Fan L-S, Tai Y-C and R S Muller 1988

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Presentation transcript:

Fan L-S, Tai Y-C and R S Muller 1988 Integrated moveable micromechanical structures for sensors and actuators IEEE Trans. Electron Devices These motors inspired Karen Marcus at MCNC to create the polyMUMPS process, which first ran commercially in 1992. Zettl group

POLY0 DIMPLE POLY1 ANCHOR1 http://www.sfu.ca/adm/heatuator.html

MicroOptical Bench (Ming Wu, UCLA)

http://www. mie. utoronto http://www.mie.utoronto.ca/faculty/cleghorn/projects/Microassembly/MicroassemblyMainPage.html

Tang, Nguyen, Howe Comb-drive resonator Great for education Electrostatic sensing & actuation Beam theory damping

Issus, 400g acceleration, geared rear legs http://www.popularmechanics.com/science/environment/the-first-gear-discovered-in-nature-15916433?click=pm_latest

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