadin (Intel) NA Standards Honor Award John Stover (The Scatter Works) NA Standards Educator Award Win Baylies (BayTech Group) August 2010 NARSC Liaison Report

Overall TC/WG Updates (from NA Standards West 2010 Meetings) Org. Name Last met on: Progress (p) / Concern (c) / Ballot to be issued (b) / Others (o) NA Automated Test Equipment Committee July 14, 2010 (b) New Standard for Memory STDF (Standard Test Data Format) and G78 (wafer probe) withdrawal for C6-10. (o) Approved G84 (Strip Map Protocol) and G85 (Map Data Format) to go into inactive status. NA Compound Semiconductor Materials Committee May 19, 2010 (o) Next meeting planned for November 2010. To be hosted by Northrop Grumman in Baltimore, MD. NA EHS Committee July 16, 2010 (p) New Interlock Reliability TF chartered while Report Contents & Quality TF and Short Circuit Current Rating (SCCR) TF were disbanded. (b) E20 (EMO) removal ballot (#4954) passed TC review. (b) Coordinated S2 revision ballots for C6-10. NA Facilities & Gases Committee July 13, 2010 (p) New Pressure Measurement TF chartered. (b) New guide for Heater Jacket (#4737) failed TC review and reballoted for C6-10. (b) Several 5-Year Review docs balloted & reviewed at West. NA I&C Committee (b) GEM300 TF ballot 4824 (E5 revision) co-written with Korea A&I WG failed TC review. Reballot for C6-10. August 2010 NARSC Liaison Report

Overall TC/WG Updates (from NA Standards West 2010 Meetings) Org. Name Last met on: Progress (p) / Concern (c) / Ballot to be issued (b) / Others (o) NA Liquid Chemicals Committee July 13, 2010 (p) New temporary leader (Frank Parker, ICL) for Statistical Methods TF. (b) Several 5-Year Review documents balloted and reviewed. (b) New Standard on Surface Areas of Polymer Pellets (#4556) failed TC review. (b) F63 revision (ultra-pure water, #4953) balloted for C5-10. NA MEMS / NEMS Committee July 12, 2010 (b) MS3 rev ballot (MEMS terms, #4719) failed TC review. (o) New standard on microtube (#4691) and MS5 revision (wafer bond strength) to be balloted for C6-10. NA Metrics Committee July 14, 2010 (b) Doc 3847B (electromagnetic compatibility) failed TC review. (o) Approved new Standards activities on Cost of Ownership (COO) metrics for manufacturing equip (#5049) and gas delivery systems (#5050) NA Microlithography Committee (b) New standard for ‘EUV Reticle Reference Fiducial Marks’ (#4580) passed TC review. (b) P37 revision ballot (EUV Mask Substrates) for C7-10. August 2010 NARSC Liaison Report

Overall TC/WG Updates (from NA Standards West 2010 Meetings) Org. Name Last met on: Progress (p) / Concern (c) / Ballot to be issued (b) / Others (o) NA PI&C Committee July 14, 2010 (p) New 450 mm documents – MAC and FOSB Load Port – passed TC review. (p) E154 (450 mm Load Port) and E158 (450 mm FOUP) revision ballots passed TC review. (o) New task force – International Reticle SMIF Pod and Load Port reliability TF. NA PV Committee (b) Several letter ballots submitted and reviewed at West including: bulk O2, Ar, H2, N2 passed TC review while new standard on virgin silicon feedstock for PV apps (#4805) failed TC review and reballoted for C5-10. (b) PV1 revision (#5045) for C5-10. NA Silicon Wafer Committee July 13, 2010 (b) Several Five-Year Review documents balloted and reviewed at West including: wafer near-edge geometry using ROA (#4920, former M69) passed while 450 mm shipping box (#4760) failed TC review. (o) Patents identified related to MF1708 and MF1723 NA Traceability Committee July 15, 2010 (b) SEMI T2/T6 withdrawal ballots and T8/T9 revision ballots passed TC review. (b) Authorized nfo ballots on Organizational Identification (#4845) and Authentication Svc Body Traceability (#4847). August 2010 NARSC Liaison Report

NA Standards Fall 2010 Meetings November 8-11 Most Standards meetings will be held at SEMI Headquarters in San Jose, CA Facilities & Gases Information & Control Liquid Chemicals MEMS Metrics PIC PV Traceability August 2010 NARSC Liaison Report

NA Standards Fall 2010 Meetings November 8-11 Other hosting locations AMAT (Santa Clara) EHS Intel (Santa Clara) Silicon Wafer August 2010 NARSC Liaison Report

NA Standards Fall 2010 Meetings November 8-11 Sunday Monday Tuesday Wednesday Thursday Friday Saturday 7 8 9 10 11 12 13 NARSC EH&S Information & Control Liquid Chemicals Metrics Photovoltaic Traceability Facilities & Gases MEMS Physical Interfaces & Carriers Silicon Wafer Locations - SEMI - AMAT - Intel - Hynix August 2010 NARSC Liaison Report

NA Compound Semiconductor Materials Committee Upcoming NA Meetings Event Name Event Type Contents NA Compound Semiconductor Materials Committee Committee Meeting November 2010 Northrop Grumman in Baltimore, Maryland August 2010 NARSC Liaison Report

3081 Zanker Road San Jose, CA 95134 U.S.A. Regional Staff Contact Information Name Paul Trio E-mail ptrio@semi.org Phone +1.408.943.7041 Office Address 3081 Zanker Road San Jose, CA 95134 U.S.A. Committees In charge NARSC Automated Test Equipment / Information & Control / MEMS / Microlithography August 2010 NARSC Liaison Report

Back-up August 2010 NARSC Liaison Report