ITRS 2003 Factory Integration Chapter Backup Material ITRS Factory Integation TWG 2018/12/8 ITRS 2003 Factory Integration Chapter Backup Material Agile Manufacturing Concepts 2018/12/8 ITRS Factory Integration TWG FITWG 2000

Agile Manufacturing Means… Quick turn around [*faster cycle] time for production Quick turn around time without productivity deterioration No productivity reduction even if many lots production formed with few wafers Quick capability to product, scale and technology change Quick ramp-up of equipment installation and product Assure high productivity even if low production volume to Satisfy these Requirements… Speed Product: short ramp-up time Equipment: short ramp-up time Product Quick Turn Around Time (QTAT) Cost Equipment high OEE Product yield high at ramp-up 2018/12/8 ITRS Factory Integration TWG

Key Potential Solutions Full Automation Equipment Engineering System Fundamental technology Single Wafer Control Multiple lots/single wafer control in equipment module (group) Process Control Fault Detection and Classification Run to Run Integrated Metrology Direct Transportation Real Time Scheduling (RTS) Supply Chain Management (SCM) 2018/12/8 ITRS Factory Integration TWG

APC and Process Control Capabilities are Key Enablers for Agile Manufacturing Module Flow A Process Steps C D B Target values (Recipe and major parameters) Physical Structure base control Process Engineering Eq. Eq. Process control info. Interpretation into what equipment can execute F/F APC Device structure Optimization Control Information Current center of interest Detailed Eq. Status info. Machine-to-Machine Difference and Adjustment NPW Management and Control Chamber wet cleaning and Specification Time dependent performance change and compensation Eq. Maint. and Rules Eq. Process performance adj info. Manufacturing Experience Resource Consumption Management More focus for agile manufacturing

Interface (Logically Separated) For Data Collection Only Remote monitoring Remote diagnostics Remote de-bugging/ fix Remote sensing Spare parts Mgt. EES Diagram The Equipment Engineering System (EES) will collect data via a new, standardized interface from production equipment. This interface will be for data collection only. Equipment Control will continue to occur through the existing SECS/GEM interface. Supplier Remote Location EES (Equipment Engineering System) Relation between MES and EEC APC App 1 APC App 2 e-Diag App 1 OEE App 1 OEE App2 FDC App1 EE Applications Framework for EE Capabilities EE Data Sharing MES Equipment Control WIP Tracking Factory Scheduling Global EE Data EE Data Collection And Storage Category & Level of EE Data Fire Wall EE Data On Demand EE Access Control Equipment Engineering Network Standardization of EE Data Interface Standard EE Data Interface (Logically Separated) For Data Collection Only Continuous Monitoring Determination of EE Data SECS/GEM Interface for Equipment Control Equipment Performance Integrity EE Data Sampling & Transmission Factory Network 2018/12/8 ITRS Factory Integration TWG

e-Manufacturing Hierarchy ITRS Factory Integation TWG 2018/12/8 e-Manufacturing Hierarchy Company to Company (E-Commerce) Suppliers Company A Company B Factory to Factory (E-Factory) e-diagnostics capability Factory A Factory B firewall Within a Factory (E-Factory) Manufacturing Execution System - MES EES Equipment/AMHS Equipment Engineering System AMHS Eqpt (side view) Ethernet Process or Metrology Equipment (side view) Control System Material Control System - MCS Station Controller 2018/12/8 ITRS Factory Integration TWG FITWG 2000

The e-Business structure for manufacturing 2018/12/8 ITRS Factory Integration TWG

The Next Generation Factory Concept User’s SCM - Supply Chain Management Planning System ….. ….. Direct Transport Mfg. System ….. ….. Agile -Mfg. EES Wafer Level Control ….. ….. E- Diagnostic Supporting System ….. Supplier’s SCM E-Mfg. 2018/12/8 ITRS Factory Integration TWG