North America Regional Standards Committee (NA RSC) Liaison Report November 2010

Outline Current Structure of NA Standards Committees NARSC Fall 2010 Meeting Highlights Overall TC/WG Updates Upcoming Events NA Standards Staff Changes Regional Staff Contact Information November 2010 NARSC Liaison Report

Current Structure of the NARSC [1/2] NARSC Chair: Jackie Ferrell (ISMI) Chair: Sean Larsen (Cymer) New! Automated Test Equip Paul Roddy (Consultant) Ajay Khoche (Consultant) Gases Tim Volin (Parker Hannifin) Microlithography Wes Erck (W.Erck & Associates) Rick Silver (NIST) HB-LED Iain Black (Philips) Sunil Phatak (Rubicon) Chris Moor (Semilab) Bill Quinn (Veeco) Information & Control David Bricker (AMAT) Jack Ghiselli (Consultant) Lance Rist (ISMI) Compounds Jim Oliver (Northrup Grumman) Russ Kremer (Freiberger) PIC Mutaz Haddadin (Intel) Matt Fuller (Entegris) Technical Architects Board (TAB) James Moyne (AMAT) Yaw Obeng (NIST) EHS (NA) Chris Evanston (Salus Engineering) James Beasley (ISMI) Sean Larsen (Cymer) Eric Sklar (Safety Guru) Liquid Chemicals Frank Flowers (FMC) Frank Parker (ICL Performance) Photovoltaic Heiko Moritz (Caerus Systems) Win Baylies (BayTech Group) MEMS / NEMS Win Baylies (BayTech Group) Mark Crockett (MEMSMART) Silicon Wafer Noel Poduje (SMS) Dinesh Gupta (STA) Facilities Phil Naughton (AMAT) Steve Lewis (CH2M Hill) New! Metrics David Bouldin (Fab Consulting) Mark Frankfurth (Cymer) Traceability Win Baylies (BayTech Group) Yaw Obeng (NIST) FPD (NA) Bill Colbran (Engenuity) November 2010 NARSC Liaison Report

Current Structure of the NARSC [2/2] NARSC Chair: Jackie Ferrell (ISMI) Chair: Sean Larsen (Cymer) FPD (Korea) Jong Seo Lee (Samsung) Il-Ho Kim (LMS) EHS (Taiwan) Shuh-Woei Yu (SAHTECH) Fang-Ming Hsu (TSMC) EHS WG (Korea) Seoung Jong Ko (Hynix) Hyunsuk Kim (Samsung Elec.) FPD Metrology (Korea) Jong Seo Lee (Samsung) Il-Ho Kim (LMS) FPD (Taiwan) Tzeng-Yow Lin (ITRI) Jia-Ming Liu (TDMDA) Facilities (Korea) Kwang Sun Kim (KUT) Insoo Cho (Shinsung ENG) I&C (Taiwan) Robert Chien (TSMC) Photovoltaic (Taiwan) Jeff Lee (Chroma) B.N. Chung (CMS/ITRI) Y.Y. Tsai (Delsolar) J.S. Chen (PVTC/ITRI) Ray Sung (UL Taiwan) I&C (Korea) Chulhong Ahn (Hynix) Sammy Jeong (KC Tech) Gunwoo Lee (Miracom) Regional Committees & Working Groups November 2010 NARSC Liaison Report

NARSC Fall 2010 Meeting (November 7) Meeting Highlights: Supported formation of the NA 3DS-IC (Three-Dimensional Stacked Integrated Circuit) Committee To be submitted for ISC approval at SEMICON Japan 2010 Presentation: Discussion for future formation of the NA PV Automation Committee November 2010 NARSC Liaison Report

NA Standards Fall 2010 Meetings November 8-11 Sunday Monday Tuesday Wednesday Thursday Friday Saturday 7 8 9 10 11 12 13 NARSC EH&S Facilities & Gases HB-LED Information & Control Liquid Chemicals MEMS/NEMS Metrics Photovoltaic Physical Interfaces & Carriers Silicon Wafer Traceability Locations - SEMI - AMAT - Intel November 2010 NARSC Liaison Report

Overall TC/WG Updates (from NA Standards Fall 2010 Meetings) Org. Name Last met on: Progress (p) / Concern (c) / Ballot to be issued (b) / Others (o) NA Automated Test Equipment Committee July 14, 2010 (b) New Standard for Memory STDF (Standard Test Data Format, #4782) balloted for C6-10, but failed to reach 60%. Reballot for C1-11. NA Compound Semiconductor Materials Committee November 2, 2010 (p) New Standard for Round 100mm Germanium Wafers for Solar Cell Applications (#4808) passed TC review. (b) New Standard for GaN Wafers to be balloted for C1-11. (b) M23.3 revision document planned for early 2011 ballot Pending approval from JA CSM committee. NA EHS Committee November 11, 2010 (o) S9 withdrawal ballot passed TC review. (b) S2 revision ballot from S2 Non-Ionizing Radiation TF (#4774) to be balloted for C2-11. NA Facilities & Gases Committee November 9, 2010 (o) Appointed new co-chair Steve Lewis (CH2M Hill). (b) New activity for F47 (voltage sag) revision (#5079). (o) Approved transfer of Equip Fan Filter Unit (EFFU) task force and activity to Korea Facilities TC. NA HB-LED (p) Kick-off meeting held Nov 11 at SEMI HQ, well attended. (p) Approved HB-LED Wafer TF. Plan to form other TFs: carrier, automation, assembly (back-end). November 2010 NARSC Liaison Report

