Japan PV Automation Committee Liaison Report Taiwan PV Committee May 10, 2012 @Hsinchu, Taiwan Japan PV Automation Committee

<Region> <Committee> Leadership Committee Co-chairs Terry Asakawa /Tokyo Electron PV Automation Committee representative to the JRSC GCS voting member Emi Ishikawa /Atelier Ishikawa Makoto Ishikawa /Nisshinbo Mechatronics <Month> <Year> <Region> <Committee>

Current Committee Organization Japan PV Automation Committee Terry Asakawa /Tokyo Electron Emi Ishikawa /Atelier Ishikawa Makoto Ishikawa /Nisshinbo Mechatronics Global PV EIS TF Takashi Murakami /Tokyo Electron Makoto Ishikawa /Nisshinbo Mechatronics PV Transport Carrier TF Koji Ohyama /Dainichi Shoji Shuichi Inoue /Miraial EIS: Equipment Interface Specification

Meeting /Event Information Last Committee Meeting April 11, 2012 SEMI Japan, Tokyo, Japan Next Committee Meeting July 19, 2012 <Month> <Year> <Region> <Committee>

Global PV-Equipment I/F Specification TF PV Transport Carrier TF Task Force Updates Global PV-Equipment I/F Specification TF PV Transport Carrier TF 5

Global PV-Equipment I/F Specification TF 1/3: TF Operation Leadership JA: Takashi Murakami /Tokyo Electron Makoto Ishikawa /Nisshinbo Mechatronics EU: Martin Zenning /Jonas & Redmann Mathias Glaser /Manz Automation Charter Study and development of a suite of equipment communication interface related standards for photovoltaic (PV) production systems. The study will lead to development of standards that are optimized to reduce costs with well-fit definitions and specifications to the requirement of real-world PV manufacturing operation. Scope Development of a suite of standards on communication interface between equipment or between equipment and factory for photovoltaic (PV) production systems. “Global Task Force” since July 12, 2011 Decisions on ballots, SNARFs, etc. should be based on global consensus. <Month> <Year> <Region> <Committee>

Global PV-Equipment I/F Specification TF 2/3: Doc. #4804A HC Submitted Doc. #4804A HC, “New Standard: Specification for Horizontal Communication between Equipment for Photovoltaic Fabrication System”, for Cycle 3, 2012. Focuses on Horizontal Communication between equipment. Material and Material Data Transfer, and General Data Transfer Had face-to-face meeting and multiple teleconferences with EU TF to draft the document. JA and EU agreed to split data definition and media interface out from Doc. #4804A to incorporate them into its subordinate standards. The voting results; Will be reviewed at the PV-EIS TF meeting scheduled on July 18th, 2012 in Tokyo. Will be adjudicated at the Japan PV Automation committee meeting scheduled on July 19th, 2012 in Tokyo. <Month> <Year> <Region> <Committee>

Global PV-Equipment I/F Specification TF 3/3: Subordinate Standards to Doc. #4804A 2 SNARFs were approved at Japan PV Automation Committee meeting on April 12, 2011. Doc. #5222 New Subordinate Standard: Data Definition Specifications for a Horizontal Communication between Equipment for Larger Sized Substrate Oriented Photovoltaic Fabrication System to Doc. #4804 “Specification for a Horizontal Communication between Equipment for Photovoltaic Fabrication System” Doc. #5223 New Subordinate Standard: Media Interface Specifications for a Horizontal Communication between Equipment for Larger Sized Substrate Oriented Photovoltaic Fabrication System to Doc. #4804 “Specification for a Horizontal Communication between Equipment for Photovoltaic Fabrication System”

(Application Specific) Doc. #4804A HC and its Subordinate Standards Data Definition (Application Specific) JA: Doc. #5222 “For Larger sized substrate” EU: Doc. #5153 “For crystalline" Doc. #4804A HC Main Body (Common Part) Media Interface (Application Specific) JA: Doc. #5223 “For Larger sized substrate” EU: Doc. #5154 “For Profibus implementation for crystalline” 9

PV Transport Carrier TF Leadership Koji Ohyama /Dainichi Shoji Shuichi Inoue /Miraial Charter To promote standardization of transport carriers used for the photovoltaic production processes. Scope Plans to specify following topics for transport entities: Mechanical interface to equipment load port (ground plate) Material handling interface Mechanical interface to transport system (manual (e.g., PGV) or automated (e.g., Conveyer belt)) ID system requirements Adapters to handle smaller wafer sizes Japan TF intends to function as a liaison part of EU TF. There has not been so much progress in the EU PV transport Carrier TF. <Month> <Year> <Region> <Committee>

Thank you! For more information, please contact: Hiro’fumi Kanno, SEMI Japan hkanno@semi.org