Improving the Electron Microscope

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Presentation transcript:

Improving the Electron Microscope So we can see just a few more nanometers

Electron Optics Based on the principles of DeBroglie Electrons and other particles have wave properties Magnetic fields are analogous to optical lenses

Basics of Electron Microscopy

Types of Electron Microscopes Scanning Electron Microscope (SEM) Tunneling Electron Microscope (TEM) Scanning Transmission Electron Microscope (STEM)

Limitations Target sample must be modified to maintain in a high vacuum Target sample must be conductive. Electron Scattering

Causes of Poor Resolution General Electron Diffraction Electro-Optical Aberrations

Fixing Diffraction Quite simple… It actually doesn’t need a whole slide to explain.

Scherzer ‘s Theory Non trivial Scherzer’s Theory states that aberration will always occur if the following conditions are met: (i) There is a rotationally symmetrical lens present (ii) The beam is acted upon by a static field (iii) The beam does not reverse its velocity

Correcting Electro-Optical Aberrations 1995 Researchers Have worked on Breaking symmetry on lenses. Resolution improved from 20nm to about 6nm by 1995 Today We can achieve about .075nm resolution

Correcting Electro-Optical Aberrations

Correcting Electro-Optical Aberrations Time varying Fields Very complicated dealing with complex analysis As of now, no one has been able to decrease aberration by implementing a time varying field

Ende’