Japan TC Chapter of Information & Control Global Technical Committee Liaison Report As of January 31, 2017 Ver.1.0

Outline I&CC Japan TC Chapter Leadership Current I&CC Japan TC Chapter Structure Document Review Summary SNARFs and Ballots Task Force Updates Announcement Meeting Information

I&CC Japan TC Chapter Leadership Co-chairs Takayuki Nishimura / SCREEN Semiconductor Solutions Mitsuhiro Matsuda / Hitachi Kokusai Electric Advisor Mitch Sakamoto / Consultant Technical Architect Hiroshi Kondo / Murata Machinery Tadashi Mochizuki / Tokyo Electron Technical Editor TBA 3

Current I&CC Japan TC Chapter Structure Advisor M. Sakamoto (Consultant) I&CC Japan TC Chapter T. Nishimura (SCREEN Semiconductor Solutions) M. Matsuda (Hitachi Kokusai Electric) Technical Architect H. Kondo (Murata Machinery) T. Mochizuki (Tokyo Electron) Technical Editor TBA Discharged Equipment Information System Security (EISS) TF M. Sakamoto (Consultant) JA I&CC Maintenance TF M. Matsuda (Hitachi Kokusai Electric) Fiducial Mark Interoperability TF I&C Committee: M. Matsuda (Hitachi Kokusai Electric) PI&C Committee: S. Mashiro (Tokyo Electron) Silicon Wafer Committee: T. Nakai (SUMCO) Packaging Committee: S. Masuchi (DISCO) Traceability Committee: H. Tsunobuchi (KEYENCE) GEM 300 TF Y. Takasaki (SCREEN Semiconductor Solutions) Y. Toyoshima (Hitachi High-Technologies)

Document Review Summary at Japan Standards Summer 2016 Meetings Cycle 4 -2016 Doc # Description Japan Chapter Action 5601A New Standard: SPECIFICATION FOR WAFER JOB MANAGEMENT (WJM) Passed with editorial changes Ratification ballot issued in Cycle 6-2016 Minority Report was submitted. Contains five claims, but one is invalid. All four claims are supported by GCS voting. Japan TC Chapter reconsidered the Negatives cited in the Minority Report at the last TC Chapter meeting held on October 21, 2016 and does not overturn its previous decision on any of the Negatives. Procedural Review of 5601A was passed at A&R.

Ratification Ballot voted Cycle 6 - 2016 Doc # Description Result R5601A New Standard: SPECIFICATION FOR WAFER JOB MANAGEMENT (WJM) Passed for Cycle 6 Met the Acceptance conditions Passed at A&R in October 2016 and published as SEMI E174-1116 Received four Disapprove Votes. Japan TC Chapter considered them as new business at the meeting held on October 21, 2016. Decided to forward the technical reasons of three votes to Japan GEM300 TF Need to clarify the technical reasons of one vote TC Chapter decided not to consider it due to no reply from the voter Japan GEM300 TF has already started working for the technical reasons of one vote

Document Review Summary at Japan Standards Fall 2016 Meetings Cycle 7-2016 Doc # Description Japan Chapter Action 6033 Line item revision to SEMI E99-1104E (Reapproved 0710) “The Carrier ID Reader/Writer Functional Standard: Specification of Concepts, Behavior, and Services” and SEMI E99.1-1104 (Reapproved 0710) “Specification for SECS-I and SECS-II Protocol for Carrier ID Reader/Writer Functional Standard” -- Line Item 1 To correct nonconforming titles of both SEMI E99 and SEMI E99.1 as following. Passed as balloted Superclean Line Item 2 To correct small technical errors in SEMI E99 and SEMI E99.1 as following. 6034 Reapproval of SEMI E54.21-1110 “Specification for Sensor Actuator Network for MOTIONNET® Communication” 6036 Reapproval of SEMI E153-0310 “Specification for AMHS SEM (AMHS SEM)”

Document Review Summary at Japan Standards Winter 2016 Meetings in conjunction with SEMICON Japan 2016 Cycle 7-2016 Doc # Description Japan Chapter Action 5973 Line Item Revision to SEMI E170-0416 “SPECIFICATION FOR SECURED FOUNDATION OF RECIPE MANAGEMENT SYSTEM (SFORMS)” *The SNARF anticipated some revisions to SEMI E170.1-0416 in conjunction with the revisions to SEMI E170-0416, however, no revision to SEMI E170.1-0416 is needed for these line item revisions. -- Line Item 1 Revise the format of ‘Service Message Description Table’. Passed as balloted Line Item 2 Correct editorial errors in ‘Table 46 Compliance Statement’. Superclean Line Item 3 Add a section ‘Required Items for Each Implementation Step’ which provides a checklist of required items for each implementation step in Related Information. Failed and work will be discontinued.

