Europe Gases & Liquid Chemicals Committee Report March 20, 2012

Leadership Committee Co-Chairs Non-Voting Co-Chair: Jean-Marie Collard, Solvay Chemicals Gordon Ferrier, Air Products Non-Voting Co-Chair: Gummaar De Vos, FujiFilm Electronic Materials

Committee Organization EU Liquid Chemicals & Gases Committee C: Jean-Marie Collard (Solvay Chemicals) C: Gordon Ferrier (Air Products) VC: Gummaar De Vos (FFEM) Precursor Specifications TF NEW L: Paul Williams (SAFC Hitech) Solvents in Advanced Processes TF L: Gummaar DeVos (FFEM)

Meeting Information Last Meeting Next Meeting October 12, 2011 at SEMICON Europa, Dresden, Germany Next Meeting (Tentatively) June 13-14, 2012 at Intersolar Europe, Munich, Germany

Ballot Results

New SNARFs

Upcoming Ballots for cycle 3 and 4-2012 Doc. 5324, New Standard: Guide for Cyclopentanone Doc. 5326, New Standard: Guide for Methyl Isobutyl Carbinol (MIBC) or 4-Methyl 2-Pentanol Doc. 5325, New Standard: Guide For Dimethyl Dimethoxy Silane (DMDMOS) Doc. 5328, New Standard: Guide forTetrakis(Dimethylamino) Silane (TDMAS) Doc. 5329, New Standard: Guide for Tris(Dimethylamino) Silane (3DMAS)

Precursor Specifications Task Force [1/2] Leader: Rajesh Odedra (SAFC Hitech) Rajesh lefts the company. Paul Williams returns to take over. Standards published SEMI C67-0811- Guide for Hafnium Amides SEMI C68-0811- Guide for Zirconium Amides SEMI C73-0811- Guide for Hafnium Tetrachloride SEMI C74-0811- Guide for Hafnium t-Butoxide SEMI C75-0811- Guide for Tetrakis(Dimethlyamino)Titanium (TDMAT) SEMI C76-0811 - Guide for Zirconium t-Butoxide

Precursor Specifications Task Force [2/2] List of next candidates for standardization: TiCl4 – Air Liquide ? ZrCl4 (per end-user request) – need leader PDMAT [Ta(N(CH3)2)5] – need leader OMCTS/TMCTS – Air Liquide ? Others : see ITRS Precursors table (JMC or Andreas Neuber) New SNARFs Dimethyl Dimethoxy Silane (DMDMOS) - FFEM Monomethyl Silane – Perm Chemicals Tetrakis(Dimethylamino) Silane (TDMAS) – SAFC Hitech Tris(Dimethylamino) Silane (3DMAS) – SAFC Hitech

Solvents in Advanced Processes TF Leader: G. De Vos (FFEM) Doc. 4816: Guide for PGME/PGMEA/mixture Published as SEMI C72-0811 Target list : EG : Ethylene Glycol (following recommendation from ITRS) – need leader Updating HMDS (hexamethyldisilazane) : on going (lead by NA) New SNARFs Guide for Cyclopentanone - FFEM Guide for Methyl Isobutyl Carbinol (MIBC) or 4-Methyl 2-Pentanol - FFEM

Thank you! For more information, please contact: Yan Guillou , SEMI Europe yguillou@semi.org James Amano, SEMI HQ jamano@semi.org