SEM Image of Early Northeastern University MEMS Microswitch The scale bar corresponds to 10 m

SEM Micrograph of a Contact Bump The scale bar corresponds to 1 m

SEM Image of Recent Northeastern University MEMS Microswitch

SEM Micrograph of the Contact Tip 2 m diameter

Side View of NU Micromechanical Switch dT y L d x Gate Drain Source

Top View of NU Micromechanical Switch (all dimensions in m) z 44 63 24 152 x Contact Tips Source (Fixed)

Modeling of Switch Dynamics and Bounce

Comparison of Model and Experiment for Switch Bounce

Drain Failure at High Current

Micromirror-Based Imaging System

Micromirror With Torsion Bars and Actuators

Cross-Section View Actuator Mirror w 54.70 t b g Torsion Bar d tG G

Design Requirements Achieve a minimum angular rotation of  2o Operate at 1 kHz Limit the applied voltage to 200V to prevent surface breakdown Limit shear stress of springs to 400-500 MPa during operation Ensure shock resistance during handling and use

Simulation and Measurements at 600 Hz, Unbiased The measured and simulated angle of rotation vs. time (simulated curve is smooth) and the measured drive voltage vs. time.

Simulation and Measurements at 905 Hz, Biased The measured and simulated angle of rotation vs. time (simulated curve is smooth) and the measured drive voltage vs. time.