Silicon Wafer NA TC Chapter Liaison Report March 7, 2017

Meeting Information Last meeting Next meeting Tuesday, July 12, 2016, SEMICON West San Francisco Marriott Marquis, CA Next meeting Tuesday, April 4, 2017, NA Spring KLA-Tencor, Milpitas, CA

Co-chairs Noel Poduje /SMS Dinesh Gupta /STA

Int’l Polished Wafer TF Leadership Changes Int’l Polished Wafer TF Mike Goldstein stepped down Int’l SOI TF Bich-Yen Nguyen stepped down Gerd Pfeiffer (GlobalFoundries) was appointed as the new leader

Silicon Wafer Committee C: Dinesh Gupta - STA C: Noel Poduje – SMS Specifications Int’l Annealed Wafers TF Dinesh Gupta -STA Int’l Epitaxial Wafers TF Dinesh Gupta - STA Int’l Polished Wafers TF John Valley Int’l SOI Wafers TF Gerd Pfeiffer -GlobalFoundries Metrology Int’l Advanced Wafer Geometry TF Noel Poduje – SMS Jaydeep Sinha – Consultant Int’l Automated Advance Surface Inspection TF Kurt Haller - KLA-Tencor Committee Int’l Test Methods TF Int’l Terminology TF TBD

Int'l Test Methods Task Force 11/30/2018 New SNARFs Int’l AWG TF Doc. 5915, Line Item Revision to SEMI M1-0215, Addition to Related Information : Illustration of Flatness and Shape Metrics for Silicon Wafers SNARF was revised Doc. 6041, Line Item Revision to M21-1110 Guide For Assigning Addresses To Rectangular Elements In A Cartesian Array Int'l Test Methods Task Force Reapproval and line item revision (title conformance) MF1763, MF28, MF673, MF928, MF1982, MF728, MF978

Ballots authorization 11/30/2018 Ballots authorization Cycle 6-2016 6042, Line Item Revision to SEMI MF1763-0706 (Reapproved 1111)Test Methods for Measuring Contrast of a Linear Polarizer 6043, Line Item Revision to SEMI MF28-0707 (Reapproved 0912) Test Methods for Minority Carrier Lifetime in Bulk Germanium and Silicon by Measurement of Photoconductivity Decay 6044, Line Item Revision to SEMI MF673-1014 Test Methods For Measuring Resistivity Of Semiconductor Wafers Or Sheet Resistance Of Semiconductor Films With A Noncontact Eddy-current Gauge 6045, Line Item Revision to SEMI MF928-1014 Test Methods For Edge Contour Of Circular 6046, Line Item Revision to SEMI MF1982-0714 Test Methods For Analyzing Organic Contaminants On Silicon Wafer Surfaces By Thermal Desorption Gas Chromatography 6047, Reapproval of SEMI MF728-1106 (Reapproved 1111) Practice for Preparing an Optical Microscope for Dimensional Measurements 6048, Reapproval of SEMI MF978-1106 (Reapproved 1111)Test Method for Characterizing Semiconductor Deep Levels by Transient Capacitance Techniques These ballots were adjudicated at SEMICON Japan 2016 meeting.

Int’l Advanced Wafer Geometry TF Leaders: Noel Poduje (SMS) & Jaydeep Sinha (Consultant) Presentations: John Valley of SunEdison presented Advanced Wafer HVM Nanotopography Metrology Dieter Mueller of KT presented Invalid Sector issue Ballot development Doc. 5915 M1 (geometry parameters) revising by Japan M21, M43 and M78 are due for 5 year review. Members are asked to review before issuing for reapproval ballots.

Int’l Automated Advance Surface Inspection TF Leader: Kurt Haller (KLA-Tencor) Ballot development Doc #5995, Line Item Revision of SEMI MF1048-1111 Test Method for Measuring Reflective Total Integrated Scatter Ballot issued in cycle 6-16 for review at SEMICON Europa Presentation Joann Qiu, Intel, gave a talk entitled, “ASI Development Focus,”

Int’l Polished Wafer TF Leader: John Valley Ballot development Doc. 6019A, Line Item Revision of SEMI M1-0416, Specification for Polished Single Crystal Silicon Wafers To address rejects in ¶R3-4.4 on minority carrier lifetime measurements in electronic silicon manufacture must be controlled by recombination at impurities Improvement to figure 3 and 7

Int’l SOI Wafer TF Leader: Presentation: Gerd Pfeiffer (GlobalFoundries) Presentation: Substrate requirement for Low power application (FD-SOI) by Gerd Pfeiffer

Ballot development: Leader: Int’l Test Methods TF Leader: Dinesh Gupta (STA) Ballot development: Doc. 5703, New Standard: Guide for Carrier Recombination Lifetime Measurements in Electronic Grade Silicon Maintaining 5 year review of SEMI MF documents.

Int’l Epitaxial Wafer TF Leader: Dinesh Gupta (STA) Doc. 5989, Revision of SEMI M62-0515, Specifications for Silicon Epitaxial Wafers Ballot was approved at SEMICON West TF is on standby mode until new topic arises.

Int’l Terminology TF Leader: TBD GCS members held a meeting and suggested a plan to remove terms out of M59, Terminology for Silicon Technology, and place them back to their original standards when they are due for 5 year review

Kevin Nguyen at knguyen@semi.org Question? For more information, please contact Kevin Nguyen at knguyen@semi.org