New Process Capabilities for Media with The Intevac® 200 Lean System Benjamin M. DeKoven September 22, 2004

Agenda Equipment View of the Industry Understanding the technology Model system for next generation media Process Module Opportunities and Capabilities High utilization magnetrons for magnetic, non-magnetic, and soft underlayer materials Protective films: plasma deposited overcoats and vapor deposited lubricants Disk heaters

Equipment View of Industry Conditions Technology Economics Cost Control Defines Success Superb technology remains the foundation Need to Leverage Existing Installed Equipment Factories Expense Requires Maximum Output / ft2 New Media Advances Continuous Source Improvement New Source Requirements Systems Nearing Capacity Limit for Number of Stations Needed Technology and Economics Drive Equipment Design and Function

Understanding the Technology: Roadmaps or Wilderness? Thicker Films for Soft Underlayers? Thinner Films for Magnetic Coupling Layers? More Seed Layers and Super Lattice Structures? Or Fewer Layers? Hotter Disks for Domain Control or Cooler Disks Having No Heat Processing?

Single Disk/Source Sputter Custom or 3rd Party Sources Model System for Next Generation Media Requirements 1. Retain Current Capabilities 2. Allow Fast/Convenient Servicing 3. Minimize Disk Handling 4. Maximize Productivity (Disk/ft2) 5. Enable Process Flexibility 6. Improve Process Station Vacuum 7. Eliminate Batching Effects 8. Prevent Source-to-Source Interference Single Disk/Source Sputter Custom or 3rd Party Sources Same Software, Sources and Components Maximize DPH in Small Footprint

Process Module Opportunities High Utilization Magnetrons Soft underlayer Hard magnetic Non-magnetic Hard Overcoat Sources Vapor Lubrication Disk Heaters

Soft Underlayer Source Requirements Target Thickness > 6 mm Removable Carriers: Platform and Architecture Must Support Carrier Exchange With Minimal Downtime Magnetrons Must Provide Full Surface Erosion and Excellent Inventory (40%+)

High Utilization Magnetrons New Pole Designs for Non-Mag and Hard-Mag Materials Non-Mag: Achieved 60% utilization, <3% uniformity with chromium Hard-Mag: Achieved 68% utilization, <4% uniformity with CoCr, <56% ptf New Pole Design for SUL Designed for full surface erosion Designed for 6 mm FeCoB targets

High Utilization Source for Non-Mag 60% Target Utilization 138 kWhr Target Life 62 Å/kWsec Dep Rate 31 MÅ Target Inventory Better than ±3% Radial Thickness Uniformity

High Utilization Source for Non-Mag 60% Target Utilization 138 kWhr Target Life 62 Å/kWsec Dep Rate 31 MÅ Target Inventory Better than ±3% Radial Thickness Uniformity

High Utilization Source for Hard-Mag 68% Target Utilization 215 kWhr Target Life 66 Å/kWsec Dep Rate 51 MÅ Target Inventory Better than ±4% Radial Thickness Uniformity

High Utilization Source for Hard-Mag 68% Target Utilization 215 kWhr Target Life 66 Å/kWsec Dep Rate 51 MÅ Target Inventory Better than ±4% Radial Thickness Uniformity

High Utilization Source for SUL With Full Surface Erosion Pole BHT14 42% Target Utilization 96 kWhr Target Life

Good Thickness Uniformity (<3%) SUL Pole Design Achieves Full Surface Erosion as well as Good Target Utilization Good Thickness Uniformity (<3%)

(Through SUL Target As Thick As1/4 Inch) SUL Pole Design Achieves Full Surface Erosion as well as Good Target Utilization High Field Strength (Through SUL Target As Thick As1/4 Inch)

Protective Overcoat Technologies Hydrocarbon Gas Derived Films Nearing End of Life at 2nm Solid Source Techniques Allow Greater Density: Filtered Cathodic Vacuum Arc (FCVA), Sputter, Carbon Alternatives Platform Must Be Designed to Accept FCVA 3rd Party Source Single station operation Full integration into hardware and software Alternative Next Generation Films in R&D: Reactive sputter (SiN and others) New RF/DC source being productionized Ionized PVD

Vacuum Vapor Lubrication Conventional Approach . . . Texture & Clean Vacuum Coatings (Cr, Co-alloy, Carbon) Dip Lube Coating Burnish Certify A New Approach . . . Texture & Clean Vacuum Coatings (Cr, Co-alloy, Carbon) Vapor Lube Burnish Certify Vacuum Process Lab Controlled Environment

Process Advantages of Vapor Lubrication 2 4 6 8 10 12 Standard Lube Vapor Lube Cobalt Corrosion Excellent Corrosion Performance CSS Performance Equivalent to Standard Lube Tunable Bonded Thickness Now Adjustable 5 10 15 20 25 30 Vapor Lube Standard Lube Bonded Thickness (Angstroms) Process 1 Process 2 Process 3 Process 4 Process 5 Deposited Thickness = 28 A

Resistive Heater Provides More Uniform Heating of Disk Substrates Provides More Efficient Heating of Glass Substrates Heating Data:

Resistive Heater – Uniformity One Heater Side Only, 65mm Glass Disk, at 1 kW for 6 Seconds, 240 °C Disk Temperature Heating rate 33.3 °C/(kW-sec) Disk temperature uniformity at ± 5 °C using a Inframetrics thermacam

Summary Technology And Economics Continue to Drive Hard Disk Equipment Design and Function Novel Pole Designs Under Test at Intevac for Magnetic and Non- magnetic Materials Achieved up to 70% Utilization and Good Uniformity (3-4%). SUL Pole Design Achieved Full Surface Erosion As Well As Good Target Utilization (45%) and Uniformity (3%) Vapor Lubrication Demonstrated Excellent Corrosion Resistance and CSS Performance Equivalent to Standard Lube Resistive Heater Design Provided More Efficient and Uniform Heating Rates (30-35 °C/kW-s)

Acknowledgements Tina Asher Ian Latchford Pat Ward David Brown Craig Marion Bob Weiss Bruce Kakimoto Hari Ponnekanti Jun Xie Ralph Kerns Bob Ruck