Japan Micropatterning Committee Liaison Report March, 2011

<Region> <Committee> Outline Leadership Organization Chart Meeting Information Ballot Results New TFOF/SNARF Upcoming Ballot TF/WG reports STEP/Workshop <Month> <Year> <Region> <Committee>

<Region> <Committee> Leadership Committee Co-chairs Iwao Higashikawa (Toshiba) <Month> <Year> <Region> <Committee>

Organization Chart Micropatterning Committee 5 Year Review TF Iwao Higashikawa / Toshiba Mask Data Format for Mask Tools TF Toshio Suzuki / DNP 5 Year Review TF Iwao Higashikawa / Toshiba <Month> <Year> <Region> <Committee>

<Region> <Committee> Meeting Information Last meeting September 29th, 2010 SEMI Japan Tokyo Office Next meeting April 22th, 2011 <Month> <Year> <Region> <Committee>

<Region> <Committee> Ballot Results The following two documents passed at the previous Japan Micropatterning Committee in September, 2010. 4840 Revision to SEMI P45-0708, Specification for Job Deck Data Format for Mask Tools 4841 Revision to SEMI P44-0709, Specification for Open Artwork System Intercharge Standard (OASIS) Specific to Mask Tools <Month> <Year> <Region> <Committee>

<Region> <Committee> New TFOF/SNARF None <Month> <Year> <Region> <Committee>

<Region> <Committee> Upcoming Ballot None <Month> <Year> <Region> <Committee>

Mask Data Format for Mask Tools Task Force Toshio Suzuki (DNP) Activity Doc. 4840, Revision to SEMI P45-0708, Specification for Job Deck Data Format for Mask Tools Passed Doc. 4841, Revision to SEMI P44-0709, Specification for Open Artwork System Intercharge Standard (OASIS) Specific to Mask Tools Current The TF met on 15th February, 2011 and discuss the revision to SEMI P45&P44. The next TF meeting will be held on 28th June, 2011. <Month> <Year> <Region> <Committee>

5 Years Review Task Force Iwao Higashikawa (Toshiba) Current Activity None <Month> <Year> <Region> <Committee>

Upcoming STEP/Workshop None <Month> <Year> <Region> <Committee>

Regional Staff Contact Information Name Hiro’fumi Kanno E-mail hkanno@semi.org Phone +81.3.3222.6018 Office Address 4-7-15 Kudan-minami, Chiyoda-ku, Tokyo 102-0074 Japan Committees In charge Japan Micropatterning Committee <Month> <Year> <Region> <Committee>