Instrumentation and Metrology for Nanomanufacturing -- Industrial Application Focus Areas Thank you, Dave. Before I get started I want to thank the organizing committee for inviting me to speak at this conference. The whole area of nanotechnology is very exciting but what I want to discuss today is how nanotechnology may impact the aviation industry. _________________________ -- F-117. Dr. Sharon Smith Director of Technology Lockheed Martin Corporation January 27-29, 2004 sharon.smith@lmco.com

Nanometrology: Focus Areas In Addition to Advances Addressed in the Other Workshop Sessions, i.e., Nanocharacterization, Namomechanics, and Nanofabrication, Nanomanufacturing Will Require Special Emphasis in the Following Areas During The Next 10 Years, Details to Be Discussed at Workshop:   Development of International Standards, Calibration Tools and Processes The Ability to Support Manufacturing Under Processing Conditions Such As Variable Temperatures, Pressures Automation of the Entire Manufacturing Process, With Self-calibration and Adjustment Need to Identify New Measurement Parameters, TBD, Resulting From nm Size Manufacturing and Tools to Measure Them Development of Modeling and Simulation (M&S) Tools and Analysis Software, With Accuracies at the nm and Smaller Level Higher Throughput Requiring, e.g., Higher Speed of Analysis Such As From AFMs

Industry Focus Areas (cont.)   Integrated Systems, e.g., Automatic Comparison to M&S Data, and Automatic Feed Back Loops, All Needed to Support End Product Quality, e.g., For the Identification of Failure Modes Early in the Process Low Cost for Instrumentation but Also for Measurements and Analyses  Precision and Accuracy, Both of Which Take on a New Importance, When Some Measurands May Be at the Atomic Level Ability to Support Whole System Scale-up, i.e., From Individual Nanocomponents Such As Wires and Quantum Dots to Devices and Meso/macro Components to Systems to Ensure, for Example, That the Nanoproperties Are in Tact As Expected   Ability to Measure Key Parameters Under Stressed Conditions Embedded Sensors Ability to Measure Subsurface Defects The Ability to Support Remote Manufacturing, Including the Metrology Processes During Manufacturing and on Final Products