North America Regional Standards Committee (NA RSC) Liaison Report April 2011

Outline Current Structure of NA Standards Committees NARSC Spring 2011 Meeting Overall TC/WG Updates Upcoming Events Regional Staff Contact Information April 2011 NARSC Liaison Report

Current Structure of the NARSC [1/2] NARSC Chair: Jackie Ferrell (ISMI) Chair: Sean Larsen (Cymer) New! Automated Test Equip Ajay Khoche (Consultant) Gases Tim Volin (Parker Hannifin) Microlithography Wes Erck (W.Erck & Associates) Rick Silver (NIST) HB-LED Iain Black (Philips) Chris Moore (Semilab) Bill Quinn (Veeco) Compounds Jim Oliver (Northrup Grumman) Russ Kremer (Freiberger) Information & Control David Bricker (AMAT) Jack Ghiselli (Consultant) Lance Rist (Consultant) PIC Mutaz Haddadin (Intel) Matt Fuller (Entegris) New! 3DS-IC Chris Moore (Semilab) Sesh Ramaswami (AMAT) Urmi Ray (Qualcomm) Andy Rudack (SEMATECH) EHS (NA) Chris Evanston (Salus Engineering) James Beasley (ISMI) Sean Larsen (Cymer) Eric Sklar (Safety Guru) Liquid Chemicals Frank Flowers (FMC) Frank Parker (ICL Performance) Photovoltaic Win Baylies (BayTech Group) Technical Architects Board (TAB) James Moyne (AMAT) Yaw Obeng (NIST) Silicon Wafer Noel Poduje (SMS) Dinesh Gupta (STA) MEMS / NEMS Win Baylies (BayTech Group) Mark Crockett (MEMSMART) Facilities Phil Naughton (AMAT) Steve Lewis (CH2M Hill) Traceability Win Baylies (BayTech Group) Yaw Obeng (NIST) Metrics David Bouldin (Fab Consulting) Mark Frankfurth (Cymer) FPD (NA) Bill Colbran (Engenuity) April 2011 NARSC Liaison Report

Current Structure of the NARSC [2/2] NARSC Chair: Jackie Ferrell (ISMI) Chair: Sean Larsen (Cymer) FPD (Korea) Jong Seo Lee (Samsung) Il-Ho Kim (LMS) EHS (Taiwan) Shuh-Woei Yu (SAHTECH) Fang-Ming Hsu (TSMC) EHS WG (Korea) Seoung Jong Ko (Hynix) Hyunsuk Kim (Samsung Elec.) FPD Metrology (Korea) Jong Seo Lee (Samsung) Il-Ho Kim (LMS) FPD (Taiwan) Tzeng-Yow Lin (ITRI) Jia-Ming Liu (TDMDA) Facilities (Korea) Kwang Sun Kim (KUT) Insoo Cho (Shinsung ENG) I&C (Taiwan) Robert Chien (TSMC) Photovoltaic (Taiwan) Jeff Lee (Chroma) B.N. Chung (CMS/ITRI) Y.Y. Tsai (Delsolar) J.S. Chen (PVTC/ITRI) Ray Sung (UL Taiwan) I&C (Korea) Chulhong Ahn (Hynix) Sammy Jeong (KC Tech) Gunwoo Lee (Miracom) Regional Committees & Working Groups April 2011 NARSC Liaison Report

NARSC Spring 2011 Meeting (March 27) Meeting Agenda: Appointed new chairs for HB-LED and 3DS-IC committees Member-at-Large and Advisor updates Committee Round Table/Updates NARSC Regulations Working Group report Requesting ISC Regs SC for guidance on ballot adjudication questions Discussion on the need for Standards training for new committee leaders Schedule to be finalized, via teleconference/web meeting April 2011 NARSC Liaison Report

NA Standards Spring 2011 Meetings March 28-31 Sunday Monday Tuesday Wednesday Thursday Friday Saturday 27 28 29 30 31 1 2 NARSC EH&S Facilities & Gases HB-LED Information & Control MEMS/NEMS Metrics Photovoltaic Physical Interfaces & Carriers Silicon Wafer Traceability 3DS-IC Locations - SEMI - AMAT - Intel - Hynix April 2011 NARSC Liaison Report

HB-LED Standards Spring 2011 Meetings March 31, 2011 Wafer TF Reviewed wafer survey results received thus far Key discussions Wafer ID mark locations (top, bottom, edge) Edge chamfer spec Orientation fiducials Equipment Automation TF Automation software presentations Equipment Data Acquisition (EDA) overview & benefits SECS/GEM – EDA Comparison SEMI Standards needs for automated MOCVD tools Physical interfaces discussion Identified components and critical features Assembly TF Reviewed proposed HB-LED assembly improvements questionnaire HB-LED Technical Committee Considerations for HB-LED/EHS Standards Development Presentation proposal for Test & Measurements Task Force April 2011 NARSC Liaison Report

