Japan PV Automation Committee Liaison Report June 9, 2011　@InterSolar Europe 2011 München, Germany Venue, Location, Date

Leadership Committee Co-chairs Terry Asakawa /Tokyo Electron PV Automation Committee representative to the JRSC GCS voting member Emi Ishikawa /Atelier Ishikawa

Current Committee Structure Japan PV Automation Committee Terry Asakawa /Tokyo Electron Emi Ishikawa /Atelier Ishikawa PV EIS TF Takashi Murakami /Tokyo Electron Makoto Ishikawa /Nisshinbo Mechatronics PV Transport Carrier TF Koji Ohyama /Dainichi Shoji Shuichi Inoue /Miraial

Meeting Information Last Meeting Next Meeting April 12, 2011 at SEMI Japan, Tokyo, Japan Next Meeting July 21, 2011 at SEMI Japan, Tokyo, Japan

Task Force Updates PV-Equipment I/F Specification Task Force PV Transport Carrier Task Force Venue, Location, Date

PV-Equipment I/F Specification Task Force 1/3: TF Operation Leader Takashi Murakami /TEL Makoto Ishikawa /Nisshinbo Mechatronics Charter Equipment communication interface for photovoltaic (PV) production systems Liaison part of European PV-EIS Task Force Proposing formation of a “Global TF” The TF agreed on proposing formation of a “Global TF” with the EU counterpart to collaboratively work on documents and achieve better consensus prior to issuance of the ballot. The proposal was presented and endorsed at JA committee meeting in Dec. 2010. The EU PV EIS TF members has not reached consensus yet.

PV-Equipment I/F Specification Task Force 2/3: Doc. #4804 Submitted Doc. #4804, “New Standard: Specification for Horizontal Communication between Equipment for Photovoltaic Fabrication System” for Cycle 4. Focuses on Horizontal Communication between equipment. Material and Material Data Transfer, and General Data Transfer Had face-to-face meeting and multiple teleconferences with EU TF to draft the document. JA and EU agreed to split data definition and media interface out from Doc. #4804 to incorporate them into its subordinate standards. The voting results will be adjudicated at the Japan PV Automation Committee meeting on July 21, 2011.

PV-Equipment I/F Specification Task Force 3/3: Subordinate Standards to Doc. #4804 2 SNARFs approved Doc. #5222, New Subordinate Standard: Data Definition Specifications for a Horizontal Communication between Equipment for Larger Sized Substrate Oriented Photovoltaic Fabrication System to Doc. #4804 “Specification for a Horizontal Communication between Equipment for Photovoltaic Fabrication System” Doc. #5223, New Subordinate Standard: Media Interface Specifications for a Horizontal Communication between Equipment for Larger Sized Substrate Oriented Photovoltaic Fabrication System to Doc. #4804 “Specification for a Horizontal Communication between Equipment for Photovoltaic Fabrication System”

PV Transport Carrier Task Force Leader Koji Ohyama /Dainichi Shoji Shuichi Inoue /Miraial Charter To promote standardization of transport carriers used for the photovoltaic production processes. Scope Plans, based on the gathered requirements, to specify the following topics for transport entities: Mechanical interface to equipment load port (ground plate) Material handling interface Mechanical interface to transport system (manual (e.g., PGV) or automated (e.g., Conveyer belt)) ID System requirements Adapters to handle smaller wafer sizes TF intends to function as a liaison and provide inputs to EU TF.

Danke schön! For more information, please contact: Akiko Yamamoto, SEMI Japan ayamamoto@semi.org

Backup Venue, Location, Date

Specified by Document #4804 Subordinate Standards to Doc. #4804 PV Application Specific Part (Data Definition) JA: “Data Definition Specifications for a Horizontal Communication Between Equipment for Larger sized substrate oriented Photovoltaic Fabrication System" to Doc. #4804 EU: "Data Definition specifications for a Horizontal Communication between equipment for crystalline photovoltaic fabrication system" to Doc. #4804 Common Part of Functionalities (HC Main Body) Specified by Document #4804 PV Application Specific Part (Media Interface) JA: “Media Interface Specifications for a Horizontal Communication Between Equipment for Larger sized substrate oriented Photovoltaic Fabrication System" to Doc. #4804 EU: "Profibus implementation specification for a Horizontal Communication between equipment for crystalline photovoltaic fabrication system" to Doc. #4804 12