North America Metrics Technical Committee Liaison Report April 2011

Outline Leadership Organization Chart Meeting Information Ballot Results New TFOF/SNARF Upcoming Ballot Subcommittee/TF/WG reports April 2011 NA Metrics

Leadership Committee Co-chairs: GCS Voters: David Bouldin (Fab Consulting) Mark Frankfurth (Cymer) GCS Voters: April 2011 NA Metrics

Leadership / Task Force Changes Summary Leadership Changes: Norrell Rose (Intel) stepped down as Equipment Training TF Leader, replaced by Mark Cohran (Intel) Brad Van Eck (ISMI) stepped down as PETM TF leader, replacement to be determined April 2011 NA Metrics

Organization Chart NA Metrics Committee EMC TF E10 Revision TF Legend C Chair/Co-Chair TF Task Force SE Standards Engineer TA Technical Architect TE Technical Editor SC Subcommittee VC Vice Chair NA Metrics Committee C: David Bouldin (Fab Consulting) C: Mark Frankfurth (Cymer) TEs: Chona Shumate (Cymer), Carolyn Busing TA: Greg Francis (Cymer) Staff: Ian McLeod EMC TF L: Vladimir Kraz (BestESD) L: Mark Frankfurth (Cymer) E10 Revision TF L: Michael Werre (Intel) L: David Busing (KLA-Tencor) Metrics Education/Adoption SC C: Open ESD/ESC TF L: Arnie Steinman (Electronics Workshop) Int’l. Environmental Contamination Ctrl. TF JA L: Mikio Furukawa (SEP) EU L: Michael Otto (Fraunhofer) NA L: Open Equipment Productivity Metrics TF L: Open Equipment COO TF L: Daren Dance (WWK) L: David Bouldin (Fab Consulting) Product & Equipment Time Metrics TF L: Open Equipment Training TF L: Chona Shumate (Cymer) L: Mark Cohran (Intel) Factory Level Productivity Metrics TF L: Ron Billings (Ga. Tech/FABQ) L: Jim Irwin (Irwin Consulting) Eq. Documentation TF L: David Bouldin (Fab Consulting) NOTE: Italics means group is currently inactive. April 2011 NA Metrics

Meeting Information Last meeting Next meeting 2011/03/30 @ NA Spring 2011 Meetings SEMI HQ, San Jose, CA Next meeting 2010/07/13 @ SEMICON West 2011 San Francisco, CA April 2011 NA Metrics

Ballot Results Passed Doc. 4730A, New Standard: Guide for Identification and Classification of Training Tiers April 2011 NA Metrics

New TFOF/SNARF TFOFs - None SNARFs ESD/ESC TF: 5169, Revision to SEMI E78-0309, Guide to Assess and Control Electrostatic Discharge (ESD) and Electrostatic Attraction (ESA) for Equipment Also, the E10 Revision TF updated its TFOF and the SNARF for Document 3846 (Revision to SEMI E10-0304E, Specification for Definition and Measurement of Equipment Reliability, Availability, and Maintainability (RAM)) April 2011 NA Metrics

Upcoming Ballots Cycle 4-11 3847C, Revision to SEMI E33-94, Specification for Semiconductor Manufacturing Facility Electromagnetic Compatibility 3846, Revision to SEMI E10-0304E, Specification for Definition and Measurement of Equipment Reliability, Availability, and Maintainability (RAM) 4783, New Standard: Guide to Handling Extremely Electrostatic Sensitive (EES) Devices April 2011 NA Metrics

Subcommittee & TF Activities [1/2] EMC TF TF has completed review of responses to 3847B and has updated the draft document. Doc. #3847C is planned for ballot in Cycle 4-11. ESD/ESC TF Doc. #4783 is planned for ballot in Cycle 4-11. SNARF for revisions to E78 approved. Equipment Cost of Ownership TF Revisions to E35 and E140 are in progress. April 2011 NA Metrics

Subcommittee & TF Activities [2/2] Equipment Training TF Doc. #4730A approved at Spring 2011 Meetings. E10 Revision TF Information ballot issued in March; very little feedback received Document 3846 planned for ballot in C4-11. PETM TF The search for a replacement TF leader is in progress. April 2011 NA Metrics

Regional Staff Contact Information Name Ian McLeod E-mail imcleod@semi.org Phone 1.408.943.6996 Office Address North America Committees etc. Compound Semiconductor Materials Environmental, Health, and Safety Flat Panel Display Liquid Chemicals Metrics Physical Interfaces & Carriers Membership April 2011 NA Metrics