MEMS Devices for Studying Insect Biomechanics 3-Axis ground reaction force measurements for cockroach running Sensor design and fabrication Characterization and preliminary results Future Work Complete sensor characterization Application to smaller insects

Insect Measurement Estimated Requirements Camponotus modici 1cm Drosophila melanogaster 1mm Insect Sensor Performance Blaberus discoidalis

Wafer Layout and Sensor Geometry Sensor Design Wafer Layout and Sensor Geometry   10cm wafer 5mm sensor pad

Flexure Geometry and Instrumentation Sensor Design Flexure Geometry and Instrumentation

SEM Images – Sensor Features Sensor Design SEM Images – Sensor Features

Sensor Characterization Static normal load testing Performance Un-amplified sensitivity: ~1.2V/N Minimum resolvable force: ~7mN Mechanical bandwidth: ~4kHz

Sensor Characterization Piezoelectric actuator tests Sensor output vs. load placement Bottom Left Top Left Bottom Right Top Right Bottom Right Top Right Bottom Left Top Left

Future Work Continue sensor characterization Insect measurements In-plane force sensitivity assessment Dynamic/resonant mode excitation Refine data reduction model Insect measurements Cockroach running experiments: ground reaction forces (B. discoidalis) Ant experiments: ground reaction, other interesting measurements? (C. modici)