Module 1: System Overview

System Overview The dual station Mega CBD2000 Model 101 continuously blends water with two chemical constituents, fed by the MegaPure MPT200A Model 101, and dispenses the product to a single global loop after filtration by the SF100 Model 103. Each station alternates between blend and distribution functions to produce a continuous distribution of blended chemical to the FAB. System Overview

System Overview, continued MPT200A Model 101 System Overview The MPT200A Model 101 consists of multiple functional modes: local raw chemical circulation, global raw chemical circulation/feed, and automated chemical circuit flush/purge. MPT200A

System Overview, continued CBD2000 Model 101 System Overview The CBD2000 Model 101 consists of multiple functional modes: chemical blend, chemical distribution, metrology, and flush/purge. CBD2000

System Overview, continued SF100 Model 103 System Overview The SF100 Model 103 is a three-filter, three-bank filtration system consisting of multiple functional modes: single bank filtration, filter bank charging, automated degassing, and flush/purge. SF100

Sequence of Operations Overview MPT200A: Local Raw Chemical Circulation In local circulation modes, positive displacement diaphragm pumps draw chemical from carboys, through filters, and back into the carboys Timers regulate the duration of circulation as well as the frequency of circulation events An additional pre-circulation feature for each chemical addition channel ensures the contents of the carboy or pail have been thoroughly circulated prior to feeding the external raw slurry loop and chemical blender Sequence of Operations

Sequence of Operations Overview, continued MPT200A: Global Raw Chemical Circulation/Feed The MPT200A supplies raw chemical to the blender (CBD2000) in one of two methods: The chemical blender will close an internal raw chemical loop return valve while opening a chemical feed valve The chemical blender will allow continuous circulation of the raw chemical and open the chemical feed valve when needed In the second, manual attenuation valves in the raw chemical return lines to the carboys provide the pressure differential needed to enable appropriate flow to the chemical feed lines in the chemical blender Capacitive sensors indicate when the carboy has been emptied and warn operator of the need to replace them with fresh vessels Supply flow meters can be used to monitor the flow rate of chemical entering the blender raw chemical supply loop Sequence of Operations

Sequence of Operations Overview, continued MPT200A: Automatic Flush/Purge Each chemical circuit is provided with automated flush and purge capability for both local and global supply circuits via filter bypasses Flush and purge entry connections as well as drain lines are positioned along each chemical circuit to maximize coverage The filters can also be manually brought offline, flushed, and purged Sequence of Operations

Sequence of Operations Overview, continued CBD2000: Chemical Blend Blend and distribution functions affected simultaneously, with one station in blend mode while the other station is in distribution operation When the distribution mode has been completed, the station switches to blend mode and the other station switches to distribution mode, ensuring continuous supply of slurry to the fab global loop CBD2000 receives chemicals from MPT200A and blends this with water based on recipe specification Up to five recipe steps can be employed, and order of constituent addition is not fixed A special skip step is available if the number of available steps exceeds the number of constituent addition events Sequence of Operations

Sequence of Operations Overview, continued CBD2000: Chemical Blend, continued When a batch is constructed, both water and slurry are added using a mass-based technique, and chemical is added either by mass or flowmeter Use the HMI to specify the method of chemical addition Once the first constituent has been added, blend contents are circulated in a local process circuit Quality of blend is analyzed during the local circulation process, and values are compared to upper and lower control limits prior to releasing the batch for distribution Sequence of Operations

Sequence of Operations Overview, continued CBD2000: Chemical Distribution When the level of the tank in the distribution station reaches a user-prescribed low setting, the station that has completed its blend becomes available for distribution System employs a nearly bump-less pressure transfer of global loop dispense control from the spent batch to the newly completed batch while transferring the remaining slurry in the spent batch to the tank containing the newly completed batch This process brings the newly completed batch online for distribution to the global loop. Distribution function is enabled by redundant, series centrifugal pumps coupled with active back-pressure regulation of the global loop return line An algorithm relating pump speed to global loop supply pressure is coupled with another algorithm relating back pressure regulator attenuation to the global loop return back pressure ensure an appropriate POU pressure is achieved during variable POU demand regimes Sequence of Operations

Sequence of Operations Overview, continued CBD2000: Metrology pH probes and densitometers are used for metrology during blending and distribution operations Both pH and specific gravity readings qualify the condition of the batch prior to distribution, as well as monitor the mixture condition relative to process control limits during distribution In the former operation, metrology can provide insight to determine if UPW or chemical is leaking across isolation valves into the tank, as well as if the solids have fallen out of dispersion in the liquid Sequence of Operations

Sequence of Operations Overview, continued CBD2000: Flush/Purge Process tubing, tank, local process lines, and global process lines can be flushed and purged The frequency of the flush and purge cycles within the primary process lines can be set up so the cycle is initiated between every batch, or after some multiple of batches Local flush and purge process begins by first draining residual slurry from the tank Tank is then filled with UPW to a prescribed level and circulated for a given duration UPW is then drained, and series of purge steps ensures local circuit is nearly, if not completely, evacuated of liquid Frequency of process can be specified by operator at HMI Global loop can also be flushed/purged independently at the global loop switching valve manifold by UPW and UN2 purge valves located and controlled within system Sequence of Operations

Sequence of Operations Overview, continued SF100: Single Bank Filtration Slurry/chemicals in a blend/dispense system tank can be pumped through the CBD2000 for filtration prior to feeding global loop POU Slurry is filtered through a single filter bank; each bank is equipped with one filter per bank Settings in blend/dispense system determines frequency and duration of filtration function supplied by this system Pressure transducers located before and after filters monitor the pressure across the filters If pressure drop exceeds a predetermined filter change-out setpoint or filter lifetime exceeds a user-defined activity period, alarm is produced and previously active filter bank will be automatically switched to bypass filter bank This feature reserved for global loop filtration functions only Operator can then bring filter offline for service and replacement Sequence of Operations

