SPiiPlus Training Class Single-Axis Motion

Single-Axis Motion The controller commands single axis motion by generating 3rd order motion profiles. Generates position, velocity, accel/decel, and jerk command every controller cycle (depends on product model but typically 1ms). Single axis motion commands: Point to point Jog Halt Kill Motion queue Prerequisites: Axis must be enabled and commutated (if closed loop operation)

Point to Point (PTP) Motion Moves an axis to a location which is specified as absolute or relative to current position. Follows a 3rd order profile. PTP command format: PTP[/switches] (axis), desired position, [velocity] Optional PTP command switches: PTP/r : make a relative motion to the current position PTP/v : use defined velocity instead of default VEL PTP/e : wait for PTP move to end (useful in programs) PTP/rve: multiple switches allowed in same command

Point to Point (PTP) Motion Example: PTP/v (0), 1000, 2000 moves axis 0 to 1000, desired velocity 2000 Reference velocity Reference position

Motion Queue Motion commands are queued FIFO – for each axis. A motion queue can contain up to 5 motion commands. ACSPL+ program execution will immediately pause when a sixth motion command is initiated while five motion commands (for same axis) are currently in progress. Program will immediately resume when first motion is terminated. Variable GMQU gives number of motions in each motion queue.

Motion Queue BREAK immediately terminates the currently executed motion of the specified axis without building a deceleration profile, and initiates the next motion in the axis motion queue, if it exists BREAK smoothly transitions into next move. If no more motion in queue, BREAK has no effect and the current motion continues as normal

JOG Motion Creates motion with constant velocity and no defined end point Follows a 3rd order profile JOG command format: JOG[/switches] (axis) [,velocity] [,-] Optional JOG command switch: JOG/v: use defined velocity instead of default VEL

JOG Motion Jogging: Example: JOG (4) Description: move axis 4 in positive direction (default VEL) Example: JOG/v (2), -300 Description: move axis 2 in negative direction at velocity of -300 Example: JOG (2), - Description: move axis 2 in negative direction (default VEL)

Change Motion Parameters On-the-fly IMM: Use to change motion parameters VEL, ACC, and DEC during motion Smoothly transition from current 3rd order motion profile to new 3rd order motion profile

Motion Termination Methods Terminate motion with a deceleration profile: HALT command – axis will decelerate to zero according to DEC KILL command – axis will decelerate to zero according to KDEC Terminate motion without a deceleration profile: DISABLE command

Exercise 1 Application Description: Method: An axis on a wafer inspection machine needs to move an inspection head to several points across the wafer surface The first set of points requires no dwell time The second set of points requires 50ms dwell time to trigger the camera and process results After inspection, the inspection head needs to move an unspecified distance down the inspection line and stop after 5 seconds of travel Method: Load Programming 07 into Program Manager and review code Open the Communication Terminal (make sure “Show Unsolicited Messages” is selected) and view the output How many motions in the motion queue are displayed during the PTP moves?

Exercise 2 The inspection machine has been reworked for higher throughput, as a result neighboring wafers are closer together. Modify buffer 0 code to do the following: Double inspection head velocity motion parameter to 10000 Reduce wafer edge position by half (to 5000) After wafer inspection, only jog axis for 2.5 seconds Replace HALT with KILL to stop axis faster

Exercise 3 In order to improve product quality, a design rev has been issued with a spec change such that trigger points need to occur every user unit between 2000 and 2300. Simplify buffer 1 code to do the following: Remove user arrays specifying absolute positions to move through and replace using relative point to point moves. Use LOOP to move through the higher number of trigger points to avoid adding many lines of code Reduce the wait time at each trigger point to 5ms

Exercise 4 Another actuator has been added to the inspection machine for inspection head positioning. It needs to move the inspection head close to the wafer at trigger positions, then move back up before executing subsequent moves. Copy exercise 3 and add an additional axis to achieve this task.