Japan Micropatterning Committee Liaison Report June, 2011

<Region> <Committee> Outline Leadership Organization Chart Meeting Information Ballot Results New TFOF/SNARF Upcoming Ballot TF/WG reports STEP/Workshop <Month> <Year> <Region> <Committee>

<Region> <Committee> Leadership Committee Co-chairs Iwao Higashikawa (Toshiba) <Month> <Year> <Region> <Committee>

Organization Chart Micropatterning Committee 5 Year Review TF Iwao Higashikawa / Toshiba Mask Data Format for Mask Tools TF Toshio Suzuki / DNP 5 Year Review TF Iwao Higashikawa / Toshiba <Month> <Year> <Region> <Committee>

<Region> <Committee> Meeting Information Last meeting April 22th, 2011 SEMI Japan Office Next meeting (Tentative) December, 2011 If needed, the meeting will be held in September 2011. <Month> <Year> <Region> <Committee>

<Region> <Committee> Ballot Results None <Month> <Year> <Region> <Committee>

<Region> <Committee> New TFOF/SNARF Doc.5229 New SNARF for Revision to SEMI P44-0211, Specification for Open Artwork System Interchange Standard (OASIS) Specific to VSB Mask Writers From Mask Data Format for Mask Tools TF <Month> <Year> <Region> <Committee>

<Region> <Committee> Upcoming Ballot None <Month> <Year> <Region> <Committee>

Mask Data Format for Mask Tools Task Force Toshio Suzuki (DNP) Activity Doc.5229 New SNARF for Revision to SEMI P44-0211, Specification for Open Artwork System Interchange Standard (OASIS) Specific to VSB Mask Writers The information ballot will be issued within this year. Current The next TF meeting will be held on 27 September, 2011. <Month> <Year> <Region> <Committee>

5 Years Review Task Force Iwao Higashikawa (Toshiba) Current Activity None <Month> <Year> <Region> <Committee>

Upcoming STEP/Workshop None <Month> <Year> <Region> <Committee>

Regional Staff Contact Information Name Hiro’fumi Kanno E-mail hkanno@semi.org Phone +81.3.3222.6018 Office Address 4-7-15 Kudan-minami, Chiyoda-ku, Tokyo 102-0074 Japan Committees In charge Japan Micropatterning Committee <Month> <Year> <Region> <Committee>