NA Facilities and Gases Committees Liaison Report Updated March 09, 2011

Gases Co-chair Tim Volin - Parker Hannifin

Phil Naughton - Applied Materials Facilities Co-chairs Steve Lewis - CH2M Hill Phil Naughton - Applied Materials

Gases Committee C: Tim Volin – Parker Hannifin Components SC TBD Contamination SC Tim Volin – Parker Hann. Materials & Process SC Tim Volin – Parker Hann. Mass Flow TF Mohamed Saleem - Fujikin John Savadkouhi – Brooks Instrument Filters & Purifiers TF Mohamed Saleem – Fujikin Materials of Construction Gas Delivery Systems TF Tim Volin – Parker Hann. Pressure Measurement TF Justin Hough - AMAT Heater Jacket TF David Colquhoun – BriskHeat

Design for Facilities TF Facilities Committee C: Phil Naughton – Applied Materials C: Steve Lewis – CH2M Hill F47 Revision TF (New) Ken Kapur – KLA Tencor Uwe Haller – Applied Materials Phil Sarikas – Intel Todd Steudtner – TI Alex McEachern - PSL F51 Revision TF (New) Dalia Vernikovsky - Applied Seals Design for Facilities TF Al Chasey – Arizona State Univ.

Meeting Information Last meeting Next meeting Tuesday, November 9, NA Fall SEMI HQ, San Jose, CA Next meeting Tuesday, March 29, 2011, NA Spring Standards Meeting SEMI HQ in San Jose, CA www.semi.org/standards for the latest update

Ballot Results Summary Ballot Passed Technical Committee Review [1] Doc. 5055, Reapproval of SEMI C54-1103 - Specifications and Guidelines for Oxygen Doc. 5056, Reapproval of SEMI C55-1104 - Specification for Liquid Carbon Dioxide (CO2) Used in Near Critical, Critical and Supercritical Applications, >/ 99.99% Quality Doc. 5057, Reapproval of SEMI C56-0305 - Specifications and Guidelines for Dichlorosilane (SiH2Cl2) Doc. 5058, Reapproval of SEMI C57-0305 - Specifications and Guidelines for Argon Doc. 5059, Reapproval of SEMI C58-0305 - Specifications and Guidelines for Hydrogen Doc. 5060, Reapproval of SEMI C59-1104 - Specifications and Guidelines for Nitrogen Doc. 5061, Reapproval of SEMI C60-0305 - Specifications and Guidelines for Nitrous Oxide (N2O)

Ballot Passed Technical Committee Review [2] Doc. 4786B, Revision of SEMI F4-1000, Specification for Pneumatically Actuated Cylinder Valves Doc. 5044, Revision to SEMI F32-0709 Test Method for Determining of Flow Coefficient for High Purity Shutoff Valves Doc. 4788A, Revision of SEMI F78-0304 Practice For Gas Tungsten Arc (GTA) Welding Of Fluid Distribution Systems In Semiconductor Manufacturing Applications (failed ISC Review) Doc. 4789B, Revision of SEMI F81-1103 Specification for Visual Inspection and Acceptance of Gas Tungsten Arc (GTA) Welds in Fluid Distribution Systems in Semiconductor Manufacturing Applications (failed ISC Review)

Ballot Passed Technical Committee Review [3] Doc. 4722E - Revision of SEMI F70-0302, Test Method for Determination of Particle Contribution of Gas Delivery System (failed ISC Review) Doc. 4968 - Revision of SEMI E16-90 (Reapproved 1104) with title change to Guide For Determining And Describing Mass Flow Controller Leak Rates (failed ISC Review) Doc. 4969 - Revision of SEMI E18-91 (Reapproved 1104) with title change to Guide For Temperature Specifications Of The Mass Flow Controller Doc. 4970 - Revision of SEMI E27-92 (Reapproved 1104) with title change to Terminology For The Linearity Of Mass Flow Controllers And Mass Flow Meters (failed ISC Review)

Ballot Failed Technical Committee Review Doc. 4737A, New Standard: Guide For Heater Jacket Requirements

Upcoming Ballots [1/3] Technical Ballot for Cycle 1 and 2, 2011 Doc. 5099 - Revision of SEMI E52-0310 - Practice for Referencing Gases, Gas Mixtures and Vaporizable Materials Used in Digital Mass Flow Controllers Doc. 5677C - Revision of SEMI E66-1103, Test Method For Determining Particle Contribution By Mass Flow Controllers Doc. 4737B - New Standard: Guide For Heater Jacket Requirements Doc. 4788B - Revision of SEMI F78-0304 Practice For Gas Tungsten Arc (GTA) Welding Of Fluid Distribution Systems In Semiconductor Manufacturing Applications Doc. 5138 - Reapproval of SEMI F20-0706E, Specification for 316L Stainless Steel Bar, Forgings, Extruded Shapes, Plate, and Tubing for Components Used in General Purpose, High Purity and Ultra-High Purity Semiconductor Manufacturing Applications Doc. 5142 - Reapproval of SEMI F60-0306 - Test Method for ESCA Evaluation of Surface Composition of Wetted Surfaces of Passivated 316L Stainless Steel Components