Overall TC/WG Updates (from NA Standards Spring 2011 Meetings) Org. Name Last met on: Progress (p) / Concern (c) / Ballot to be issued (b) / Others (o) NA 3DS-IC March 29, 2011 (p) 3 SNARFs approved: Specification for Parameters for Bonded Wafer Stacks (#5173), Specification for ID and Marking of Bonded Wafer Stacks (#5174), Guide for Multi-wafer Transport & Storage for Thin Wafers (#5175) NA Automated Test Equipment Committee July 14, 2010 (b) Doc 4782A failed to reach 60%, TF to resubmit for C4-11 NA Compound Semiconductor Materials Committee November 2, 2010 (b) Info ballot issued on New Std for GaN Wafers (#4979) (b) Next mtg in conjunction with CS MANTECH (May 16-18) NA EHS Committee March 31, 2011 (o) New TFs  S25 rev TF and S2 3.3 Limitations TF (o) Disbanded TFs  Abatement Sys TF, E34 rev TF, S12 TF (b) Withdrawal of SEMI F15-0308, Test Method (SF6 Tracer Gas) for Enclosures Has Been Moved to SEMI S6 (#5172) NA Facilities & Gases Committee (p) New TF and SNARF on Building Information Modeling (BIM) for Semiconductor Capital Equipment (#5155) (b) Several 5-Year Review ballots (reapprovals/revisions) passed TC review + more to be balloted for C3-/C4-11 (o) Heated Systems Requirements Guide failed TC (#4737B) April 2011 NARSC Liaison Report

Overall TC/WG Updates (from NA Standards Spring 2011 Meetings) Org. Name Last met on: Progress (p) / Concern (c) / Ballot to be issued (b) / Others (o) NA I&C Committee March 30, 2011 (b) E5/E30 revision ballot to correct max item size (4998A) passed TC review w/ editorial changes (b) Reviewed several software standards due 5-Year Review to be balloted for C3/C4-11 (o) Agreed to move CIM stds to Inactive: E81, E96, E97, E102 NA Liquid Chemicals Committee November 9, 2010 (p) 2 new activities for statistical methods: Calibrating Particle Measurement Instruments (#5105) & Extrapolating Particle Measurement Data (#5106) (o) Next mtg Apr 12, hosted by ICL in St. Louis, Missouri NA MEMS / NEMS Committee March 28, 2011 (b) New Standard on microfluidic device connections (4691) passed TC review (b) STEP: MS5 (wafer bond strength measurement) planned for SEMICON West NA Metrics Committee (o) PETM Task Force will remain chartered, leader TBD (b) New Guide for ID and Classification of Training Tiers passed TC review (#4730) (b) New Guide to Handling Extremely Electrostatic Sensitive (EES) Devices to be balloted for C3-11 (b) E10 revision ballot (#3846) for C4-11 April 2011 NARSC Liaison Report

Overall TC/WG Updates (from NA Standards Spring 2011 Meetings) Org. Name Last met on: Progress (p) / Concern (c) / Ballot to be issued (b) / Others (o) NA Microlithography Committee March 3, 2011 (b) Several 5-yr review docs to be submitted for C3/C4-11 NA PI&C Committee March 30, 2011 (o) 300mm Shipping Box TF & Integrated Measurement TF were disbanded NA PV Committee (p) New SNARF for AntiReflective-Coated Glass (#5158) PV Materials TF, activity initiated from China (b) New Standard on Nitric Acid (#4795) + PV9 (excess charge carrier decay) revision (#5073) ballots passed TC NA Silicon Wafer Committee March 29, 2011 (p) M1 revision to include 450 mm polished wafer (#5090) for C3/C4-11, to be reviewed at SEMICON West (b) Several 5-year review ballots for C3/C4-11. (o) STEP: Edge Profile planned for SEMICON West NA Traceability Committee March 31, 2011 (b) Reapproval ballots for T5, M12, and M13 for C3-11 April 2011 NARSC Liaison Report

NA Standards Meetings at SEMICON West 2011 (July 10-14) Sunday Monday Tuesday Wednesday Thursday Friday Saturday 10 11 12 13 14 15 16 NARSC 3DS-IC ATE EH&S Facilities & Gases HB-LED Information & Control Liquid Chemicals Schedule -at-a-glance MEMS/NEMS Metrics Microlitho Photovoltaic Physical Interfaces & Carriers Silicon Wafer Traceability April 2011 NARSC Liaison Report

Upcoming NA Meetings Event Name Event Type Contents NA Liquid Chemicals Committee Committee Meeting April 12, 2011 To be hosted by ICL Performance in St. Louis, MO NA Compound Semiconductor Materials Committee May 16-19, 2011 In conjunction with CS MANTECH Indian Wells (Palm Springs), CA NA Standards Meetings at SEMICON West 2011 Standards Meetings July 11-14, 2011 San Francisco Marriott Marquis in SF, CA NA Standards Fall 2011 Meetings October 24-28, 2011 SEMI Headquarters in San Jose, California TENTATIVE April 2011 NARSC Liaison Report

NA Standards Staff Changes Paul Trio Sr. Manager, NA Standards Operations Operations Committees: I&C, ATE, NARSC Meetings & Events Planning General Information New: HB-LED, 3DS-IC MEMS Microlithography STEPs/Workshops and Sponsorships Ian McLeod Manager, NA Standards Committees Committees: Compounds Semiconductor Materials / EHS / FPD / Liquid Chemicals / PIC Metrics Membership Kevin Nguyen Committees: Facilities / Gases / PV / PV Automation / Silicon Wafer Traceability April 2011 NARSC Liaison Report

3081 Zanker Road San Jose, CA 95134 U.S.A. Regional Staff Contact Information Name Paul Trio E-mail ptrio@semi.org Phone +1.408.943.7041 Office Address 3081 Zanker Road San Jose, CA 95134 U.S.A. Committees In charge NARSC Automated Test Equipment / HB-LED Information & Control / MEMS / Microlithography April 2011 NARSC Liaison Report

Thank you! April 2011 NARSC Liaison Report