Quartz Liner Upgrade In 200 Series ICP tools

Retractable quartz liner 11/22/2018 High versatility and uptime for 200 Series ICP tools Fast plasma cleaning and low particle generation in ICP-CVD Hot reactor walls – up to 250°C – for no process cross-contamination Easy and fast manual cleaning for harsh ICP-RIE processes Quartz Liner

ICP reactor preparation Liner mounting 11/22/2018 Operation Sequence ICP reactor preparation Quartz Liner

Mounting inside reactor Liner mounting 11/22/2018 Operation Sequence Mounting inside reactor Quartz Liner

EASY LINER replacement by a single person Liner mounting 11/22/2018 Timing 1 min Reactor Venting 4 min Pumping down to 10-4 Tor 5 min Liner replacement Plasma cleaning EASY LINER replacement by a single person Quartz Liner

Drie of hard materials DRIE of SiC DRIE of glass DRIE of sapphire 11/22/2018 DRIE of SiC DRIE of glass DRIE of sapphire DRIE of quartz Quartz Liner

Small feature Si etching Drie of silicon 11/22/2018 Si etching 40 µm deep Si etching 60 µm deep Si etching 250 µm deep Small feature Si etching (AR 1:15) Quartz Liner

Retractable quartz liner 11/22/2018 High versatility and uptime for 200 Series ICP tools Fast plasma cleaning and low particle generation in ICP-CVD Hot reactor walls – up to 250°C – for no process cross-contamination Easy and fast manual cleaning for harsh ICP-RIE processes Quartz Liner