Upcoming Ballots [2/3] Doc. 4789C, Revision of SEMI F81-1103 Specification for Visual Inspection and Acceptance of Gas Tungsten Arc (GTA) Welds in Fluid Distribution Systems in Semiconductor Manufacturing Applications Doc. 4722F- Revision of SEMI F70-0302, Test Method for Determination of Particle Contribution of Gas Delivery System Doc. 4968A - Revision of SEMI E16-90 (Reapproved 1104) with title change to Guide For Determining And Describing Mass Flow Controller Leak Rates Doc. 4970A - Revision of SEMI E27-92 (Reapproved 1104) with title change to Terminology For The Linearity Of Mass Flow Controllers And Mass Flow Meters Doc. 3383 - Reapproval of SEMI F27-0997 (Reapproved 1103) Test Method For Moisture Interaction And Content Of Gas Distribution Systems And Components By Atmospheric Pressure Ionization Mass Spectrometry (APIMS)

Upcoming Ballots [3/3] Document 4652A - Revision of SEMI C3.2-0301, Specification for Arsine (AsH3) in Cylinders, 99.94% Quality Document 4657B - New Standard: Specifications for Tungsten Hexafluoride (WF6) Document 4734A - New Standard: Specification and Guide for Boron Trichloride (BCl3) Document 5139 - Reapproval of SEMI F29-0997 (Reapproved 1103), Test Method for Purge Efficacy of Gas Source System Panels Document 5140 - Reapproval of SEMI F37-0299 (Reapproved 1104), Method for Determination of Surface Roughness Parameters for Gas Distribution System Components Document 5141 - Reapproval of SEMI F38-0699 (Reapproved 1104), Test Method for Efficiency Qualification of Point-of-Use Gas Filters

Components Subcommittee Mass Flow TF/Mohamed Saleem (Fujikin) Balloted 5 year revisions/approvals of Mass Flow Controller standards E16-90 (Reapproved 1104) MFC Leak Rates E27-92 (Reapproved 1104) Mass Flow Meter Linearity E66-1103 (Particle Contribution of MFC), reballot E67-0304 (Reliability of MFC), reballot Drafting doc. 5099 - Revision of SEMI E52-0310 - Practice for Referencing Gases, Gas Mixtures and Vaporizable Materials Used in Digital Mass Flow Controllers Adding two additional mixed gas codes

Components Subcommittee Pressure Measurement TF/Justin Hough (Applied Materials) Drafting Doc. 3440B, New Standard: Test Method For Pressure Transducers In Gas Delivery Systems

Contamination Subcommittee Filters & Purifiers TF/Mohamed Saleem (Fujikin) Balloted Doc. 4722F - Revision of SEMI F70-0302, Test Method for Determination of Particle Contribution of Gas Delivery System

Materials & Processes Subc Materials of Construction Gas Delivery Systems TF/ Tim Volin(Parker Hannifin) Balloted two documents for cycle 1-2011 Doc. 4788B, Revision of F78-0304 Practice For Gas Tungsten Arc (GTA) Welding Of Fluid Distribution Systems In Semiconductor Manufacturing Applications Doc. 4789C, Revision of F81-1103 Specification for Visual Inspection and Acceptance of Gas Tungsten Arc (GTA) Welds in Fluid Distribution Systems in Semiconductor Manufacturing Applications Future work includes a new document for welding and joining processes currently not addressed by SEMI Standards

Materials & Processes Subc Heater Jacket TF/David Colquhoun (BriskHeat) Demand for higher performance jacketing heater systems in the semiconductor is needed Consistent ways of specifying jacket is required Doc. 4737A - New Standard: Guide For Heated Systems Requirements Failed and returned to TF for rework The document was balloted in cycle 2-11

Facilities Committee SEMI F47 Revision Task Force/Alex McEachern (PSL) F47 is up for 5 year review. F47 requires that tools be immune to voltage sags that commonly occur on AC power grids. Rewriting doc. 5079, Revision of SEMI F47-0706 - Specification for Semiconductor Processing Equipment Voltage SAG Immunity

Facilities Committee [2] SEMI F51 Revision Task Force/Dalia Vernikovsky (Applied Seals NA) F51 is up for 5 year review Drafting doc. 5080, Revision of SEMI F51-0200 - Guide for Elastometric Sealing Technology A review of possibilities to ‘assign’ a code of possible levels of acceptance of what o-rings can be suited for ( a rating system ) was proposed Meeting monthly End user is encouraged to participate

Contact For more information, please contact Kevin Nguyen at knguyen@semi.org