Chemical Tool Family

Mega Chemical System Benefits Precise control of constituent concentrations Optimized for chemical requirements Reduced cost of ownership tied to hardware and process operation factors Strong control of global loop pressure and flow Versatile flush & purge design System redundancy, self-redundancy, and auto-switching for dependable system availability Slurry quality analytics by widely differing techniques

Chemical Blend Performance Features UOM MB2500 MB1100 Discharge Flow Rate LPM 19 9.5 Makeup Flow Rate  7.5 2 Discharge Pressure PSIG  20 25 Blend Accuracy % ±0.5 MTTR Hrs <2  <2  MTBF  4000 Uptime  99.5* * Assumes dual pump redundancy; 98.5% with no redundancy.

Chemical Blend Systems MegaBlend 2500 ProQual MegaBlend 1100 The ProQual is an automated chemical blend unit which offers liquid chemistry optimization in small batches for use in a development setting Blends/dilutes chemicals fed from a remote bulk chemical distribution unit

Chemical Delivery Systems Designed for localized dispensing for medium purity applications or as a feed station for larger blending units, providing stabilized filtration as low as 0.05µ MP25 MP100 MP4200 MP500 MP50

Centralized access to primary functions Main Menu Screen Example Centralized access to primary functions

System status can easily be reviewed from the Process Overview screen Process Overview Screen Example System status can easily be reviewed from the Process Overview screen

Tank Overview Screen Example Overview screens provide full automated P&ID views with critical parameter status

Maintenance Screen Example The Maintenance screen allows access to various setup screens and controls

Chemical System Data Sheets Click MegaBlend 1100DT The MegaBlend 1100DT blends/dilutes chemicals fed from a remote bulk chemical distribution unit incorporating a day tank for larger storage capacity with pumped dispense. MegaBlend 1100PV The MegaBlend 1100PV blends/dilutes chemicals that are fed from a remote bulk chemical distribution unit. The blended chemical is transferred to the day tank and one of the two pressure vessels on demand. The blended chemical in the "on-line" pressure vessel is then available to dispense to the use point through an output filter.

Chemical System Data Sheets Click MegaBlend 1100SF The MegaBlend 1100SF blends/dilutes chemicals fed from a remote bulk chemical distribution unit. Stabilized filtration of the day tank eliminates filter shocking using dual pressure vessels with auto-changeover capabilities. MegaBlend 2500SF The MegaBlend 2500SF blends/dilutes chemicals from a remote bulk chemical distribution unit. Precision flowmeters blend up to three chemicals or two chemicals plus DI water to a volumetric accuracy of ± 0.5% relative to incoming chemistry.

Chemical System Data Sheets Click Mega ProQual Chemical Batch Optimization System The Mega ProQual is an automated chemical blend unit which offers liquid chemistry optimization in small batches for use in a development setting; ideal for precisely fine-tuning processes, clean processes, or for creating standardized solutions. MegaPure 25 The MegaPure 25 provides single pass filtration as low as 0.05µ. It is PLC controlled and generally configured to be fed from one or two local stand-alone feed drums. It is designed for localized dispensing for medium purity applications or as a feed station for larger blending units.

Chemical System Data Sheets Click MegaPure 50 The MegaPure 50 provides single pass filtration at 0.05µ. It is PCL controlled and generally configured to be fed from one or two local stand-alone feed drums. It is designed for localized dispensing for medium purity applications or as a feed station for larger blending units. MegaPure 100 The MegaPure 100 with pulsation dampener provides single pass filtration at 0.05µ for acids, bases, and oxidizers with a space efficient footprint.

Chemical System Data Sheets Click MegaPure 500SF The MegaPure 500SF provides exceptional submicron particle performance offering high-purity 0.05µm polishing filtration and a particle performance for most chemicals of less than 10 particles per ml at 0.2µm. MegaPure 4200 The MegaPure 4200SF is designed for ultra high-purity (UHP) chemical dispense for sub 0.18µ line- width applications. The 4200SF provides drum recirculation filtration for transferring filtered chemical into the system day tank, minimizing filtration time to achieve particle guarantees. The 4200SF provides day tank stabilized filtration, using a pressure vessel dispense to minimize filter hydraulic shock.

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