North America Information & Control Technical Committee Chapter Liaison Report April 2017 new

Outline Leadership Organization Chart Meetings Information Ballot Results Upcoming Ballots / Ballots to be Reviewed during SEMICON West 2017 TC Meeting SNARF(s) Approved by GCS in between TC Chapter Meetings Old Business (5 Year Review and 3 Year SNARFs) TF Reports Proposed Meeting Schedule

Leadership Committee Co-chairs Leadership Changes Brian Rubow (Cimetrix) Jack Ghiselli (Ghiselli Consulting) James Moyne (AMAT/University of Michigan) Leadership Changes DDA Task Force new TF leader: Albert Fuchigami (PEER Group) new

N.A. I&Cs TC Updated Organization Chart Legend C Chair/Co-Chair L Task Force Leader TF Task Force North America Information & Control Technical Committee Chapter C: Brian Rubow (Cimetrix) C: Jack Ghiselli (Ghiselli Consulting) C: James Moyne (AMAT/UMICH) Diagnostic Data Acquisition (DDA) TF L: Brian Rubow (Cimetrix) L: Albert Fuchigami (PEER Group) Sensor Bus TF L: James Moyne (AMAT/UMICH) Energy Saving Equipment Communication (ESEC) TF L: Mike Czerniak (Edwards) L: Andreas Neuber (AMAT) Process Control Systems (PCS) Architecture TF L: James Moyne (AMAT/UMICH) L: Chris Maloney (Intel) GEM300 TF L: Brian Rubow (Cimetrix) L: TBD Graphical User Interfaces (GUI) TF L: Frank H. Summers (ISGI) NOTE: Italics means group is currently inactive.

Meeting Information Last meeting Next meeting April 5, 2017 @ N.A. Standards Spring 2017 Meetings SEMI Headquarters, Milpitas California Next meeting July 12, 2017 @ SEMICON West 2017 Meetings San Francisco, California Updated

Ballot Results Cycle 1&2- 2017 Doc.# Document Title Action 6026A Line Item Revision to SEMI E109-1110, Specification for Reticle and Pod Management (RPMS) Passed 6066A Line Item Revision to SEMI E130-1104-0710R, Specification for Prober Specific Equipment Model for 300 mm Environment (PSEM300) and SEMI E130.1-1104-0710R, Specification for SECS-II Protocol for Prober Specific Equipment Model for 300 mm Environment (PSEM300) 6068A Line Item Revision to SEMI E116-0707E, Specification for Equipment Performance Tracking and SEMI E116.1 Specification for SECS-II Protocol for Equipment Performance Tracking 5872 Line Item Revision to SEMI E172-1015, Specification for SECS Equipment Data Dictionary (SEDD) Failed 5549A Revision to SEMI E30-0416, Generic Model for Communications and Control of Manufacturing Equipment (GEM) with title change to: Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM) 5738 Revision to SEMI E87.1-0707, Specification for SECS-II Protocol for Carrier Management (CMS) 6064A Line Item Revision to SEMI E121-0305, Guide for Style and Usage of XML for Semiconductor Manufacturing Applications 6067A Reapproval for SEMI E54.10-0600 (Reapproved 1111) Specification for Sensor/Actuator Network Specific Device Model for an in Situ Particle Monitor Device 6116 Reapproval for SEMI E54.17-0812, Specification of Sensor/Actuator Network for A-LINK *Failed new * NA I&C Chapter voted to transfer ownership of SEMI E54.17 to Japan I&C TC

Ballots to be Issued for N.A. SEMICON West 2017 Meetings Adjudication Doc.# Document Title Voting Period 5716 Revisions to SEMI E133-1104-0710R, Specification for Automated Process Control Systems Interface and SEMI E133.1-1104-0710R, Provisional Specification for XML Messaging for Process Control Systems (PSC) Cycle 5-2017 TBD Line Item revision to SEMI E54.9, Specification for Sensor/Actuator Network Communication for Modbus/TCP over TCP/IP 5872C Line Item Revision to SEMI E172-1015, Specification for SECS Equipment Data Dictionary (SEDD) 6114 Line Item Revision to SEMI E5-0813, SEMI Equipment Communications Standard 2 Message Content (SECS-II) Reapproval to SEMI E82-1106 (Reapproved 0612), Specification for Interbay/Intrabay AMHS SEM (IBSEM) Reapproval to SEMI E88-0307 (Reapproved 0612), Specification for AMHS Storage SEM (Stocker SEM) Line Item Revision to SEMI E4-0699 (Reapproved 0612), SEMI Equipment Communications Standard 1 Message Transfer (SECS-I) to correct nonconforming title to: Specification for SEMI Equipment Communications Standard 1 Message Transfer (SECS-I) new

SNARF(s) Approved by GCS in between TC Chapter Meetings Revision to SEMI E95 -1101, Specification for Human Interface for Semiconductor Manufacturing Equipment. Approved by GCS 12/22/2016 SNARF #6124

SNARFs 3 Year Status None needed extension. new

5-Year Review – Reapproval Ballots Issued in H-2 2016 Name Due Title Status SEMI E116-0707E 7/1/2012 Specification for Equipment Performance Tracking Passed TC, pending A&R. SEMI E116.1-0707 Specification for SECS-II Protocol for Equipment Performance Tracking (EPT) SEMI E130-1104 (Reapproved 0710) 7/1/2015 Specification for Prober Specific Equipment Model for 300 mm Environment (PSEM300) SEMI E130.1-1104 (Reapproved 0710) Specification for SECS-II Protocol for Prober Specific Equipment Model for 300 mm Environment (PSEM300) SEMI E109-1110 11/1/2015 Specification for Reticle and Pod Management (RPMS) SEMI E121-0305 (Reapproved 1111) 11/1/2016 Guide for Style and Usage of XML for Semiconductor Manufacturing Applications *SEMI E87.1-0707 3/1/2017 Specification for SECS-II Protocol for Carrier Management (CMS) Updated 3/30/17 *SEMI E87.1-0707: Activity transferred from Korea I&C TC to NA I&C TC GEM300 TF (SNARF #5738) via GCS approval process on 08/24/2016.

