Field Emission Measurement 10-5 Pa range Distance : 70 Anode Bias : 0 - 2500 V Stainless Steel Anode of Diameter 2 mm Surface Analysis : SEM, Auger and Raman Spec. 5 mm This is the schematic diagram of field emission measurement apparatus. The pressure was kept at 01-7 torr. The anode assembly was touched on the surface. The spacing between anode and the film surface was 50 pm 5 um. We measured the current while increasing anode bias from 0 to 2500V. We used the stainless steel anode of 2mm diameter after mirror quality polishing. We observed that the electrica break down occured when we first measure the emission. This break down increase the emission behavior. This activation of the surface was observed by other researchers.