Film thickness determination

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Presentation transcript:

Film thickness determination Dr. E U Masumdar Associate Professor, Department of Physics Rajarshi Shahu Mahavidyalaya, Latur

Spray Deposition Process Exhaust Switch 2 Gas In Switch 1 Substrates Hot Plate Spray Deposition Process

n0 n1 d n2 Incident light ( l ) Detector Reflected light Air Refractive indices n1 F: SnO2 thin film d Film thickness n2 Glass substrate Transmitted light Detector

T l (nm) Calculated Experimental Cauchey’s relation derived from Fresnel’s transmission and reflection coefficients

Substrate Temperature (oC) Thickness (nm) Refractive Index Solution quantity = 20 ml Substrate Temperature (oC) Thickness (nm) Refractive Index 450 440 1.72 475 740 1.65 500 620 1.62 525 445 1.78 Substrate Temperature = 475 oC Solution quantity (ml) Thickness (nm) Refractive Index 10 432 1.88 20 740 1.65 30 1115 40 1250 1.76