Overall TC/WG Updates (from NA Standards Fall 2010 Meetings) Org. Name Last met on: Progress (p) / Concern (c) / Ballot to be issued (b) / Others (o) NA I&C Committee November 10, 2010 (b) GEM300 TF ballot 4824A (E5 revision) co-written with Korea I&C failed TC review. Reballot in early 2011. (o) Recipe and Parameter (RaP) TF disbanded, remaining activity transferred to Diagnostic Data Acquisition TF. NA Liquid Chemicals Committee November 9, 2010 (p) 2 new activities for statistical methods: Calibrating Particle Measurement Instruments (#5105) & Extrapolating Particle Measurement Data (#5106) NA MEMS / NEMS Committee November 8, 2010 (p) Developing 2 activities for MEMS Packaging: fluid permeation & fluid outgassing (b) Microfluidics flexible tubing (#4691) and MS5 revision (wafer bond strength, #5046) for C1-11 NA Metrics Committee (o) Call for Participation: Expanding scope of E35 (equipment cost of ownership) to include related industries (FPD, PV, MEMS, HB-LED, etc.) NA Microlithography Committee July 13, 2010 (o) Awaiting LOA related to patents assessed as potentially material to SEMI P10 (mask orders). November 2010 NARSC Liaison Report

Overall TC/WG Updates (from NA Standards Fall 2010 Meetings) Org. Name Last met on: Progress (p) / Concern (c) / Ballot to be issued (b) / Others (o) NA PI&C Committee November 10, 2010 (p) New AUX doc – Overview Guide to SEMI Standards for 450 mm wafers (#5108). NA PV Committee (b) New standard: Si Wafers for Use as PV Solar Cells (#4826A) ballot failed TC review, reballot C1-11. (b) Approved 2 new standards: phosphorous oxychloride (#4832B) and measuring BRDF (#4921). (o) Endorsed elevating PV Material TF to PV Material TC (o) Disbanded NA PV Facilities TF. NA Silicon Wafer Committee November 9, 2010 (p) New SNARF for M1 revision to include 450 mm polished wafer (#5090). (p) New SNARF for M49 revision (wafer geometry measurement systems), include ZDD parameter (#5091). (b) Several 5-year review ballots for C1-11. NA Traceability Committee November 11, 2010 (p) Approved AUX doc – List of Authentication Service Bodies for Use with SEMI T20.2 (#5092) November 2010 NARSC Liaison Report

NA Standards Spring 2011 Meetings* March 28–31 SEMI Headquarters in San Jose, California Inviting local companies willing and able to host some of the meetings to maintain one-week format Final schedule to be announced in mid-December November 2010 NARSC Liaison Report

Upcoming NA Meetings Event Name Event Type Contents NA HB-LED Committee Committee & TF Meetings February 22-24, 2011 In conjunction with Strategies in Light Conference Santa Clara, CA NA Microlithography Committee Committee Meeting March 3, 2011 In conjunction with SPIE Advanced Litho Conference San Jose, CA NA Standards Spring 2011 Meetings Standards Meetings March 28-31, 2011 SEMI Headquarters in San Jose, California Meeting venue & dates to be finalized in mid-December NA Compound Semiconductor Materials Committee May 16-19, 2011 In conjunction with CS MANTECH Indian Wells (Palm Springs), CA NA Liquid Chemicals Committee Early April 2011 To be hosted by FMC in Houston, TX Date, time, and venue to be finalized November 2010 NARSC Liaison Report

NA Standards Staff Changes Paul Trio Sr. Manager, NA Standards Operations Operations Committees: I&C, ATE, NARSC Meetings & Events Planning General Information New: HB-LED MEMS Microlithography STEPs/Workshops and Sponsorships Ian McLeod Manager, NA Standards Committees Committees: Compounds Semiconductor Materials / EHS / FPD / Liquid Chemicals / PIC Metrics Membership Kevin Nguyen Committees: Facilities / Gases / PV / PV Automation / Silicon Wafer Traceability November 2010 NARSC Liaison Report

3081 Zanker Road San Jose, CA 95134 U.S.A. Regional Staff Contact Information Name Paul Trio E-mail ptrio@semi.org Phone +1.408.943.7041 Office Address 3081 Zanker Road San Jose, CA 95134 U.S.A. Committees In charge NARSC Automated Test Equipment / HB-LED Information & Control / MEMS / Microlithography November 2010 NARSC Liaison Report

Thank you! November 2010 NARSC Liaison Report