Repeatablility and Hysteresis

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Presentation transcript:

Repeatablility and Hysteresis A High Tech manufacturing example of Precision This presentation is partially animated. Only use the control panel at the bottom of screen to review what you have seen. When using your mouse, make sure you click only when it is within the light blue frame that surrounds each slide.

Accuracy and Precision

Accuracy of a measurement describes the difference between an observed value and the expected (true) value. If observed value is near the expected (true) value, measurement has high accuracy. Precision of a measurement describes the differences among individual measurements themselves; if they are close together there is high precision.

Precision Repeatability Hysteresis (As the idea is used in high tech manufacturing). Repeatability A term often used to indicate if the measuring system, the measuring device, the computer and the person, give the same measurement value each time a measurement is made under the same set of condition. Hysteresis A term used to indicate that a measurement system recording values of temperature, for example, does not give the same temperature value as the temperature is going up when compared to when the temperature is going down.

An Example for the term Repeatability Precision An Example for the term Repeatability In the process of manufacturing 300 or so chip on the surface of each silicon wafer, a set of wafers are placed in a very hot furnace. In fact, the wafers shown entering this furnace will be placed in and out of the furnace at lest 10 time before the chips are completely fabricated.

Precision (Repeatability) The process specialist must operate the furnace computer control system and also analyze the temperature data as the furnace temperature goes up and then down. The wafers enter the furnace when the furnace temperature is at 700 oC. The temperature is then raised slowly a rate of , 5-10 oC per minute, until it gets over 1000 oC.

Precision (Repeatability) Device #1 #2 1010 oC 1011 oC 1012 oC 1009 oC The table below shows the performance of two different temperature sensors. Both sensors measure temperature from 700 oC to 1200oC. Either one could be use in the furnace. Which one would you recommend be use as a replacement sensor? Device #1 #2 1010 oC 1011 oC 1012 oC 1009 oC 1013oC 1008 oC 1011 oC 1010 oC 1014 oC 1008 oC Note: Data in table represents 5 repeated measurements for each device. All measurements taken at the same conditions

The table showed the performance of two new temperature sensors taking replicate measurements under the same furnace conditions. Either one could be used as a replacement for the temperature sensor now in use. Which one would you recommend be use as a replacement sensor? Device #1 #2 1010 oC 1012 oC 1013oC 1011 oC 1014 oC 1009 oC 1008 oC The correct one to select as a replacement is the one that is more repeatable. Therefore, the only issue now is figure out how to calculate the repeatability. Repeatability and deviation are calculated in a similar but not identical fashion.

Repeatability The calculation for Repeatability is exactly like the calculation for determining a percent grade on a quiz or test. } { Ggrade = (the grade you got on your test) (the range of possible scores on the test) 100 } { Rrepeatability = (the measured temperature value) (the range of possible temperatures that could be measured) 100

} { } { } { ? Grade ( %) Calculation examples Ggrade = (the grade you got on your test) (the range of possible scores on the test) 100 } { } { 52 points (test #1 Student #2) 53 (test 2, student #1) 54 (test 1, student #1) 100 = 90% 88% ? 87% Ggrade = 60 points Scores from 0 to 60 are possible Student #1 Student #2 Test number 1 54 points 90% 52 points 87% 2 53 points 88% 51 points 55 points 49 points 92% 82% 85% 3 56 points 55 points 93% 92% 4 5

} { } { } { It does not make any difference which sensor is installed. Repeatability (%) Calculation examples } { Rrepeatability = (the measured temperature value) (the range of possible temperatures that could be measured) 100 It does not make any difference which sensor is installed. } { } { 1010 oC (temp 1, Device #1) 1011 oC (temp1, Device 2) 1012 oC (temp 2, Device #1) 100 = 84% ? 84% 84.3% Rrepeatability = 1200 oC Device #1 #2 1010 oC 1012 oC 1013oC 1011 oC 1014 oC 1009 oC 1008 oC Temperatures from 0 to 1200 oC are possible 1 2 3 4 5 Device #1 #2 Replicate measurement 1010 oC 84% 1011 oC 84% 1012 oC 84% 1009 oC 1008 oC 1010 oC 84% 1013 oC 1011 oC 1014 oC 84% 85%

Repeatability } { Rrepeatability = (the measured temperature value) (the range of possible temperatures that could be measured) 100 There are many types of temperature sensors that can be used to measure the temperature inside a very hot furnace. Most of these devices will measure temperature over a shorter range than 0 oC to 1200 oC. When this is the case, the Repeatability calculation is done using a more general rule (equation).

Repeatability } { Rrepeatability = (the measured temperature value) (the range of possible temperatures that could be measured) 100 Many temperature sensor can measure temperature over a shorter range than 0 oC to 1200 oC. When this is the case, the Repeatability calculation is slightly different. } { Rrepeatability = [ (the measured temperature value) - (lowest measurable temperature in range )] (the range of possible temperatures that could be measured) 100

What is the repeatability for the following two temperature devices if they have a temperature measurement range from 700 oC to 1200oC? } { Rrepeatability = 100 (1010 oC - 700 oC) Temp # 1, Device # 1 (1200 oC - 700 oC) 100 } { Rrepeatability = = 1012 oC (temp 2, Device #1) 311 oC (temp1, Device 2) 310 oC (temp 1, Device #1) 62% 500 oC Device #1 #2 1010 oC 1012 oC 1013oC 1011 oC 1014 oC 1009 oC 1008 oC Temperatures from 700 oC to 1200 oC possible 1 2 3 4 5 Device #1 #2 Replicate measurement 1010 oC 62% 1011 oC 62% 1012 oC 62% 1009 oC 1008 oC 1010 oC 62% 1013 oC 1011 oC 1014 oC 63% 62%

Temperatures from 700 oC to 1200 oC possible 3 4 5 Device #1 #2 Replicate measurement 1012 oC 1013 oC 1011 oC 1014 oC 1010 oC 62% 63% 1011 oC 1009 oC 1008 oC 1010 oC 62% Thus when the two sensors have a shorter range, Device # 2 has a more consistence performance.