NA Gases Committee Liaison Report SEMICON Japan December 2008

Leadership Chairman Tim Volin / Parker Hannifin

Gases Committee C: Tim Volin – Parker Hannifin Components SC Gary Frank - Consultant Contamination SC Jim McAndrew - Air Liq Keith Kerwin - TI Materials & Process SC Tim Volin – Parker Hann. Filters & Purifiers TF Troy Scoggins – Entegris Biswanath Roy - PALL Materials of Construction Gas Delivery Systems TF Craig Burton – Valex Tim Volin – Parker Hann. Mass Flow TF Gary Frank – Consultant Pressure Measurement TF Emir Vukotic – AMAT Heater Jacket TF (new) David Colquhoun–BriskHeat

Meeting Information Last meeting Next meeting Tuesday, Nov 4, 2008, NA Fall Meetings, San Jose, CA Next meeting Tuesday, March 31, 2009, NA Spring Meetings, Vancouver, Canada

New SNARF New Standard: Guide for Heater Jacket for Use in Semiconductor Revision of SEMI E52-0309 - Practice for Referencing Gases, Gas Mixtures and Vaporizable Materials Used in Digital Mass Flow Controllers Revision of SEMI F32-0706 - Test Method for Determination of Flow Coefficient for High Purity Shutoff Valves Reapproval of SEMI E66-1103 - Test Method for Determining Particle Contribution by Mass Flow Controllers Reapproval of SEMI E67-0304 - Test Method for Determining Reliability of Mass Flow Controller Reapproval of SEMI F79-0703 - Guideline for Gas Compatibility with Silicon Used in Gas Distribution Components

Ballot Results Summary [1/3] Ballot Passed Technical Committee Review Doc. 4582, Revision of E52-0308 - Practice for Referencing Gases, Gas Mixtures and Vaporizable Materials Used in Digital Mass Flow Controllers Doc. 4601A, Reapproval of C14-95 (Reapproved 1102) - Test Method for Particle Shedding Performance of 25 cm Gas Filter Cartridges Doc. 4623, Revision of F73-1102, Test Method For Scanning Electron Microscopy (SEM) Evaluation Of Wetted Surface Condition Of Stainless Steel Components Doc. 4630, Reapproval of E69-0298 (Reapproved 1103) - Test Method for Determining Reproducibility and Zero Drift for Thermal Mass Flow Controllers Doc. 4631, Reapproval of E68-0997 (Reapproved 1103) - Test Method for Determining Warm-Up Time of Mass Flow Controllers

Ballot Results Summary [2/3] Ballot Passed Technical Committee Review Doc. 4632, Revision of E56-1104 - Test Method for Determining Accuracy, Linearity, Repeatability, Short-Term Reproducibility, Hysteresis, and Deadband of Thermal Mass Flow Controllers Doc. 4633, Reapproval of E12-0303 - Standard for Standard Pressure, Temperature, Density, and Flow Units Used in Mass Flow Meters and Mass Flow Controllers Doc. 4636, Revision of SEMI F72-1102 Test Method for Auger Electron Spectroscopy (AES) Evaluation of Oxide Layer of Wetted Surfaces of Passivated 316L Stainless Steel Components Doc. 4655, Revision of C3.20-92- (Reapproved 0999) Standard Specification for Helium (He), In Cylinders, 99.9995% QUALITY Doc. 4656, Revision of C3.24-0301 - Specification for Sulfur Hexafluoride (SF6) in Cylinders, 99.97% QUALITY

Ballot Results Summary [3/3] Ballot Failed Technical Committee Review Doc. 4657, New Standard: Specifications and Guidelines for Tungsten Hexafluoride (WF6)(Subj: combining C3.26 and C3.52)

Upcoming Ballots [1/2] Technical Ballot for Cycle 1&2 ’09 Doc. 4657A, New Standard: Specifications and Guidelines for Tungsten Hexafluoride (WF6) Doc. 4680, Rev. to E52-0309, Practice for Referencing Gases and Gas Mixtures Used in Digital Mass Flow Controllers Doc. 4677, Reapproval of E66-1103 - Test Method for Determining Particle Contribution by Mass Flow Controllers Doc. 4678, Reapproval of E67-0304 - Test Method for Determining Reliability of Mass Flow Controller

Upcoming Ballots [2/2] Technical Ballot for Cycle 1&2 ’09 Doc. 3440B, New Standard: Test Method For Pressure Transducers In Gas Delivery Systems Revision of SEMI F32-0706 - Test Method for Determination of Flow Coefficient for High Purity Shutoff Valves Reapproval of SEMI F79-0703 - Guideline for Gas Compatibility with Silicon Used in Gas Distribution Components Reapproval of Gases standards (C3.12,C3.27 ,etc)

Components Subcommittee Mass Flow Controller TF/Gary Frank (Consultant) Revising E52-0309, Practice For Referencing Gases, Gas Mixtures and Vaporizable Materials Used in Digital Mass Flow Controllers - ongoing New gas code is frequently requested Submitting 5 year reapproval of Mass Flow Controller standards SEMI E66-1103, SEMI E67-0304

Components Subcommittee Pressure Measurement TF/Emir Vukotic (AMAT) Doc. 3440B, New Standard: Test Method For Pressure Transducers In Gas Delivery Systems, failed and was sent back for rework Doc will be reballoted and reviewed early next year, Spring 2009

Contamination Subcommittee Filters & Purifiers TF/Troy Scoggins (Entegris), Biswanath Roy (Pall) Reviewing 5 year standards F70-0302 - Test Method for Determination of Particle Contribution of Gas Delivery System – to be submitted next meeting F30-0298 - Start-up And Verification Of Purifier Performance Testing For Trace Gas Impurities And Particles At An Installation Site – Still reviewing F21-1102 - Classification of Airborne Molecular Contaminant Levels in Clean Environments – Still reviewing

Materials & Processes Subc Materials of Construction Gas Delivery Systems TF/ Tim Volin(Parker Hannifin) Submitting 5 year review standards SEMI F72-1102 - Test Method for Auger Electron Spectroscopy (AES) Evaluation of Oxide Layer of Wetted Surfaces of Passivated 316L Stainless Steel Components – Passed SEMI F73-1102 - Test Method for Scanning Electron Microscopy (SEM) Evaluation of Wetted Surface Condition of Stainless Steel Components – Passed Discussing new document for welding and joining processes

Materials & Processes Subc Heater Jacket TF/David Colquhoun (BriskHeat) (new) Was recently formed at Fall meeting Demand for higher performance jacketing heater systems in the semiconductor manufacturing sector is beginning to require standardization due numerous issues impacting the customer/user base and the manufacturers of heater systems for the semiconductor equipment industry.