5-Year Review – Reapproval Ballots to be Issued in H1 2017 Name Due for Review Title Status SEMI E54.10-0600 (Reapproved 1106) 11/1/2016 Specification for Sensor/Actuator Network Specific Device Model for an In-Situ Particle Monitor Device Passed TC, pending A&R. SEMI E90-0312 3/1/2017 Specification for Substrate Tracking To be issued Cycle 7-17 **SEMI E4-0699 (Reapproved 0612) 6/1/2017 SEMI Equipment Communications Standard 1 Message Transfer (SECS-I) To be issued Cycle 5-17 SEMI E82-1106 (Reapproved 0612) Specification for Interbay/Intrabay AMHS SEM (IBSEM) SEMI E88-0307 (Reapproved 0612) Specification for AMHS Storage SEM (Stocker SEM) Updated 3/30/17 ** Subject for "Nonconforming Title" review. Please refer to the Procedure Manual Appendix 4 (page 76)

5 Year Review – Inactive Standards Standards to receive Inactive status SEMI E54.16-1106 (Reapproved 1211), Specification for Sensor/Actuator Network Communications for LonWorks

Task Force Reports [1/5] Diagnostic Data Acquisition (DDA) - Task Force New Co-Chair Albert Fuchigami from PEER Group An additional co-chair might be added next meetings Meeting Discussion EDA freeze 3 plan discussions Coordination with the Korea DDA Task Force Ballot Adjudication FAILED - None PASSED - 6064A - Superclean New/Updated SNARF(s) None Ballot Plans Next Cycles

Task Force Reports [2/5] Energy Saving Equipment Communication (ESEC) – Task Force Activities resumed at Standards Spring 2017 Meetings Proposed SNARF for Line Items Revision to SEMI E167. Key points in provisional SNARF Draft: Situation: The original standard was up to now not implemented in any fab. Besides that the communication standard between tool and subfab components has been released. Purpose: It has to be checked whether the terminology and logic aligns between the two standards. Besides that it has to be reviewed whether there are any obstacles for implementation. Simplify the state diagram so that it aligns with SEMI E175. Make forecast available by Host to production equipment on energy-saving opportunities in the near future (e.g. for the next 2 hours or definable period of time). Availability forecast should be chamber-specific (optional). Clean-up the standard regarding detailed requirements; remove or make optional. Distinguish between equipment and chamber states. Plan submit SNARF for approval at Semicon West 2017 meeting Next Step: plan to review SEMI E175 in 2018

Task Force Reports [3/5] Generic Equipment Model 300 (GEM300) - Task Force Seeking Co-Chair; Ballot Adjudication FAILED 5872A E172 SEDD Update PASSED 6066A-1, 6066A-2 E130 minor edit, E130.1 reapproval 6068A-1, 6068A-2 E116 minor edit, E116.1 reapproval 6026A E109, Line-item revision 5738 E87.1 Major Revision to remove Provisional status With 2 Editorial Change 5549A GEM E30 title change/conformance organization With 2 Editorial Changes New/Updated SNARF(s) None Ballot Plans Cycle 5 5872C E172 SEDD Update 6114 New Simple Large Recipe

Task Force Reports [4/5] Process Control Systems (PCS) - Task Force Ballots adjudicated Ballot 6067A (reapproval) Passed Authorized ballots Revisions to SEMI E133 and SEMI E133.1 for Cycle 5-17 submission Sensor Bus (SB) - Task Force No leadership changes Ballot 6116 (reapproval) Withdrawn & to be referred to Japan sister task force New business New SNARF for adding a GENSen SDM mapping into E54.9. new

Task Force Reports [5/5] Graphical User Interfaces (GUI) – Task Force No leadership changes SNARF6124, Revision to SEMI E95-1101-0307R, Specification for Human Interface for Semiconductor Manufacturing Equipment Reviewed and discussed the specification to be reorganized and expanded Discussed challenges related to small screen device displays and operating systems, i.e., tablet and smart phone form factors First step, how the information displayed in the E95 Title Panel can be represented across all form factors Ballot Adjudication None Ballot Plans Next Cycles new

Next Meeting Schedule Monday, July 10, 2017, San Francisco, CA The next N.A. Information & Control Standards Meetings are tentatively scheduled* for July 10-12, 2017 at San Francisco, California in conjunction with the N.A. Standards SEMICON West 2017 Meetings. Exact meeting date and details will be announced when finalized and available at http://www.semi.org/en/standards-events Monday, July 10, 2017, San Francisco, CA NA I&C Leadership (12:00 Noon – 1:00 PM) DDA (1:00 PM – 3:00 PM) PCS (3:00 PM – 5:00 PM) I&C GCS (5:00 PM – 5:30 PM) Tuesday, July 11, 2017, San Francisco, CA I&C GUI TF (9:00AM – 12:00 noon) Energy Saving Equipment Communication (9:00 AM – 12:00 noon) GEM300 (1:00 PM – 4:00 PM) Sensor Bus (4PM – 6:00 PM) Wednesday, July 12, San Francisco, CA I&C Committee (8:00 AM – 14:00 PM) *All times are in Pacific Time. Times and dates are subject to change without notice. new

Thank you. For more information or to participate in N. A Thank you! For more information or to participate in N.A. Information & Control TC activities, please contact Inna Skvortsova at SEMI (iskvortsova@semi.org) Updated