Furnaces and Wet benches Savitha P. Weekly trend chart – Dry ox (5nm) Conditions: 1000 deg C – 1 min, 6 slpm oxygen flow, 20 min anneal oxide thickness.

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Presentation transcript:

Furnaces and Wet benches Savitha P

Weekly trend chart – Dry ox (5nm) Conditions: 1000 deg C – 1 min, 6 slpm oxygen flow, 20 min anneal oxide thickness (nm) No. of weeks

Wet benches CMOS chemicals are here (under customs clearance) The next order with OM group under process Ms. Grace from evening shift has moved out, looking for another person for the evening shift Waiting for hooking up of the new wet bench

Furnaces Drive-in furnace under maintenance (cold probe damaged) – Waiting for the spare parts shipment to arrive from First nano LPCVD polysilicon (undoped) gas line up gradation scheduled to be in Feb-March Information regarding film thickness/resistivity required and slot timings on the twiki

Thank you