Liquid Chemicals Japan TC Chapter Liaison Report NA Standards Spring Meetings 2015 March, 2015

Liquid Chemicals Japan TC Chapter Contents Leadership Leadership Changes Current Committee Organization Meeting Information Document Review Summary Approved SNARFs Authorized Ballot Ballot to be reviewed Task Force / Study Group Report Spring 2014 Liquid Chemicals Japan TC Chapter

Japan Liquid Chemicals Committee, November 2013 Leadership Committee Co-chairs Hiroshi Tomita (Toshiba) Hiroyuki Araki (Dainippon Screen Manufacturing) Japan Liquid Chemicals Committee, November 2013

Leadership Changes Liquid Chemicals ESD Study Group Since the all tasks have been finished, the SG was disbanded, and Keiichi Yamakawa / NihonGore and Takuya Nagafuchi / Nihon Entegris were relieved of the SG co-leader position.

Current Committee Organization Liquid Chemicals Committee Hiroshi Tomita/ Toshiba Hiroyuki Araki / Dainippon Screen Manufacturing Welding Fitting TF Kimihito Sasao/ Advance Electric Company Takashi Hasegawa / KITZ SCT Corp Liquid Filter TF Takuya Nagafuchi/Nihon Entegris Takehito Mizuno/Nihon Pall Diaphragm Valve TF Shigeru Ohsugi / CKD Kimihito Sasao/ Advance Electric Company Ultrapure Liquid Evaluation Study Group Kaoru Kondo/ Rion Hiroshi Sugawara / ORGANO Liquid-Borne Particle Counter (LPC)TF Kaoru Kondo/ Rion Kazutoshi Kato/ PMS Liquid Chemicals ESD Study Group Keiichi Yamakawa / W. L. Gore & Associates Takuya Nagafuchi/Nihon Entegris Disbanded Spring 2014 Liquid Chemicals Japan TC Chapter

Meeting Information Last Meeting Next Meeting December 3, 2014 in conjunction with SEMICON Japan 2014, at Conference Tower, Tokyo Bigsight, Tokyo, Japan Next Meeting TBD

Ballot Results None.

New SNARFs / TFOFs None.

Upcoming Ballots None.

Liquid Chemicals Japan TC Chapter TF/SG Reports 1/4 Diaphragm Valve Task Force No activities Welding Fitting Task Force Liquid-Borne Particle Counter (LPC) Task Force Spring 2014 Liquid Chemicals Japan TC Chapter

Liquid Chemicals Japan TC Chapter TF/SG Reports 2/4 Liquid Filter Task Force LOA of Doc. 5421A, New Standard: “Test Method for Particle Removal Performance of Liquid Filter Rated Below 30 nm with ICP-MS” was submitted. Will be published soon. Spring 2014 Liquid Chemicals Japan TC Chapter

Liquid Chemicals Japan TC Chapter TF/SG Reports 3/4 Ultrapure Liquid Evaluation Study Group Considering to standardize the particle measurement at POP in future. Asking a cooperation by Interfacial Nano Electrochemistry for seeking the solution to the issues concerned to analyzing metals and liquated silica in IPA.  Spring 2014 Liquid Chemicals Japan TC Chapter

Liquid Chemicals Japan TC Chapter TF/SG Reports 4/4 Liquid Chemicals ESD Study Group Since the all tasks have been finished, the SG was disbanded. Spring 2014 Liquid Chemicals Japan TC Chapter

Thank you! For more information, please contact: Naoko Tejima, SEMI Japan ntejima@semi.org Spring 2014 Liquid Chemicals Japan TC Chapter