News from CMS Process Quality Control

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News from CMS Process Quality Control Thomas Bergauer HEPHY Vienna CMS TK Week, 29.1.2003, CERN

Jean-Charles Fontaine Centers Three Process Qualification Centers: Florence Anna Macchiolo Carlo Civinini Mirko Brianzi Strasbourg Jean-Charles Fontaine Jean-Marie Helleboid Jean-Laurent Agram Vienna Thomas Bergauer Margit Oberegger Characterization by QTC Process stability on test structures with 9 different measurements Thomas Bergauer, HEPHY Vienna

CVmos at different temperatures Just a test (Vienna coolingbox was available) CVmos at 5 different temperatures CVmos chosen because it is the simplest measurement No temperature dependence of Vfb Thomas Bergauer, HEPHY Vienna

Thomas Bergauer, HEPHY Vienna Thicker Aluminium 39 Teststructures from PQC Florence Perugia 12 (prod.week 34/02) Perugia 13 (03/02) Perugia 14 (06/02 and 23/02) Pisa 59 (08/02) Pisa 60 (24/02) Influence to rho_Alu after Before week 20/02 Average data: before Week 20/02: 26,09mOhms/sq. After week 20/02: 14,34mOhms/sq. Also: slightly lower C_ac value: 17,01pF (before week 20/02) -> 16,65pF (after) Thomas Bergauer, HEPHY Vienna

Thomas Bergauer, HEPHY Vienna Mask Problem W7B Misalignment of 3 structures at the standard half moon Not able to contact with probecard in one cycle W7B: 1440 pcs. Cac R (Al, p+, poly) Ivgcd Cint IVbaby Rint CVdiode CVMOS & IV diel Thomas Bergauer, HEPHY Vienna

Thomas Bergauer, HEPHY Vienna Mask Problem W7B 3 structures on the standard half moon affected Sensor mask is OK Options: new probecard design OR new wafer mask design GCD C_int Thomas Bergauer, HEPHY Vienna

Thomas Bergauer, HEPHY Vienna Inter-calibration Circulation of 5 Teststructures Vienna -> Strasbourg Strasbourg -> Florence Florence -> Vienna -> Florence -> Vienna -> Strasbourg (Exchange of TS during this Tracker Week) Results: (up to now) Good agreement in all measurements Higher Leakage current of Vienna Probecard causes lower R_int and higher IV_dielectric and GCD problems (fit) small differences in capacitances values caused by stray capacitances. (<1pF) Thomas Bergauer, HEPHY Vienna

Thomas Bergauer, HEPHY Vienna Software New Software allows re-read of local files Up to now: Stand-alone program Re-analyze Re-write XML file Acquisition Analysis DB Interface Main: Local files Analysis DB Interface new: Future: Fully integrated into acquisition software Acquisition Analysis DB Interface Local files Thomas Bergauer, HEPHY Vienna

Thomas Bergauer, HEPHY Vienna Database 322 teststructures successfully loaded into db 61 faulty (status: 28.1.03) Thomas Bergauer, HEPHY Vienna