LATERALLY-DRIVEN DEFORMATION-ROBUST MEMS GYROSCOPES WITH THREE SETS OF SYMMETRICALLY ARRANGED FOLDED-BEAM SUSPENSIONS Speaker : 張淵哲 2009 / 11 / 10

Introduction The MEMS vibratory gyroscope, which detects the Coriolis force proportional to the angular velocity, is used in a wide range of applications, such as personal mobile devices and systems that control the stability of automobiles and robotics. In particular, gyroscopes used in automotive systems, have to guarantee long-term stability and high-reliability for over ten years, even when used at a wide range of temperatures and when subject to mechanical vibratory disturbances.

STRUCTURE DESIGN OF DEFORMATION ROBUST GYROSCOPES

FABRICATION PROCESS

SEM micrograph of gyroscopic structure

SIMULATIONS AND RESULTS

pressure controllable laser doppler vibrometer Mode frequencies

Temperature and pressure controllable probe tester

The signal read-out circuitry and experimental setup

CONCLUSION The SAF helps to improve and reduce the mode frequency shift in a wide temperature range. Additionally, by triangularly arranging the three sets of SAF, the nearest spurious mode was able to be separated by more than several kHz from the drive and sense modes. Future research will focus on improving the linearity of the frequency shift.

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