Ballots to be reviewed at Japan Standards Spring 2017 Meetings Cycle 2 - 2017 Doc # Description TF 6090 Line Item Revision to SEMI E91-0600 (Reapproved 1109) “SPECIFICATION FOR PROBER SPECIFIC EQUIPMENT MODEL (PSEM)” Japan I&C Maintenance TF 6089 Line Item Revision to “SEMI E170.1-0416 SPECIFICATION FOR SECS-II PROTOCOL FOR SECURED FOUNDATION OF RECIPE MANAGEMENT SYSTEM”, “SEMI E170-0416, SPECIFICATION FOR SECURED FOUNDATION OF RECIPE MANAGEMENT SYSTEM (SFORMS)” and “SEMI E5-0813 SEMI EQUIPMENT COMMUNICATIONS STANDARD 2 MESSAGE CONTENT (SECS-II)” with title change. GEM300 TF 6091 Line Item Revision to SEMI E174-1116: SPECIFICATION FOR WAFER JOB MANAGEMENT (WJM)

SNARF/SNARF Withdrawal Approved at Japan Standards Fall 2016 Meetings Doc # Description TF 6035 Withdrawal Line Item Revision to SEMI E91-0600 (Reapproved 1109) “SPECIFICATION FOR PROBER SPECIFIC EQUIPMENT MODEL (PSEM)” JA I&CC Maintenance TF 6090 Line Item Revision to SEMI E91-0600 (Reapproved 1109) “SPECIFICATION FOR PROBER SPECIFIC EQUIPMENT MODEL (PSEM)” *The scope of the SNARF 6035 is needed to change, so the SNARF 6035 had been withdrawn and a new SNARF was proposed per PM 2.2.6. 6091 Line Item Revision to SEMI Ennn-mmyy (SEMI Doc. R5601A): SPECIFICATION FOR WAFER JOB MANAGEMENT (WJM) GEM300 TF 6092 New Standard: SPECIFICATION FOR CENTRALIZED USER AUTHENTICATION AND ROLE AUTHORIZATION MANAGEMENT (CUARAM) 6089 Line Item Revision to “SEMI E170.1-0416: SPECIFICATION FOR SECS-II PROTOCOL FOR SECURED FOUNDATION OF RECIPE MANAGEMENT SYSTEM” and “SEMI E5-0813: SEMI EQUIPMENT COMMUNICATIONS STANDARD 2 MESSAGE CONTENT (SECS-II)” with title change.

SNARF Revision Approved at Japan Standards Winter 2016 Meetings in conjunction with SEMICON Japan 2016 Doc # Description TF 6091 Line Item Revision to SEMI E174-1116: SPECIFICATION FOR WAFER JOB MANAGEMENT (WJM) GEM300 TF 6089 Line Item Revision to “SEMI E170.1-0416: SPECIFICATION FOR SECS-II PROTOCOL FOR SECURED FOUNDATION OF RECIPE MANAGEMENT SYSTEM” and “SEMI E5-0813: SEMI EQUIPMENT COMMUNICATIONS STANDARD 2 MESSAGE CONTENT (SECS-II)” with title change.

Add R1-8 to Related Information 1 of SEMI E170 The TC Chapter authorized for publication to add the compliance table as R1-8 to Related Information 1 of SEMI E170 with subsequent approval by both the GCS and the ISC A&R SC. It was subsequently approved by the I&C GCS members on January 14, 2017. The proposal is forwarded to A&R for subsequent approval.

Task Force Updates [1/5] Equipment Information System Security (EISS) TF The activity started from the study group meeting for virus protection by white list at SEMICON Japan 2011. The SNARF (#5422) for Guide for Equipment Information System Security was approved in 2012. Ballot #5422A passed at the Japan TC Chapter meeting at SEMICON Japan 2013 and was published as SEMI E169-0414. Then the task force started discussion on Role Base Access Control. Further discussion on the topic was taken over to GEM300 TF summer 2016. The discharge of EISS TF was approved at I&C Japan TC Chapter meeting held on December 16, 2016.

