Europe Gases & Liquid Chemicals Committee Report March 2011

Leadership Committee Co-Chairs Non-Voting Co-Chair: Jean-Marie Collard, Solvay Chemicals Gordon Ferrier, Air Products Non-Voting Co-Chair: Gummaar De Vos, FujiFilm Electronic Materials

Committee Organization EU Liquid Chemicals & Gases Committee C: Jean-Marie Collard (Solvay Chemicals) C: Gordon Ferrier (Air Products) VC: Gummaar De Vos (FFEM) Precursor Specifications TF L: open Solvents in Advanced Processes TF L: Gummaar DeVos (FFEM)

Meeting Information Last Meeting Next Meeting October 20, 2010 at SEMICON Europa, Dresden, Germany Next Meeting May 26, 2011 – Brussels, Belgium

Precursor Specifications Task Force Leader: Paul Williams left SAFC Hitech, new leader needed Hafnium amides document (4701D) and Zirconium amides document (4702D) Balloted in Cycle 2-2011. Tetramethylsilane (4MS) document abandoned – not used in large quantities by industry

Precursor Specifications Task Force 4 new ballots issued in Cycle 2-2011. Guide for Hafnium Tetrachloride (4993) Guide for Hafnium t-Butoxide (4994) Guide for Tetrakis(Dimethlyamino)Titanium (4995) Guide for Zirconium t-Butoxide (4996) List of next candidates for standardization: TiCl4 ZrCl4 (per end-user request) PDMAT [Ta(N(CH3)2)5] 3DMAS [HSi(N(CH3)2)3] TDMAS [Si(N(CH3)2)4]

Solvents in Advanced Processes TF Leader: G. De Vos (FFEM) 1st activity : guide for PGME/PGMEA/mixture Ballot 4816 issued in Cycle 2-2011. Target list : EG : Ethylene Glycol (following recommendation from ITRS) PGME : propylene glycol methyl ether PGMEA : propylene glycol methyl ether acetate updating HMDS (hexamethyldisilazane) SEMI Std

Standards past due for 5-year review Leaders are reviewing the below Standards, originated by the European Gases and Liquid Chemicals Committee, to determine if they should be revised, reapproved, or withdrawn. Committee Standard Gases SEMI C3.52-0200 - Standard for Tungsten Hexafluoride, 99.996% Quality SEMI C3.56-0600 - Specification for Diborane Mixtures SEMI C3.57-0600 - Specification for Carbon Dioxide, CO2, Electronic Grade in Cylinders Liquid Chemicals SEMI C53-0704 - Specifications for Dimethyl Sulfoxide (DMSO) [Grades 1 and 2]

Thank you! For more information, please contact: Carlos Lee, SEMI Europe clee@semi.org Ian McLeod, SEMI NA imcleod@semi.org