MEMS TECHNOLOGY

INTRODUCTION MEMS: micro-electro-mechanical systems Combination of mechanical functions (sensing,moving,heating) and electrical functions (switching ,deciding) on the same chip using micro fabrication technology.

MEMS PROCESS PowerPoint Same as the process steps used for making conventional electronic circuits

FABRICATION PROCESS:

DEPOSITION: CHEMICAL DEPOSITION Chemical vapour deposition PHYSICAL DEPOSITION Sputtering

LITHIOGRAPHY:   Application of photo resist Optical exposure to print an image of the mask onto the resist Immersion in an aqueous developer solution to dissolve the exposed resist

ETCHING: DRY ETCHING WET ETCHING

MATERIALS FOR MEMS: Materials are the basic things required to develop micro sensors Metals Polymers Ceramic materials Semiconductors Composite materials

MICRO MACHINING TECHNOLOGY: Process of shaping silicon or other materials to realise 3-D mechanical in miniature form and the mechanical devices that are compatible with the micro electronic devices

TYPES OF MICROMACHINING: BULK micromachining: SURFACE micromachining: LIGA process:

MEMS ACCELEROMETRER: CONVENTIONAL ACCELEROMETER SENSOR Made of bulky and heavy metal parts Require high operating voltage/current Needs careful maintenance Highly expensive not throwaway type

PIEZO-RESISTIVE ACCELEROMETER:

LAYOUT OF THE RESISTOR:

MASKS that are used 4 ACCELEROMETER:

FABRICATION PROCESS:

Contd….

INTERFACE ELECTRONIC CKT

MEMS ACCELEROMETER

ADVANTAGES: Significantly lower manufacturing costs Small inertial mass Particularly realized in the area of: – sensors – signal switching

TECHNICAL LIMITATIONS: Imprecise fabrication methods Expensive and complex packaging CAD Design tool inaccuracies

APPLICATIONS: Accelerometers in consumer electronics devices such as game controllers Communications biotechnology

FUTURE: As with all emerging technologies, the MEMS industry had been predicted to revolutionize technology and our lives. It has the potential to change our daily life as much as computer