Sequence of Operations Overview, continued SF100: Filter Bank Charging When the filter media in the housing has been replaced, the filter can be placed in standby and charged Charging process loads the isolated filter housing with UN2 at slightly lower pressure than the global loop Next, drain valves are opened, and the inlet isolation valve to banks are opened to allow slurry to fill void spaces in filter bank and push out purge nitrogen At a time specified to ensure complete evacuation of nitrogen from the lines, the now standby filter bank discharge isolation valves are opened Rate of replacement and amplitude of global loop pressure drop is controlled by attenuation of manual needle valves on the degassing and post-filter drain lines and various timers Sequence of Operations

Sequence of Operations Overview, continued SF100: Automated Degassing Air indicating sensor triggers the opening of a degassing valve on the top of the filter bowl Allows air to leave the filter assembly to drain When air indicating sensor reads the absence of air for a defined period, degassing valve is closed Sequence of Operations

Sequence of Operations Overview, continued SF100: Flush/Purge When filter banks are brought offline and isolated from dispense flow circuit, they are flushed and purged Objective of flush/purge process is to clear the offline filter circuit of material so filter media can be removed by operator Flush/purge events ensure that most residual liquid has been removed before the operator dismantles the filter housings to remove the filter media Prompts at HMI, when followed, ensure that filter media can be removed and filter banks can placed in standby properly Sequence of Operations

Module 2: Operation Module 2: Operation

HMI Overview The HMI on the MPT200A M101 is a simple-to-use touch screen Buttons on the top and left side of the screen are used to access other screens in the system Buttons within the screen operate various functions relating to that screen HMI Overview

HMI Overview, continued The HMI on the CBD2000 M101 is also a simple-to-use touch screen Buttons on the top and left side of the screen are used to access other screens in the system Buttons within the screen operate various functions relating to that screen Most major functions can be controlled through the CBD2000 HMI HMI Overview

System Startup The system is initially set up and powered on by an operator or engineer with an administrative password. Refer to Restarting after EMO if restarting the system. System Startup Toggle the AC Disconnect switch to the ON position. Ensure the EMO is disengaged (pulled out). Press the green Start button on the front of the Controls cabinet. When the startup is complete, the Main Menu is displayed. MPT200A Main Menu CBD2000 Main Menu

Logging In The system defaults to Guest user permission with limited controls and functions. With a higher level of permission, the user password authorizes the user to view and/or edit various controls in the system. Logging In From the top of any screen, press the Login button on menu bar to access the Log On dialog box. Press the User Name field and use the onscreen keyboard to enter a name, and then press the enter key. Press the Password field and enter the corresponding password. Press OK to exit the Log On dialog.

Restarting after an EMO or Unexpected Shutdown If the system shuts down while running an operation, it does not continue where it left off after the restart. An Abort decision is required before continuing to Local or Global recirculation to ensure a high-quality batch in the tank. If the system is shut down due to an EMO condition, pull the EMO button out before the next step. Toggle the AC Disconnect switch to the ON position. Ensure the EMO is disengaged (pulled out). Press the green Start button on the front of the Controls cabinet. Restarting after EMO

Station Swap Control The Station Swap Control Dialog (available on the CBD2000 HMI) allows operator to select the type of swap action to perform manually Station Swap Control To access, from the Station A/B Overview screen for a station in global recirculation, press the Swap Stations button Transfer to Alt Station – Transfers slurry to alternate station; typically, the next station to go online Swap to Alt Station – Swaps tanks with the slurry from the new tank Hard Swap to Alt Station – Immediately swaps tanks with no steps taken to eliminate pressure transients Execute – Loads swap setting chosen

Flush/Purge Batch aborts may be necessary if process parameters, such as pH and density, are out of specification range or if the batch becomes contaminated. Batch abort (flush/purge) is used to drain and flush the blend tank, and when a thorough cleaning is necessary. A gravity drain dumps the entire blend tank contents to the drain, leaving residual fluid in the process piping. Authorization is needed before proceeding with a batch abort. Flush/Purge

Flush/Purge, continued To access, from the Station A/B Overview screen on the CBD2000, press the Station Abort button. The Flush/Purge Control dialog also displays whenever transferring a station from Manual to Auto. Flush/Purge

Flush/Purge, continued Gravity Drain Only – Sends tank contents to gravity drain Complete Flush/Purge – Performs complete station flush/purge Reset Flush/Purge – Resets flush/purge sequence Based on the abort sequence chosen, select the action to perform at the end of the abort sequence. If you choose… Your choices are… Gravity Drain Only Put station in manual Standby Start new batch Complete Flush/Purge Reset Flush/Purge Put station in local recirculation Flush/Purge Execute – Starts sequence as chosen in steps 1 and 2

Sampling system chemistry exposes the operator to chemical hazards. CAUTION Chemical Hazard! Sampling system chemistry exposes the operator to chemical hazards. Wear the following PPE when taking samples: Acid-resistant gloves Chemical safety goggles and full- face shield Protective clothing such as a lab coat, apron, or coveralls Use an approved container to hold the sample. Sampling

NOTICE Sampling, continued Sampling is controlled through the CBD2000 HMI. Ensure the system is currently in dispense mode. If not, wait to take a sample until in dispense mode. Open the sample cabinet door. Place the sample container (open) into the sample cabinet. Open the sample needle valve one (1) turn only for the sample and fill the sample bottle according to site procedures. Sampling NOTICE Opening the needle valve too much may cause pressure transients on the system resulting in excess sample flow to knock over empty the sample bottles. Carefully remove the sample and close the sample door. Remove PPE and dispose according to site regulations and MSDS requirement.