Lecture 3: Resistivity 1.3 Wafer Mapping 1.3.1 Double Implant.

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Presentation transcript:

Lecture 3: Resistivity 1.3 Wafer Mapping 1.3.1 Double Implant

1.3.2 Applied Current Tomography 1.3.3 Modulated Photo-reflectance

Lateral; How about vertical? 1.3.4 Optical Densitometry implants doping resistivity Lateral; How about vertical?

Removing, Measuring; …… 1.4 Resistivity Profiling 1.4.1 Differential Hall Effect Removing, Measuring; ……

1.4.2 Spreading Resistance Profiling

1.5 Contactless Methods 1.5.1 Eddy Current Q changes when more power absorbed More power absorbed due to conductivity Or resistivity of electronic materials or wafers !

1.5.2 Confocal Resonator Surface resistance analyzer (SRA)

1.6 Conductivity Type 1.6.1 From information sheet or…… 1.6.2 Thermoelectric probe method (Seebeck) 1.6.3 Rectification method 1.6.4 Hall effect