Chem 750/7530 Antony D. Han.

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Presentation transcript:

Chem 750/7530 Antony D. Han

Experiments 1~3 : Vapour phase CVD Ferrocene/benzene NiCl2 /(benzene)1/2 and (methanol)1/2 4~5 : thermal CVD Silicon substrates with Ni catalysis 5 nm and 10 nm of Ni benzene as the C source

Results and discussion VPCVD Thermal CVD

Why? — two mechanism Root growth: Tip growth: the reverse mechanism

However Conclusion: Well explained the difference between the experimental observation and conventional theoretical mechanism Proposed a mechanism for vapour phase CVD Compared between conventional thermal CVD and spray pyrolysis ( VPCVD)