MEMs Sensors Max Tesch

Common Uses Of MEMs Sensors Hand-held Devices Automotive Industry Aerospace Industry Medical Applications

Types Of Sensors Inertial Sensors Gyroscopes Accelerometers Compass Sensor Pressure Sensor Microphone

Accelerometers Measures linear acceleration Uses a “floating” mass Electric Potential is measurable

Accelerometer Explained

Gyroscopes Measures angular acceleration Uses a “floating” mass Utilizes the Coriolis Effect

Gyroscope Explained

Compass

Microphone Uses capacitance to detect sound Soundwaves physically move a membrane Requires air flow to move membrane

Microphone Explained

Pressure Sensors Uses internal pressure as reference Varying electric potential is measured Flex in membrane Changes resistance

Conclusion MEMs sensors are manufactured at a size in the micron range Combine electrical properties to a mechanical operation Because of small output signals, they almost always require an IC to process data Uses a single crystal silicon structure because of preferred mechanical properties Change in electric potential is almost always the measurable variable for these devices

Sources http://www2.st.com/content/st_com/en/products/mems-and-sensors.html http://ieeexplore.ieee.org/stamp/stamp.jsp?arnumber=4610859&tag=1 http://www.st.com/web/en/resource/technical/document/technical_article/DM00034730.pdf http://www.wikid.eu/index.php/MEMS-based_accelerometers http://www.st.com/st-web-ui/static/active/en/resource/technical/document/application_note/DM00103199.pdf http://www.enggjournals.com/ijet/docs/IJET13-05-03-198.pdf