Task Force Updates [2/5] Fiducial Mark Interoperability TF Last TF meeting was held on November 18, 2015 T7 issues SNARF 5890 Delete all position specifications from SEMI T7 because position specifications are also described on SEMI M1 and other related Silicon Standard. Document 5890 Submitting to 2015 Cycle 7, passed with editorial changes at JA TC Chapter meeting of Traceability TC on Dec. 18, 2015, and passed A&R. Published as T7-0516. Others Assembly and Packaging: Discussing backend alignment issues with introducing fiducial mark wafer. TF leaders to start discussion about disbanding this TF if the TF doesn’t have further activity.

Task Force Updates [3/5] GEM 300 TF #5973: Line Item Revision to SEMI E170 & SEMI E170.1 SNARF revision was approved at I&C Japan TC Chapter meeting on June 16. It is highly probable that documentation quality issues The SNARF anticipated some revisions to SEMI E170.1-0416 in conjunction with the revisions to SEMI E170-0416, however, no revision to SEMI E170.1-0416 is needed for these line item revisions. Ballot was reviewed at I&C Japan TC Chapter meeting on December 16. LI 1 & LI 2 passed as balloted LI 3 failed and work will be discontinued. #5601: New Standards for “Wafer Job Management” Ballot #5601A Passed with editorial changes at I&C Japan TC Chapter meeting on June 16. Passed at A&R in July Minority Report to TC Chapter decision was submitted and made pre-consideration of the Minority Report Ballot #R5601A Submitted in Cycle 6 Met acceptance conditions Passed at A&R in October. Published as SEMI E174-1116

Task Force Updates [4/5] GEM300 TF (cont’d) #6091: Line Item Revision to SEMI E174-1116 SNARF was approved at I&C Japan TC Chapter meeting on October 21. SNARF Revision was approved at I&C Japan TC Chapter meeting on December 16. Ballot to be submitted for Cycle 2-2017 #6089: New SNARF for Line Item Revision to E170.1 and E5 According to comment from potential Standards users at GEM300A STEP, TF consider to simplify E170 subordinate standard by using dedicated SECS II message, instead of OSS generic service. Assumed stream number for E170.1 is S20. #5618 TF decided to give up the activity for #5618: New Standard: Specification for Preservation of Recipe Integrity (PRI), which is owned by NA TC Chapter. #6092: New standard “CUARAM: Centralized User Authentication & Role Authorization Management” Scope was discussed with EISS TF. Material of explanation for concept of CUARAM is distributed to I&C TC Members in Korea and Taiwan in order to receive response from them.

Task Force Updates [5/5] JA I&CC Maintenance TF Last TF meeting was held on October 21, 2016. #5615: SEMI E98 and SEMI E98.1 (OBEM) SNARF withdrawal was approved at I&C Japan TC Chapter meeting on June16. #6033: Line Item Revision to SEMI E99 and SEMI E99.1 (Carrier ID Reader/Writer) LI1 & LI2: Passed as balloted at I&C Japan TC Chapter meeting on October 21. #6035: Line Item Revision to SEMI E91 (PSEM) SNARF withdrawal was approved at I&C Japan TC Chapter meeting on October 21. The scope of the SNARF is changed, so a new SNARF was proposed per PM 2.2.6. #6090: Line Item Revision to SEMI E91 SNARF was approved at I&C Japan TC Chapter meeting on October 21. Ballot to be submitted for Cycle 2-2017 The activity of SEMI E107 “Specification of Electric Failure Link Data Format for Yield Management System” No action to be made.

Announcement GEM300A SEMI E170 SFORM, SEMI E171 PCL and SEMI E174 WJM document group was named “GEM300A”.

Meeting Information - Japan TC Last Meeting – Japan Winter 2016 Meetings in conjunction with SEMICON Japan 2016: Friday, December 16, 2016 1:00PM-5:00PM @ Tokyo Big Sight Conference Tower, Tokyo, Japan Next Meeting – Japan Spring 2017 Meetings: Friday, April 21, 2017 1:30PM-5:00PM @ SEMI Japan Office, Tokyo, Japan

Schedule for I&CC Japan TC Chapter Meetings Spring on April 21, 2017 Summer in June, 2017 Fall in October, 2017 Winter on December 15, 2017 (tentative) in conjunction with SEMICON Japan 2017

End of I&CC Japan TC Chapter Liaison Report Thank You! For more information, please contact Chie Yanagisawa at SEMI Japan (cyanagisawa@semi.org)